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GB 51076-2015: Technical code for anti-micro-vibration engineering of electronics industry
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| GB 51076-2015 | English | 1979 |
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Technical code for anti-micro-vibration engineering of electronics industry
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GB 51076-2015
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Standard similar to GB 51076-2015 GB/T 51033 GB/T 50082 Basic data | Standard ID | GB 51076-2015 (GB51076-2015) | | Description (Translated English) | Technical code for anti-micro-vibration engineering of electronics industry | | Sector / Industry | National Standard | | Word Count Estimation | 94,984 | | Date of Issue | 2014-12-31 | | Date of Implementation | 2015-09-01 | | Quoted Standard | GB 50007; GB 50011; GB 50040; GB 50202; GB 50300; GB 50463; GB 50591; JGJ 79 | | Regulation (derived from) | Housing and Urban-Rural Development Ministry Bulletin 703 Number | | Issuing agency(ies) | Ministry of Housing and Urban-Rural Development of the People's Republic of China; General Administration of Quality Supervision, Inspection and Quarantine of the People's Republic of China | | Summary | This Standard applies to new construction, renovation electronics industrial plants, micro-vibration design test station (Taiwan) and other projects, construction and quality acceptance. | GB 51076-2015: Technical code for anti-micro-vibration engineering of electronics industry---This is a DRAFT version for illustration, not a final translation. Full copy of true-PDF in English version (including equations, symbols, images, flow-chart, tables, and figures etc.) will be manually/carefully translated upon your order.
1 General
1.0.1 In order to standardize the survey, design and construction quality acceptance of anti-microvibration projects in the electronics industry, to ensure that the microvibration environment requirements allowed by precision equipment and instruments are met, and to achieve advanced technology, economical applicability, reliable operation, and energy saving, the this specification.
1.0.2 This specification is applicable to the anti-microvibration design, construction and quality acceptance of newly-built or reconstructed electronic industrial plants, test stations (tables) and other projects.
1.0.3 The design, construction and quality inspection of the anti-microvibration project shall not only comply with this code, but also comply with the current relevant national standards.
2 terms
2.0.1 micro-vibration
Environmental vibration with low vibration amplitude that affects the normal operation of precision equipment and instruments.
2.0.2 allowable value of vibration
The maximum vibration value at the support structure to ensure the normal operation of precision equipment and instruments.
2.0.3 Structural microvibration con-trol system
In order to ensure the normal operation of precision equipment and instruments, comprehensive measures are taken to reduce the impact of environmental vibration on the building structure.
2.0.4 active vibration isolation active vibration isolation
Vibration isolation measures taken to reduce the impact of vibration generated by power equipment on the external environment.
2.0.5 Passive vibration isolation passive vibration isolation
Vibration isolation measures taken to reduce the impact of environmental vibration on precision equipment and instruments.
2.0.6 Active vibration isolation device active vibration isolation device
It has a device that is pre-set and obtains signals through its own feedback system, so that the vibration isolation device can exert a reverse action in real time to reduce the impact of environmental vibration and ensure the normal operation of the equipment.
2.0.7 vibration isolator vibration isolator
Support element with damping function.
2.0.8 vibration isolation mounting
A vibration isolation assembly composed of vibration isolators, dampers, regulating valves, controllers and signal processors.
2.0.9 vibration isolation system vibration isolation system
A system consisting of an object to be isolated, a deck, a vibration isolator, or a vibration isolation device.
2.0.10 vibration response vibration response
When the building structure or vibration isolation system is subjected to vibration, its output vibration displacement, vibration velocity, vibration acceleration, etc.
2.0.11 Environmental vibration environment vibration
The vibration of a construction site or building under the influence of various vibration sources inside and outside.
2.0.12 usual environmental micro-vibration
Weak vibration of a site or building without a clear source of vibration.
2.0.13 Microvibration isolation wall
A wall installed in a building structure to dampen the effects of vibrations.
2.0.14 Waffle slab
Vertical unidirectional flow clean room production floor cast-in-place reinforced concrete perforated floor slab.
