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Standard for design of electronic industry emissions treatment engineering
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GB 51401-2019
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Standard similar to GB 51401-2019 GB 50694 GB 50646 GB 51392 Basic data | Standard ID | GB 51401-2019 (GB51401-2019) | | Description (Translated English) | Standard for design of electronic industry emissions treatment engineering | | Sector / Industry | National Standard | | Classification of Chinese Standard | P82 | | Classification of International Standard | 31.020 | | Word Count Estimation | 115,162 | | Date of Issue | 2019 | | Date of Implementation | 2020-04-01 | | Issuing agency(ies) | Ministry of Housing and Urban-Rural Development of the People's Republic of China; State Administration for Market Regulation | GB 51401-2019: Standard for design of electronic industry emissions treatment engineering---This is a DRAFT version for illustration, not a final translation. Full copy of true-PDF in English version (including equations, symbols, images, flow-chart, tables, and figures etc.) will be manually/carefully translated upon your order.
1 General
1.0.1 In order to implement the relevant national laws, regulations and regulations in the design of waste gas treatment projects in the electronic industry, standardize the design content and depth of the project, improve the design level of the project, and achieve environmental protection, energy and resource conservation, advanced technology and economical This standard is formulated to meet the requirements of reasonableness and guarantee of design quality and safety.
1.0.2 This standard is applicable to the design of new construction, reconstruction and expansion of electronic industry waste gas treatment projects.
1.0.3 In addition to complying with this standard, the engineering design of waste gas treatment in the electronic industry shall also comply with the current relevant national standards.
2 terms
2.0.1 Closed box enclosure
A solid structure used to separate a space with ventilation facilities from other spaces with or without ventilation facilities.
2.0.2 Exhausting static pressure of equipment
The pressure difference between the inside and outside of the closed box of the equipment that needs to be exhausted, that is, the difference between the pressure inside the closed box of the equipment and the pressure of the environment where the equipment is located, usually a negative value, and the unit is Pa.
2.0.3 incompatible
The unintentional combination of chemical substances may produce violent reactions or uncontrollable conditions, and the energy released may cause danger.
2.0.4 local exhaust
The working principle of local exhaust is to capture pollutants at or near the pollution source and discharge them to the external environment, usually through a treatment device that purifies the air or destroys the pollution factors.
2.0.5 acid contaminated exhaust
The general term for acidic pollutant gases produced during fuel combustion and production processes in the factory area of an enterprise. They usually dissolve in water and react to form weak acids, including sulfur dioxide, hydrogen sulfide, fluoride, chlorine, hydrogen chloride, phosphoric acid, nitric acid, sulfuric acid, etc.
2.0.6 Alkaline contaminated exhaust
The general term for alkaline pollutant gases generated during the production process, which can usually react with acids to form salt compounds, including ammonia, amine compounds, and sodium hydroxide.
2.0.7 special contaminated exhaust
Waste gas containing toxic, corrosive, oxidizing, spontaneously ignitable, flammable, inert and other substances emitted by chemical vapor deposition, diffusion, epitaxy, ion implantation, dry etching and other process equipment in the production process of electronic products.
2.0.8 Perfluorocompounds (PFCs)
Fluorine compounds with high global warming potential (GWP) used in chemical vapor deposition, dry etching and other processes in the production process of the electronics industry, including perfluorinated compounds and hydrofluorocarbons (HFCs), such as carbon tetrafluoride (CF4), hexafluoroethane (C2F6), octafluoropropane (C3F8), octafluorocyclobutane (c-C4F8), nitrogen trifluoride (NF3), sulfur hexafluoride (SF6) and trifluoromethane (CHF3). The above-mentioned perfluorinated compounds and hydrofluorocarbons are collectively referred to as perfluorinated compounds in the industry.
2.0.9 Immediately dangerous to life and health (IDLH)
The environmental concentration that is immediately harmful to life and causes irreversible adverse effects on health, or the environmental concentration that reduces the ability of people to escape.
2.0.10 restricted-flow orifice
It is a device placed in the valve body of the gas cylinder to limit the maximum flow rate within a certain range.
