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GB/T 16945-2009: Gas for electronic industry -- Argon
Status: Valid GB/T 16945: Evolution and historical versions
| Standard ID | Contents [version] | USD | STEP2 | [PDF] delivered in | Standard Title (Description) | Status | PDF |
| GB/T 16945-2009 | English | 149 |
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Gas for electronic industry -- Argon
| Valid |
GB/T 16945-2009
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| GB/T 16945-1997 | English | 239 |
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Gases for electronic industry--Argon
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GB/T 16945-1997
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PDF similar to GB/T 16945-2009
Basic data | Standard ID | GB/T 16945-2009 (GB/T16945-2009) | | Description (Translated English) | Gas for electronic industry -- Argon | | Sector / Industry | National Standard (Recommended) | | Classification of Chinese Standard | G86 | | Classification of International Standard | 71.100.20 | | Word Count Estimation | 5,573 | | Date of Issue | 2009-10-30 | | Date of Implementation | 2010-05-01 | | Older Standard (superseded by this standard) | GB/T 16945-1997 | | Quoted Standard | GB/T 3723; GB/T 4842-2006; GB/T 5832.1; GB/T 8984 | | Regulation (derived from) | National Standard Approval Announcement 2009 No.12 (Total No.152) | | Issuing agency(ies) | General Administration of Quality Supervision, Inspection and Quarantine of the People's Republic of China, Standardization Administration of the People's Republic of China | | Summary | This standard specifies the technical requirements of argon, test methods and packaging, signs, storage and safety. This standard applies to deep- law from the air, liquid and gaseous argon and ammonia exhaust gas purification method has been extracted argon. | GB/T 16945-2009: Gas for electronic industry -- Argon---This is a DRAFT version for illustration, not a final translation. Full copy of true-PDF in English version (including equations, symbols, images, flow-chart, tables, and figures etc.) will be manually/carefully translated upon your order.
Gas for electronic industry. Argon
ICS 71.100.20
G86
National Standards of People's Republic of China
Replacing GB/T 16945-1997
Argon gas for electronics industry
Posted 2009-10-30
2010-05-01 implementation
Administration of Quality Supervision, Inspection and Quarantine of People's Republic of China
Standardization Administration of China released
Foreword
This standard replaces GB/T 16945-1997 "Electronic industrial gases argon."
This standard and GB/T 16945-1997 compared to the main changes are as follows.
--- Modify the scope of argon (GB/T 16945-1997 of Chapter 1, Chapter 1 of this edition);
--- Increase Normative references (GB/T 16945-1997 of Chapter 2, Section 2 of this edition);
--- Modify the content of the technical indicators. add a class purity and impurity content (GB/T 16945-1997 of Chapter 3, Section 3 of this edition);
--- Modify bottled argon sampling method (GB/T 16945-1997 4.1.1, this version 4.1.1);
--- Increased manifold Court equipment, large capacity seamless steel cylinders and Dewar argon canned products and provides test methods (see 4.1.1);
--- Modify argon sampling piped (GB/T 16945-1997 4.1.1, this version 4.1.2);
--- Increasing the sampling argon safety requirements (see Section 4.1.3);
--- Modify hydrogen, oxygen, nitrogen, carbon monoxide and carbon dioxide measurement method (GB/T 16945-1997 of 4.3,4.4,4.5, Excerpts
4.3);
--- Add another method for the determination of total hydrocarbons; when a variety of analytical methods appears to increase the arbitration provisions (see 4.3,4.4,4.5);
--- Modify moisture measurement method (GB/T 16945-1997 4.7, this version 4.5);
--- Modify signs, packaging, storage and security (GB/T 16945-1997 of Chapter 5, Chapter 5 of this edition).
This standard by the National Standardization Technical Committee of semiconductor materials and equipment proposed.
This standard by the National Standardization Technical Committee materials and equipment gas branch semiconductors.
This standard was drafted. Beijing helium gas-North Cape Industrial Co., Southwest Chemical Industry Research and Design Institute.
The main drafters of this standard. Zhaojun Xiu, Zhou Pengyun.
This standard replaces the standards previously issued as follows.
--- GB/T 16945-1997.
Argon gas for electronics industry
1 Scope
This standard specifies the technical requirements argon, test methods and packaging, labeling, storage and security.
This standard applies to liquid and gaseous argon and purified cryogenic extraction method from the air, ammonia tail gas obtained in argon.