2.0.15 Anti-microvibration design anti-microvibration design
In order to control the impact of environmental vibration within the allowable vibration value range of precision equipment and instruments, comprehensive measures are taken in engineering design planning, building structure design and vibration isolation design.
2.0.16 anti-microvibration table
A structural system with vibration isolation composed of a platform and a supporting structure. The supporting structure can be a building structure or an independently set beam, plate, column and foundation. A vibration isolator or vibration isolation can be installed between the platform and the supporting structure. device.
3 Basic Regulations
3.0.1 The micro-vibration defined in this code shall be the vibration whose amplitude is not greater than the limit value specified in Table 3.0.1.
Table 3.0.1 Micro-vibration limits
3.0.2 The survey, design, construction and installation of anti-microvibration works should follow the following procedures.
1 Determine the permissible vibration standards of precision equipment and instruments;
2 Site engineering geology, hydrogeological survey and foundation dynamic characteristic test;
3 Site environment vibration test and analysis;
4 Site comprehensive assessment and site selection;
5 Demonstration of anti-microvibration engineering design scheme;
6 Anti-micro-vibration engineering design;
7 Anti-micro-vibration engineering construction and installation;
8.The dynamic test and analysis of the building structure when the main building of the project is completed and all kinds of equipment have not been installed;
9 Environmental vibration test and analysis during trial operation of power equipment;
10 Environmental vibration test and analysis during trial production;
11 Anti-micro-vibration project acceptance;
12 The micro-vibration test and analysis shall comply with the provisions of Appendix A of this code.
3.0.3 The location of the vibration source should be reasonably arranged in the planning and design of the area and plant area, and the vibration source with large vibration should be arranged at the edge of the area or away from buildings that require anti-micro-vibration.
3.0.4 The vibration sources, precision equipment and instruments in the building should be classified and concentrated, arranged in different areas, and should be kept away from each other.
3.0.5 Anti-microvibration engineering design should include the following contents.
1 Anti-microvibration design of building structures;
2 Vibration isolation design of power equipment and piping;
3 Vibration isolation design of precision equipment and instruments.
3.0.6 The design and construction quality of anti-microvibration works must meet the permissible vibration standards of precision equipment and instruments.
4 Permissible vibration standards for precision equipment and instruments
4.1 General provisions
4.1.1 The determination of the allowable vibration value of precision equipment and instruments shall comply with one of the following regulations.
1 Allowable vibration value provided by the manufacturer;
2 Allowable vibration value required by the process;
3 The permissible vibration value specified in section 4.2 of this code.
4.1.2 The determination of the permissible vibration value of precision equipment and instruments should be combined with the requirements of vibration environment changes and equipment renewal.
4.2 Allowable vibration value of precision equipment and instruments
4.2.1 The permissible vertical and horizontal vibration values in frequency domain for precision equipment and instruments used in electronics industry, precision equipment and instruments used in nanometer laboratory and physics laboratory can be adopted according to Table 4.2.1.
Table 4.2.1 Allowable vibration values of precision equipment and instruments used in electronics industry, nanometer laboratory and physics laboratory
Note. Vibration velocity and vibration acceleration are 1/3 octave root mean square values.
4.2.2 The permissible vertical and horizontal vibration values of laboratory precision equipment and instruments in the time domain can be adopted according to Table 4.2.2.
Table 4.2.2 Allowable vibration values of laboratory precision equipment and instruments
Note. 1 Vibration displacement and vibration velocity are peak values;
2 The table lists the precision equipment and instruments with allowable vibration displacement and allowable vibration velocity, both of which should be satisfied.
4.2.3 The permissible vertical and horizontal vibration values of the anechoic room and semi-anechoic room in the frequency domain can be adopted according to Table 4.2.3.
Table 4.2.3 Permissible vibration values for anechoic chambers and semi-anechoic chambers
Note. Vibration acceleration is octave root mean square value.
4.2.4 The permissible vertical and horizontal vibration values of the anechoic pool in the frequency domain can be adopted according to Table 4.2.4.