2.0.11 Volatile organic compounds (VOCs)
All organic compounds with a boiling point between 50°C and 250°C and a vapor pressure greater than or equal to 0.01kPa at a temperature of 293.15K, or that can be emitted into the air in the form of gaseous molecules, excluding methane.
2.0.12 point-of-use abatement (POU) of tail gas treatment equipment
The equipment that is installed near the process production equipment and treats the exhaust gas is usually called exhaust pretreatment equipment or on-site exhaust gas treatment equipment.
2.0.13 Centralized abatement system
It is usually located at the end of the exhaust gas system, and the specific pollution factors contained in the exhaust gas are finally reduced before being discharged into the atmosphere, and the treatment system reaches the specified emission concentration or standard.
2.0.14 Rotor-concentrator system
After the volatile organic waste gas passes through the adsorption area of the rotor, its pollution factors can be effectively adsorbed in the adsorption material of the rotor, and desorbed by the high-temperature air with a small flow rate in the desorption area of the rotor, so that low concentration and large air volume A system that concentrates volatile organic waste gas into high-concentration, low-volume volatile organic waste gas.
2.0.15 regenerative thermal oxidizing system
The heat storage bed absorbs the heat of high-temperature flue gas, and preheats the untreated low-temperature exhaust gas, and the exhaust gas after heat absorption and heat-up destroys its pollution factor structure through high-temperature cracking.
2.0.16 Packed-bed scrubber of exhaust gas treatment equipment
Waste gas treatment equipment that increases the contact area of gas-liquid waste gas through fillers, including waste gas treatment equipment such as the body, packing layer, demister layer, circulating spray system, circulating pump, liquid storage tank, and control system, is usually divided into horizontal and vertical Mode.
2.0.17 Press-in exhaust gas treatment system blow-through abatement system
The fan is located upstream of the airflow of the exhaust gas treatment equipment, and the exhaust gas treatment equipment is a positive pressure treatment system relative to the environment in which it is located.
2.0.18 drawing out abatement system
The fan is located downstream of the exhaust gas treatment equipment, and the exhaust gas treatment equipment is a negative pressure treatment system relative to the environment.
2.0.19 Blow-draw abatement system
Fans are installed at the inlet and outlet of the exhaust gas treatment equipment, and the exhaust gas treatment equipment is a treatment system with a slight negative pressure or a slight positive pressure relative to the environment.
2.0.20 Time-weighted average allowable concentration permissible concentrationtime weighted average (PC-TWA)
The average allowable exposure concentration for 8h working days and 40h working weeks specified with time as the weight.
2.0.21 Permissible concentration-short term exposure limit (PC-STEL)
Under the premise of complying with PC-TWA, the concentration allowed for short-term (15min) exposure.
2.0.22 The maximum allowable concentration maximum allowable concentration (MAC)
The concentration of harmful substances in the air of the workplace should not exceed.
3 Basic Regulations
3.0.1 The process and production equipment that produces harmful substances should be automated, and measures should be taken for sealing, isolation and negative pressure operation. For the harmful substances that are unavoidably released during the production process, purification measures should be taken before discharge, and the relevant pollutant discharge standards should be met.
3.0.2 The exhaust system should be set according to the type of exhaust gas and the principle of incompatibility.
3.0.3 In one of the following situations, the exhaust system shall be installed separately.
1 The mixture of different harmful substances at different exhaust points can cause combustion or explosion;
2 Can produce or intensify corrosiveness or toxicity after mixing;
3 After mixing, it is easy to condense steam and accumulate dust;
4 rooms and equipment emitting extremely poisonous and highly toxic substances;
5 Exhaust air contains combustible and explosive gas.
3.0.4 When the demand pressure difference of the exhaust point is more than 250Pa, and the larger absolute value of the required pressure appears in the last third of the pipeline of the system, it is advisable to install the exhaust system separately.
3.0.5 The exhaust system should be calculated according to the exhaust volume of each process equipment at the maximum production capacity, and the air volume and exhaust pipe size of the exhaust gas treatment system should be determined accordingly.
3.0.6 The design of the exhaust system shall meet the following requirements.
1 The local exhaust system containing combustible and explosive substances shall take corresponding fire and explosion prevention measures according to the physical and chemical properties;
2 When the concentration or discharge rate of pollutants in the exhaust air exceeds the national and regional pollutant discharge standards, purification treatment should be carried out.