Ions and reactive ion etching agent and a retreat for argon purge and pressurization system of protection, it can be used for chemical vapor deposition, sputtering, etc.
Fire different processes.
Molecular formula. Ar.
Molecular Weight. 39.948 (according to 2005 international relative atomic mass).
2 Normative references
The following documents contain provisions which, through reference in this standard and become the standard terms. For dated references, subsequent
Amendments (not including errata content) or revisions do not apply to this standard, however, encourage the parties to the agreement are based on research
Whether the latest versions of these documents. For undated reference documents, the latest versions apply to this standard.
GB/T 3723 Sampling of chemical products for industrial use General Safety
GB/T 4842-2006 argon
GB/T 5832.1 Determination of moisture in the gas electrolysis
GB/T 8984 of carbon monoxide, carbon dioxide and hydrocarbons by gas chromatography
3 Technical requirements
3.1 quality argon gas for electronics industry should meet the requirements of Table 1.
Table 1 Technical Specifications
Item Index
Argon (Ar) purity (volume fraction)/10-2 ≥ 99.9999 99.9992
Hydrogen (H2) content (volume fraction)/10-6 < 0.1 1
Nitrogen (N2) content (volume fraction)/10-6 < 0.5 5
Oxygen (O2) content (volume fraction)/10-6 < 0.2 0.5
Carbon monoxide (CO) and carbon dioxide (CO2) Total amount (volume fraction)/10-6 <
Carbon monoxide. 0.1
Carbon dioxide. 0.1
0.5
Total hydrocarbons (methane) content (volume fraction)/10-6 < 0.1 0.5
Water (H2O) content (volume fraction)/10-6 < 0.2 0.5
Total impurity content (volume fraction)/10-6 ≤ 1 8
Particles supply and demand sides agreed to supply and demand sides agreed
Water 3.2 liquid argon gasification should be measured after.
Test Method 4
4.1 Sampling and judging and Retest
4.1.1 bottled, container loading Pavilion, a large volume of seamless steel gas bottles and cans Dewar argon product should be individually tested and acceptance. When the test results
When any of the indicators do not meet the technical requirements of this standard, it is judged that the product failed. The company should ensure that each product meets this package argon
Standard technical requirements.
4.1.2 stable production of gaseous argon piped sampling plan is determined by the supply and demand sides. Enterprises should ensure that pipeline operators argon product
The combined standard technical requirements.
4.1.3 Sampling argon security shall comply with GB/T 3723 of the relevant provisions.
Argon Purity 4.2
Argon purity according to equation (1).
= 100- (1 + 2 + 3 + 4 + 5 + 6) × 10-4 (1)
Where.
--- purity argon (volume fraction)/10-2;
1 --- hydrogen content (volume fraction)/10-6;
2 --- nitrogen content (volume fraction)/10-6;
3 --- oxygen content (volume fraction)/10-6;
4 --- carbon monoxide + carbon dioxide content (volume fraction)/10-6;
5 --- total hydrocarbons (methane) content (volume fraction)/10-6;
6 --- moisture content (volume fraction)/10-6.
4.3 Determination of hydrogen, oxygen, nitrogen, carbon monoxide and carbon dioxide content
Hydrogen, oxygen, nitrogen, carbon monoxide and carbon dioxide measurement method according to GB/T 4842-2006 4.3 requirements.
Instrument detection limit. 0.05 × 10-6 (volume fraction).
4.4 Determination of total hydrocarbons (methane) content of
Determination of Trace Argon total hydrocarbon content according to the method GB/T 8984 provisions or other equivalent method. When the result of the above determination objections
When, in the method GB/T 8984 provisions for arbitration.
Instrument detection limit. 0.05 × 10-6 (volume fraction).
4.5 Gas Standard
Content of the gas component of the standard sample (1 ~ 5) × 10-6 (volume fraction), the balance gas is argon.
4.6 Determination of moisture content
According to GB/T 5832.1 execution.
Instrument detection limit. 0.05 × 10-6 (volume fraction).
Allows the use of other equivalent method for determining the moisture content of argon. When measuring disagrees with the results, method GB/T 5832.1 provisions
The arbitration method.
5 logo, packaging, storage and security
5.1 inner surface treatment is recommended to use cylinders, the inner surface of the cylinder shall meet the standards for moisture and particulate requirements.
It should be marked "Electronic argon" 5.2 containers.
Press the remaining 5.3 GB/T 4842-2006 the provisions of Chapter 5.
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