Table 4.2.4 Permissible vibration value of anechoic pool
Note. Vibration acceleration is root mean square value.
5 planning and design
5.1 General provisions
5.1.1 The regional planning layout and factory layout of the electronics industry shall not be selected in unfavorable areas such as strong vibration sources, strong noise, strong sandstorms, strong electromagnetic radiation, and harmful gases.
5.1.2 The selection of plant area should meet the following requirements.
1.It is advisable to choose areas with hard foundation soil or shallow bedrock burial, and not in soft soil and filling soil and other unfavorable geological areas;
2 It is advisable to avoid areas such as rivers and lakes, coastal beaches, and perennial freezing areas;
3 It is advisable to choose areas with seismic fortification intensity not greater than 8 degrees, avoid unfavorable areas such as seismically active fault zones, and areas such as liquefied sandy soil layers, and should comply with the relevant provisions of the current national standard "Code for Seismic Design of Buildings" GB 50011 ;
4 Corresponding measures should be taken when it cannot be avoided.
5.1.3 When selecting the location of the factory area, it should be determined after demonstration, comparison and comprehensive evaluation according to the micro-vibration test and natural conditions of the site environment; when the environmental vibration test conditions are not available, the vibration-proof distance of the vibration source can be determined according to Section 5.2 of this specification.
5.2 Anti-vibration distance
5.2.1 The anti-vibration distance of various vibration sources in different soil bodies can be calculated according to the following formula.
In the formula. L - the anti-vibration distance without any anti-vibration measures (m);
K1——adjustment coefficient for different soil bodies, take values according to Table 5.2.1-2;
K2——adjustment coefficient of different types of vehicles, take values according to Table 5.2.1-3, other vibration sources K2=1;
L0——vibration-proof distance (m) when the soil is clay, take the value according to Table 5.2.1-1.
Table 5.2.1-1 Anti-vibration distance L0(m)
Note. 1 The allowable vibration values in the table are time domain values;
2 The intermediate value of allowable vibration velocity can be determined by linear interpolation of the values in the table;
3 The anti-vibration distance of other power equipment should be determined by testing.
Table 5.2.1-2 Different foundations and foundation adjustment coefficient K1
Note. When the hard soil is the bedrock, take a small value.
Table 5.2.1-3 Adjustment coefficient K2 of different types of vehicles
5.2.2 When vibration isolation is adopted for the vibration source in Table 5.2.1-1 of this code, the anti-vibration distance after vibration isolation shall be determined by testing.
5.2.3 Combining different vibration sources inside and outside the planning area and the factory area, for buildings with anti-micro-vibration requirements, the corresponding anti-vibration distance should be determined according to the maximum vibration effect after the superposition of comprehensive vibration. The comprehensive superposition calculation of the vibration response of multiple vibration sources can be calculated according to Appendix B of this code.
5.3 Plant layout
5.3.1 The layout of the station buildings affected by vibration in the factory area shall meet the following requirements.
1 The forging workshop should be arranged at the edge of the factory area, and should be far away from buildings with anti-vibration requirements;
2 The air compressor, refrigerator, water pump and other power stations and other vibration sources should be arranged separately;
3 Precise equipment and instruments should be arranged in the area with the least impact of vibration.
5.3.2 The road setting inside and outside the factory area should meet the following requirements.
1 Buildings with anti-microvibration requirements should be far away from the main road of the factory area, and should be far away from railways, highways and urban rail transit lines;
2.Roads around buildings with anti-microvibration requirements should have reinforced roadbeds, and flexible road surfaces should be selected;
3 Roads around buildings with anti-microvibration requirements should limit vehicle load, driving speed and driving time.
5.3.3 Evergreen shrubs and turf should be planted around buildings with anti-microvibration requirements in the factory area, and trees should not be planted.