3.0.7 The air volume of the exhaust system for excluding combustible and explosive hazardous substances shall be determined through calculation and shall comply with the following regulations.
1 When a local exhaust system is used, the air volume shall be calculated assuming that the concentration of combustible and explosive hazardous substances in the air duct is not greater than 50% of the lower explosion limit under normal operation and accident conditions.
2 The exhaust air volume of areas with combustion and explosives shall comply with the relevant provisions of the current national standard "Code for Design of Electric Power Installations in Explosive Hazardous Environments" GB 50058.
3.0.8 When the equipment of the exhaust gas treatment system meets one of the following conditions, it shall be explosion-proof.
1 When it is directly arranged in the explosion hazardous area;
2 Excluding, transporting or handling Class A and Class B substances, the concentration of which is 10% or above the lower explosion limit;
3 Exclude, convey or handle dust and fibrous substances that may be combustible or explosive, and the dust concentration is 25% or above of the lower explosion limit.
3.0.9 When the possible highest concentration of combustible or explosive hazardous substances contained in the exhaust air exceeds 10% of the lower explosion limit, the equipment, air pipes and accessories of the exhaust gas treatment system shall meet the following requirements.
1 Air ducts and fittings shall be made of metal materials;
2 Anti-static grounding measures should be taken for equipment and air ducts;
3 When the flange gaskets or bolt washers of air ducts and fittings are made of non-metallic materials, flange bridging measures shall be taken.
3.0.10 Exhaust ducts in workshops with explosion hazards are strictly prohibited from passing through firewalls and partition walls of workshops with explosion hazards.
3.0.11 For the local exhaust system containing toxic and hazardous substances or explosive hazardous substances, the exhaust gas shall be discharged outside the aerodynamic shadow area and positive pressure area of the building.
3.0.12 When condensed water or other liquids may be generated in the air duct, the design of the air duct shall meet the following requirements.
1 The exhaust duct should be set with a slope of not less than 0.5%;
2 The low point of the air duct should be provided with observation and inspection ports;
3 The low point of the air duct and the bottom of the exhaust fan should be equipped with a liquid drainage device, and the toxic and harmful condensate should be discharged into the corresponding waste water pipe network;
4 The structure and connection method of the exhaust pipe shall take anti-liquid leakage measures.
3.0.13 The installation of packing scrubbing waste gas treatment equipment shall meet the following requirements.
1 The cross-section wind speed should be less than 2.5m/s.
2 The thickness of filler shall be determined by calculation, but shall not be less than 1.2m.
3 The circulation volume of spray liquid shall take the larger value of the following two items.
1) Ensure that the exhaust gas volume per 1000m3/h is not less than 1.5m3/h;
2) Ensure that the filling area per square meter is not less than 15m3/h.
4 The empty tower residence time should be greater than 1s.
5.The minimum purification efficiency for each pollutant should be calculated and determined according to the height of the exhaust pipe, discharge rate, etc., and should not be lower than the relevant provisions of "Technical Requirements for Environmental Protection Products Industrial Waste Gas Absorption and Purification Devices" HJ/T 387.
6 It should be installed indoors in severe cold areas, and should be installed indoors in cold areas.
7 When there is a possibility of freezing, anti-freezing measures should be taken.
8 The reverse osmosis concentrated water of the pure water preparation system should not be used for water replenishment.
9 The drainage should be connected to the corresponding waste water pipe network.
3.0.14 When the exhaust air contains toxic and harmful substances, the press-in exhaust gas treatment system should not be used; when the exhaust air contains volatile organic pollution factors, the suction exhaust gas treatment system should be used.
3.0.15 The pressure loss of acid, alkali and volatile organic waste gas treatment equipment should not exceed 1000Pa.
3.0.16 Exhaust gas treatment equipment should not be provided with a bypass.
3.0.17 When the exhaust air contains combustible, explosive or toxic substances, the design of the exhaust air system shall meet the following requirements.
