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GB/T 16878-1997 English PDF

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GB/T 16878-1997: Specification for metrology pattern cells for integrated circuit manufacture
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GB/T 16878-1997English389 Add to Cart 3 days [Need to translate] Specification for metrology pattern cells for integrated circuit manufacture   GB/T 16878-1997

PDF similar to GB/T 16878-1997


Standard similar to GB/T 16878-1997

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Basic data

Standard ID GB/T 16878-1997 (GB/T16878-1997)
Description (Translated English) Specification for metrology pattern cells for integrated circuit manufacture
Sector / Industry National Standard (Recommended)
Classification of Chinese Standard L97
Classification of International Standard 31.02
Word Count Estimation 11,126
Date of Issue 6/20/1997
Date of Implementation 3/1/1998
Adopted Standard SMEI P19-1992, IDT
Issuing agency(ies) State Bureau of Technical Supervision
Summary This standard specifies several standard test patterns for micro graphics device used in the production of integrated circuits, measurement instruments and processes consistent with the comprehensive assessment and testing. The standard width for the needs of metrology, resolution test and proximity effects testing requirements for certain types of test patterns shape the basic unit, the general size, and the recommended layout and design rules. These include standard graphics available optical microscopy, electron microscopy and electron microprobe measurements with various graphic elements. This standard does not specify the measurement techniques to verify the size of the master key test pattern, nor specify how to measure the resist pattern on the wafer, the only requirements for certain kinds of necessary basic test pattern, and the user's actual implementation in line with the standard test pattern.

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