6 Anti-microvibration design of building structure
6.1 General provisions
6.1.1 The anti-microvibration design of building structures shall take the following comprehensive measures.
1 Anti-microvibration measures for building foundations;
2 Anti-microvibration measures for the ground structure;
3 Anti-vibration measures for the main structure;
4 Anti-microvibration measures for independent foundations of precision equipment and instruments.
6.1.2 The anti-microvibration design of building structures shall have the following information.
1 Allowable vibration value of precision equipment and instruments;
2 engineering geological and hydrogeological survey reports;
3 The foundation dynamic characteristic test report, if not available, the value can be taken according to the relevant provisions of the current national standard "Code for Design of Power Machinery Foundation" GB 50040;
4 Site environmental vibration test and analysis report.
6.1.3 The anti-microvibration design of building structures should have the following information.
1 Process layout, overall size, weight and working mode of precision equipment and instruments in the building;
2 The location, dimensions, weight, speed and operation mode of the power equipment in the building;
3 The spatial position, weight per unit length and conveying medium of the pipeline in the building.
6.1.4 The equipment layout in the building shall comply with the following regulations.
1 When precision equipment and instruments are arranged relatively close to power equipment, vibration isolation joints should be used to separate them;
2 When precision equipment or instruments are arranged on the floor, the power equipment shall be arranged on the ground floor or the side span of the floor, and vibration isolation joints shall be provided on the floor to isolate the area where the precision equipment or instruments are located;
3 Precise equipment and instruments should not be arranged in the range affected by the vibration of the elevator;
4 When precision equipment and instruments are arranged on the floor, they should be located at or near the structurally rigid parts such as beams, walls, and columns.
6.1.5 Lifting equipment should not be installed in multi-storey factory buildings. When setting up lifting equipment, it is advisable to use cantilever lifting equipment or other means of transportation with less vibration impact.
6.1.6 When the power equipment and vibration-generating pipelines in the building enter the anti-microvibration area, vibration isolation measures should be taken.
6.1.7 Low-speed air supply should be used in buildings, and the air density change rate should be controlled within 10%. When a self-circulating high-efficiency filter (FFU) device is arranged, vibration isolation measures should be taken.
6.1.8 Doors in the anti-microvibration area shall adopt flexible buffer devices.
6.2 Measures against micro-vibration
6.2.1 The anti-microvibration design of the building foundation shall meet the following requirements.
1 In areas with seismic fortification intensity of 7 and 8, if there are weak clay layers with bearing capacity characteristic values less than 80kPa and 100kPa within the bearing layer of the building foundation, pile foundations or artificially treated composite foundations shall be used. When the composite foundation is used, the load test and foundation deformation checking shall be carried out according to the relevant provisions of the current national standard "Code for Design of Building Foundation" GB 50007 and "Technical Specification for Building Foundation Treatment" JGJ 79;
2 The foundation of the same structural unit of the anti-microvibration factory building should not be embedded on different types of foundation soil.
6.2.2 The anti-microvibration design of the ground structure or floor structure shall meet the following requirements.
1 The pre-process of integrated circuit manufacturing plant, liquid crystal display manufacturing plant, nanotechnology buildings and laboratories should be equipped with thick-slab reinforced concrete floors according to anti-microvibration requirements. When a natural foundation is used, the thickness of the ground structure should not be less than 500mm, and the foundation soil should be rammed and compacted, and the compaction coefficient should not be less than 0.95.When the structural ground supported by pile foundations is used, the thickness of the ground structure should not be less than 400mm, and for soft soil areas, it should not be less than 500mm; for under-consolidated soil, measures should be taken to prevent the soil between the piles from detaching from the bottom of the ground structure;
2 When the ground is a super-long concrete structure, expansion joints should not be set, and the super-long concrete structure seamless design measures can be adopted.
6.2.3 The anti-microvibration design of the main structure shall meet the following requirements.
1 Small-span column grids should be used for the pre-process of integrated circuit manufacturing plants, liquid crystal display device manufacturing plants, photovoltaic solar energy manufacturing plants, nanotechnology buildings, and various laboratories, and reinforced concrete structures should be used for process equipment floor platforms. Vibration isolation joints should be provided between the platform and surrounding structures.