1.For the exhaust pipes that burn explosive and toxic substances without treatment, the negative pressure value relative to the routing area shall be maintained;
2.The central exhaust gas treatment system shall supply power according to the primary load, and the power supplied by the primary load shall ensure that the exhaust air volume of the system is not less than 50% of the system exhaust air volume during normal operation;
3 When the exhaust air contains combustible and explosive substances, the exhaust fan should be set up as a backup;
4 When the exhaust air contains extremely toxic or highly toxic substances, the exhaust fan and treatment equipment should be set up as backup.
3.0.18 The design of the exhaust pipe of the exhaust gas treatment system shall meet the following requirements.
1 The height of the exhaust pipe should not be lower than 15m, and should meet the requirements of the environmental impact assessment document;
2.When the height of the exhaust cylinder cannot meet the requirements, it shall be strictly implemented by 50% of the standard value of the discharge rate corresponding to its height;
3.In addition to meeting the requirements of paragraph 1 and paragraph 2 of this article, the height of the exhaust pipe for discharging chlorine gas, hydrogen cyanide and other extremely toxic substances should not be lower than 25m;
4 The outlet wind speed of the exhaust pipe should be 15m/s~20m/s;
5 Sampling holes for testing shall be set on the exhaust cylinder, and corresponding monitoring platforms shall be set;
6 For the exhaust system of the same kind of pollutants in a certain area, the exhaust pipes should be installed together;
7 The horizontal distance between the air exhaust outlet and the air inlet of the mechanical air supply system should not be less than 20m. If the horizontal distance is less than 20m, the air exhaust outlet should be higher than the air inlet and should not be less than 6m.
3.0.19 The air duct of the exhaust gas treatment system shall meet the following requirements.
1 The anti-corrosion performance of the air duct material should be compatible with the corrosive medium it contacts;
2.The exhaust ducts of integrated circuit pre-process factories and flat panel display factories shall be made of non-combustible materials;
3 The wind speed in the air duct should meet the requirements of the production environment for anti-microvibration;
4.Corrosion-resistant measures shall be taken for the exhaust pipes installed outdoors, and fixing devices shall be provided;
5 When passing through the settlement joint, a soft connection shall be provided, and its material shall meet the requirements of paragraph 1 of this article;
6 The support and hanger of the air duct should be designed according to the size and weight of the air duct.
3.0.20 When one of the following conditions is met, the air duct shall take compensation measures.
1 When passing through the settlement joint;
2 Metal air ducts for conveying high-temperature flue gas;
3 The linear expansion coefficient is not less than 50×10-6°C-1, and the non-metallic air duct with the continuous length of the straight section greater than 20m.
3.0.21 When one of the following conditions is met, heat insulation measures shall be taken for the air duct and fittings.
1 The exhaust gas treatment system installed outdoors, whose exhaust air is cooled, may form condensation to block or corrode the air pipe;
2 When there may be condensation in the dust removal air duct;
3 The temperature of the exhaust gas being delivered is greater than or equal to 60°C.
3.0.22 The heat insulation of the exhaust pipe of the exhaust gas treatment system shall meet the following requirements.
1.The heat insulation of the exhaust duct installed in the clean room (area) should adopt the heat insulation material that does not produce dust. When the heat insulation material that produces dust is used, it should be the finished heat insulation air duct with the structure of double-layer plate sandwich heat insulation material;
2 The exhaust ducts of integrated circuit pre-process factories and flat panel display factories shall be insulated with non-combustible heat insulating materials.
3.0.23 The exhaust fan of the exhaust gas treatment system should adopt automatic speed regulation measures.
3.0.24 Exhaust fans or treatment equipment operating in parallel in the waste gas treatment system shall meet the following requirements.
1 Use equipment of the same model and performance;
2.Set an electric or pneumatic airtight air valve at the inlet of each fan or processing equipment, and the air leakage rate of the air valve under the working pressure should not be greater than 1%.
3.0.25 The air ducts for removing or conveying hazardous substances of combustion or explosion shall not pass through firewalls and fireproof walls; the air ducts for other acidic, alkaline, volatile organic compounds and special exhaust systems should not pass through firewalls or fireproof walls. When it is necessary to pass through, the setting of the fire damper shall comply with the following regulations.
