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GB/T 16943-2009: Gas for electronic industry -- Helium
Status: Valid GB/T 16943: Evolution and historical versions
| Standard ID | Contents [version] | USD | STEP2 | [PDF] delivered in | Standard Title (Description) | Status | PDF |
| GB/T 16943-2009 | English | 189 |
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3 days [Need to translate]
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Gas for electronic industry -- Helium
| Valid |
GB/T 16943-2009
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| GB/T 16943-1997 | English | 239 |
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Gases for electronic industry--Helium
| Obsolete |
GB/T 16943-1997
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PDF similar to GB/T 16943-2009
Basic data | Standard ID | GB/T 16943-2009 (GB/T16943-2009) | | Description (Translated English) | Gas for electronic industry -- Helium | | Sector / Industry | National Standard (Recommended) | | Classification of Chinese Standard | G86 | | Classification of International Standard | 71.100.20 | | Word Count Estimation | 8,835 | | Date of Issue | 2009-10-30 | | Date of Implementation | 2010-05-01 | | Older Standard (superseded by this standard) | GB/T 16943-1997 | | Quoted Standard | GB 190-2009; GB/T 3723; GB 5099; GB/T 5832.1; GB/T 6285; GB 7144; GB/T 8984; GB 14194; GB 16912; Pressure Vessel Safety Supervision; ; cylinder pressure Safety Supervision pipeline safety management and monitoring requirements | | Regulation (derived from) | National Standard Approval Announcement 2009 No.12 (Total No.152) | | Issuing agency(ies) | General Administration of Quality Supervision, Inspection and Quarantine of the People's Republic of China, Standardization Administration of the People's Republic of China | | Summary | This standard specifies the technical requirements of helium, test methods and packaging, signs, storage and safety. This standard applies to natural gas from the cryogenic method, air and purge gas plant extract gaseous helium and all the states, as well as a method to obtain purified helium. They are used as a cleaning gas in the semiconductor manufacturing, pressurized gas, but also as a carrier gas and protective gas. | GB/T 16943-2009: Gas for electronic industry -- Helium---This is a DRAFT version for illustration, not a final translation. Full copy of true-PDF in English version (including equations, symbols, images, flow-chart, tables, and figures etc.) will be manually/carefully translated upon your order.
Gas for electronic industry. Helium
ICS 71.100.20
G86
National Standards of People's Republic of China
Replacing GB/T 16943-1997
Electronic industrial gas helium
Posted 2009-10-30
2010-05-01 implementation
Administration of Quality Supervision, Inspection and Quarantine of People's Republic of China
Standardization Administration of China released
Foreword
This standard replaces GB/T 16943-1997 "Electronic industrial gases helium."
This standard and GB/T 16943-1997 compared to the main changes are as follows.
--- Modify the scope of helium (GB/T 16943-1997 Chapter 1, Chapter 1 of this edition);
--- Modify Normative references (GB/T 16943-1997 of Chapter 2, this version of Chapter 2);
--- Modify the content of the technical indicators. increase product purity and a class of impurities (GB/T 16943-1997 Chapter 3, the first edition
Chapter 3);
--- Bottled helium modify the sampling method (GB/T 16943-1997 4.1, this version 4.1.1);
--- Increased manifold Court equipment, large volume seamless steel gas bottles and cans helium Dewar products and provides for testing methods (see 4.1.1);
--- Increasing the helium pipeline products and provides for testing methods (see 4.1.2);
--- Increasing the sampling helium security requirements (see Section 4.1.3);
--- Add a new method of analysis. Determination of helium increases with helium oxygen discharge ionization gas chromatography, carbon monoxide and carbon dioxide group
Points; add another method for the determination of total hydrocarbon content; when a variety of analytical methods appears to increase the arbitration process (see 4.3);
--- Modify moisture measurement method (GB/T 16945-1997 4.5, this version 4.5);
--- Modify signs, packaging, storage and security (GB/T 16943-1997 of Chapter 5, Chapter 5 of this edition);
--- Increased safety requirements (see 5.6);
--- Increase normative appendix A, and measured by the helium ionization gas chromatography helium, oxygen, nitrogen, carbon monoxide and carbon dioxide group
The method of sub-write the appendix (see Appendix A).
Appendix A of this standard is a normative appendix.
This standard by the National Standardization Technical Committee of semiconductor materials and equipment proposed.
This standard by the National Standardization Technical Committee materials and equipment gas branch semiconductors.
This standard was drafted. Southwest Oil and Gas Field Branch Chengdu Natural Gas Chemical Plant, Beijing helium gas-North Cape Industrial Co., Southwest
Chemical Engineering Research and Design Institute.
The main drafters of this standard. Liuze Jun, Fu Yongcheng, Zhaojun Xiu, Zhou Pengyun.
This standard replaces the standards previously issued as follows.
--- GB/T 16943-1997.
Electronic industrial gas helium
1 Scope
This standard specifies the technical requirements of helium, test methods and packaging, labeling, storage and security.
This standard applies to cryogenically deflated extract gaseous and liquid helium from natural gas, air and plant relaxation and purification methods
Helium. They are used in semiconductor manufacturing purge gas, pressurized gas, also used as a carrier gas and protection gas.
Molecular formula. He.
Molecular Weight. 4.003 (according to 2005 international relative atomic mass).
2 Normative references
The following documents contain provisions which, through reference in this standard and become the standard terms. For dated references, subsequent
Amendments (not including errata content) or revisions do not apply to this standard, however, encourage the parties to the agreement are based on research
Whether the latest versions of these documents. For undated reference documents, the latest versions apply to this standard.
GB 190-2009 dangerous goods packaging logo
GB/T 3723 Sampling of chemical products for industrial use General Safety
GB 5099 seamless steel gas cylinders
GB/T 5832.1 Determination of moisture in the gas electrolysis
Determination of GB/T 6285 trace gas oxygen electrochemical
GB 7144 cylinders color logo
GB/T 8984 of carbon monoxide, carbon dioxide and hydrocarbons by gas chromatography
GB 14194 permanent gas cylinders
GB 16912 Deep frozen production of oxygen and related gas safety technical regulations
Gas Cylinder Safety Supervision
Pressure Vessel Safety Supervision
Pressure pipeline safety management and monitoring requirements
3 Technical requirements
Quality 3.1 helium should be consistent with the requirements of Table 1.
Table 1 Technical Specifications
Item Index
Helium (He) purity (volume fraction)/10-2 ≥ 99.9999 99.9995
Carbon monoxide (CO) and carbon dioxide (CO2) Total amount (volume fraction)/10-6 <
Carbon monoxide. 0.1
Carbon dioxide. 0.1
Nitrogen (N2) content (volume fraction)/10-6 < 0.5 2
Oxygen (O2) content (volume fraction)/10-6 < 0.2 0.5
Total hydrocarbons (methane) content (volume fraction)/10-6 < 0.1 0.5
Water (H2O) content (volume fraction)/10-6 < 0.2 0.5
Total impurity content (volume fraction)/10-6 ≤ 1 5
Particles supply and demand sides agreed to supply and demand sides agreed
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