2 The design of the anti-microvibration process equipment floor platform shall meet the following requirements.
1) The size of the column net under the platform should be 0.6m as the modulus, and the span should not be greater than 6m;
2) The platform should adopt cast-in-place reinforced concrete beam-slab or well-type floor structure, and steel frame composite floor structure can also be used;
3) The minimum dimensions of the cast-in-place beams, slabs, and column sections of the concrete platform should meet the requirements in Table 6.2.3-1;
Table 6.2.3-1 Minimum dimensions of beam, slab and column sections
4) When the distance between the cast-in-place waffle slab secondary beams of the anti-micro-vibration process equipment platform is 1.2m, the minimum size of the section should meet the requirements of Table 6.2.3-2;
Table 6.2.3-2 Minimum size of section of waffle plate
5) For the anti-microvibration process equipment floor platform with steel frame-composite floor structure, the distance between secondary beams should not be greater than 3.2m, and the minimum size of the steel beam and composite floor section should meet the requirements of Table 6.2.3-3;
Table 6.2.3-3 Minimum dimensions of steel beams and composite floor sections
6) The opening ratio of the waffle plate on the anti-microvibration process equipment layer platform should meet the clean design requirements and should not be greater than 30%.
3 When the building with concrete structure is super long, it is not advisable to set expansion joints, but the seamless design technology of super long concrete structure should be adopted, and measures should be taken to reduce the temperature expansion and contraction stress.
4 According to the anti-microvibration requirements, reinforced concrete anti-microvibration walls can be installed between some columns under the platform. The walls should be symmetrically arranged vertically and horizontally, and the thickness should not be less than 250mm. The walls should not be opened with holes.
5 When joints are set between the center column of the multi-span roof structure and the process equipment floor platform, the joint width shall not be less than 50mm in the non-seismic area; in the seismic area, the joint width shall not be less than 100mm, and shall comply with the current national standards Relevant provisions on seismic joints in GB 50011 Code for Seismic Design of Buildings.
6.2.4 The independent foundation design of precision equipment and instruments shall meet the following requirements.
1 For precision equipment and instruments set on the ground, the bottom of the foundation should be placed on a hard soil layer or bedrock. In other geological conditions, pile foundation or artificial treatment of composite foundation shall be adopted;
2 When precision equipment and instruments are sensitive to medium and low frequency vibrations, no vibration isolation ditch is required around the foundation;
3 When the abutments of precision equipment and instruments are supported by frames, reinforced concrete frames should be used, and steel concrete structures should be used for the platform, and vibration isolation joints should be set around them;
4 The precision equipment or instruments installed on the platform of the process equipment layer should adopt the anti-microvibration base, and the platform should adopt the steel concrete structure, and the thickness should not be less than.200mm.
6.3 Micro-vibration checking calculation
6.3.1 Micro-vibration checking and calculation shall meet the following requirements.
1 The following parts of workshops and laboratories with anti-microvibration requirements should be checked against microvibration.
1) Ground structure;
2) Process floor floor;
3) Independent basis.
2 The micro-vibration checking calculation shall be carried out in stages according to the following vibration effects.
1) Environmental vibration;
2) Vibration of power and process equipment.
3 Micro-vibration check calculation shall meet the following requirements.
1) The structure that needs to be checked for micro-vibration should be modeled as a whole entity.
2) The foundation dynamic characteristic parameters of natural foundations, pile foundations and artificial composite foundations shall be determined by on-site tests; if there are no conditions, they can be adopted in accordance with the relevant provisions of the current national standard "Code for Design of Power Machine Foundations" GB 50040; when no conditions are tested, the damping The ratio can be valued according to item 4 of this paragraph.
3) The influence of the backfill around the ground structure on the stiffness of the foundation can be adopted in accordance with the relevant provisions of the current national standard "Code for Design of Power Machine Foundations" GB 50040.
4) The damping ratio of foundation soil should be 0.15-0.35, the damping ratio of reinforced concrete structure should be 0.05, the damping ratio of steel structure should be 0.02, and the damping ratio of steel and concrete composite structure should be 0.035.