1 Fusion-type fire dampers should not be installed;
2 The exhaust system containing extremely toxic and highly toxic substances shall not be provided with a fire damper, but the exhaust pipe adjacent to one side of the building components shall be protected by a structure with the same fire resistance rating as the building components.
3.0.26 When non-regenerative fixed-bed adsorbent is used to treat waste gas, the continuous working time of the adsorbent should not be shorter than 3 months.
3.0.27 The power consumption limit per unit air volume of the exhaust fan of the exhaust gas treatment system shall comply with the relevant provisions of the current national standard "Code for Energy Conservation Design of Electronic Engineering" GB 50710.
3.0.28 When the natural attenuation of the noise generated by the exhaust gas treatment system cannot reach the allowable noise standard for indoor and outdoor environments, noise reduction or sound insulation measures should be taken.
3.0.29 When the vibration generated by fans, water pumps, air pipes, etc. of the exhaust gas treatment system cannot meet the requirements by natural attenuation, vibration isolation measures should be taken, and the design should meet the following requirements.
1 The vibration isolation base should be used;
2 Vibration isolators with appropriate stiffness should be selected;
3 The air ducts installed in areas with micro-vibration requirements should adopt vibration isolation supports and hangers.
3.0.30 Measuring holes should be set in the main exhaust pipe, and air volume regulating valves should be set in the main exhaust pipe. For exhaust gas treatment systems with many branch exhaust pipes, micromanometers should be installed at the end of each branch pipe.
3.0.31 The exhaust pipes of acidic, alkaline, special exhaust and dust removal systems should be circular, and the exhaust pipes of other exhaust systems should be circular or rectangular with a ratio of long side to short side not greater than 4.
3.0.32 When selecting exhaust gas treatment equipment, the following regulations should be met.
1 The rated air volume of the equipment should be added 10% to the total air volume calculated by the system;
2 The circulation pump flow should be added 10% to the system demand flow value;
3 The air leakage rate of acid, alkali, special and volatile organic waste gas treatment equipment under working pressure should not be greater than 1%;
4 The pressure bearing capacity of the processing equipment should not be lower than 1.5 times of the working pressure.
3.0.33 When selecting the exhaust fan of the waste gas treatment system, the following regulations should be met.
1 It should meet the requirements of working condition parameters and exhaust gas temperature, corrosiveness, explosiveness and other characteristics;
2 The air volume of the fan should be added 10% to the total air volume calculated by the system;
3 The wind pressure of the exhaust fan should meet the negative pressure required by the pipeline, processing equipment and terminal process equipment;
4 When the automatic speed-regulating exhaust fan is used, the pressure of the exhaust fan should be the total pressure calculated by the system as the rated wind pressure, but the power of the fan motor should be added 15% to 20% to the calculated value;
5 Selection of exhaust fan The efficiency of the design working condition should not be lower than 90% of the maximum efficiency of the fan.
3.0.34 The inlet and outlet of the processing equipment should be provided with sampling ports, which should be located in the stable airflow section.
3.0.35 The exhaust gas treatment system should be equipped with an online monitoring device for pollution factors.
3.0.36 The exhaust system should be equipped with a monitoring and alarm system for the operating status and failure of the exhaust system.
4 Process and process equipment
4.1 General provisions
4.1.1 The process equipment should be independently equipped with discharge outlets according to the classification of the nature of the exhaust pollutants.
4.1.2 The raw and auxiliary materials used in production shall comply with clean production requirements and relevant restrictive regulations.
4.1.3 Extremely toxic and highly toxic substances should not be used in the production process. When the above-mentioned harmful substances are unavoidably used, automatic equipment should be used, and measures should be taken for airtight, isolated and negative pressure operations, and material balance calculations should be performed at the same time.
4.1.4 Process equipment When using perfluorinated compounds that can cause global greenhouse effects, a closed system should be adopted, and the discharge outlet should be set independently.
4.1.5 Process equipment producing the same waste gas should be arranged in a centralized manner.
4.1.6 Toxic and harmful gas storage tanks should be equipped with restrictor valves.
4.2 Pollutant Control
4.2.1 The production process should adopt advanced technology and equipment to reduce the production of toxic and harmful substances.
4.2.2 Exhaust measures should be taken for the cavity that produces toxic and harmful substances in the process equipment, and the negative pressure value that meets the process requirements should be maintained.
4.3 Emergency facilities
4.3.1 Processes using toxic and hazardous substances should choose process equipment with automatic and fixed safety protection systems.
4.3.2 The chemical and special gas distribution supply system for toxic and hazardous substances shall be equipped with automatic detection, alarm and safety interlock cut-off devices.
4.3.3 The process equipment using toxic and harmful chemicals and special gases should be equipped with accident emergency facilities, and should have the function of receiving external alarm signals and implementing emergency cut-off and alarm.
5 alkaline waste gas system
5.1 General provisions
5.1.1 The alkaline waste gas system should be equipped with a dedicated system, and other exhaust gases should not be discharged into the alkaline waste gas system.
5.1.2 Packing washing type alkaline waste gas treatment system should be composed of exhaust pipe, treatment equipment, exhaust fan, exhaust cylinder, absorption liquid storage and delivery system, dosing device and control system.
5.1.3 Alkaline waste gas system treatment equipment should be set up as a backup, and the exhaust fan should be set up as a backup.
5.1.4 The alkaline waste gas system processing equipment and exhaust fan of the clean workshop of the electronics industry shall be powered by the primary load, and the air volume of the alkaline system processing equipment and exhaust fan powered by the primary load shall be greater than 50% of the system exhaust air volume.
5.1.5 For a clean room with a lower mezzanine for return air, the exhaust duct should be arranged in the lower mezzanine.
5.2 Processing flow and method
5.2.1 The alkaline waste gas system should adopt packing washing treatment equipment.
5.2.2 Alkaline exhaust gas should be evenly distributed in the packed washing tower, and the absorption liquid should be evenly distributed on the upper surface of the entire packing layer.
5.3 Handling equipment
5.3.1 Packing scrubbing waste gas treatment equipment should mainly include tower body, packing, circulation pump, spray pipe, nozzle, sump, make-up and drainage pipeline, mist eliminator and automatic control system.
5.3.2 The tower body of the treatment equipment should be made of materials resistant to acid and alkali corrosion. The tower body should be able to withstand the working pressure of the system, and the deformation under the working pressure should not exceed 1/200.
5.3.3 The tower body of processing equipment should be equipped with observation windows and inspection ports.
5.3.4 The packing should have the characteristics of corrosion resistance, low resistance, deformation resistance and large specific surface area. The number of packing layers and thickness should be calculated and determined according to the concentration of exhaust gas at the inlet of the treatment equipment, the concentration of exhaust gas at the outlet, superficial velocity, spray intensity, and packing technical parameters. The designed service life of packing should not be less than 5 years.
5.3.5 The circulating spray pump of each set of treatment equipment should be set up as backup. The flow rate of the circulating spray pump should not be less than 1.25 times the calculated flow rate, and the design liquid supply pressure of the nozzle should not be lower than 1.2 times the working pressure. A filter should be installed at the inlet of the circulating spray pump.
5.3.6 Sprinkler pipes should be corrosion-resistant pipes, and the pressure of pipes and fittings should not be lower than 1.0MPa.
5.3.7 Nozzles should be made of corrosion-resistant materials and arranged evenly.
5.3.8 The sump shall be an integral component, and the effective volume shall not be less than twice the sum of the volume of the circulation pipeline and the liquid holding capacity of the filler.
5.3.9 The mist removal efficiency of the mist eliminator for water mist with a particle size greater than 10 μm should not be lower than 99%.
5.3.10 Packing scrubbing waste gas treatment equipment should be equipped with daily dosing tanks and dosing pumps, and centralized dosing pumps should be set up as spares.
5.3.11 Daily dosing tanks should be made of acid-resistant and corrosion-resistant materials, and the volume of the tank should be determined according to the composition, concentration, and air volume of alkaline waste gas. Daily dosing tanks should be equipped with a liquid level detector to output a liquid level alarm signal, and a visual liquid level gauge should be designed.
5.3.12 The dosing pump should be a metering pump, and the pump body should be made of acid and alkali corrosion resistant material.
5.3.13 Dosing pipeline should adopt double-layer pipeline.
5.3.14 Automatic control of packing scrubbing waste gas treatment equipment...
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