5) The soil layer within the influence depth range of the foundation shall be taken as the calculation depth.
6) Calculate the effect of live loads.
7) Carry out modal calculation and response calculation for the structure, and the number of effective mode shapes for modal analysis should be selected according to the mass participation coefficient of the overall mode shape of the structure not less than 95%.
8) The checking calculation of the impact of environmental vibration takes the most unfavorable vibration record as the input load for calculation, and the sample time length should not be less than 60s.
4 The establishment of the analysis model shall meet the following requirements.
1) Define the anti-microvibration design scheme, and simplify the calculation model of the ground structure and process layer structure. When the process equipment layer is connected with the main structure of the building, the structural calculation model shall include the main structure;
2) Set the geometric parameters according to the design plan;
3) Reasonable selection of physical parameters;
4) Determine the viscoelastic boundary constraints according to the engineering geological survey report.
5 The response value of the vibration impact checking calculation shall meet the requirements of the following formula.
In the formula. R——vibration response value of structure center point or feature point;
[R]——The permissible vibration value of precision equipment and instruments.
6.3.2 Micro-vibration affected by environmental vibration shall meet the requirements of the following formula.
In the formula. RhV——the vertical vibration response of the center point of the structure;
RhH—horizontal vibration response of the center point of the structure;
KV——Vertical dynamic influence coefficient. KV=0.4～0.6.This coefficient is related to the quantity and arrangement of power equipment. When the number of devices is large or the location of the feature point is close, KV takes a small value, otherwise it takes a large value;
KH——Horizontal dynamic influence coefficient. KH=0.3～0.5.This coefficient is related to the quantity and arrangement of power equipment. When the number of devices is large or the location of the feature point is close, KH takes a small value, otherwise takes a large value;
[RV]——The allowable vertical vibration value of precision equipment and instruments;
[RH]——The allowable horizontal vibration value of precision equipment and instruments.
6.3.3 The micro-vibration check calculation of power equipment and process equipment should meet the following requirements.
1 The characteristic points shall be selected on the established solid model, and the dynamic response spectrum Rd shall be calculated under the action of a unit load of 1kN;
2 The vibration response of feature points is to be checked and calculated according to the following formula.
In the formula. RV——vertical vibration response of structural feature points;
RH—horizontal vibration response of structural feature points;
αV——The vertical dynamic response coefficient of the characteristic points of similar projects;
RVS——The vertical vibration response curve of the feature points is obtained by frequency domain analysis of the vibration records of the feature points of similar projects;
RVd——Establish the finite element solid model of the same kind of project, apply the unit load P=1kN vertically on the feature point, and calculate the dynamic response spectrum curve;
αH——The dynamic response coefficient of the characteristic points of the horizontally built similar projects;
RHS——The horizontal vibration response curve of the feature points obtained by frequency domain analysis of the vibration records of the feature points of similar projects;
RHd——Establish the finite element solid model of the same kind of project, apply the unit load P=1kN horizontally on the feature point, and calculate the dynamic response spectrum curve;
η——similarity ratio coefficient between existing similar projects and new projects, which can be taken as 0.9~1.2;
RdV——The vertical vibration response of the structural feature point under the unit load of 1kN;
RdH——The horizontal vibration response of structural feature points under the action of a unit load of 1kN.
6.3.4 The actual measurement and evaluation of the vibration check calculation at each stage of the anti-microvibration project shall meet the following requirements.
1 When the site environment vibration is actually measured, the data of the proposed site affected by the surrounding environment vibration should be obtained through the test, and used as the input load to check the preliminary design scheme of the micro-vibration;
2 During the actual measurement and evaluation of the main structure of the building, the vibration test of the main structure of the building should be carried out to evaluate the anti-micro-vibration system of the main structure, and the comparison and analysis with the calculation results should be carried out to confirm its effectiveness. Provide design basis for overall vibration isolation scheme of process equipment;
3 During the actual measurement and evaluation of the power equipment and process equipment, the vibration test of the structure of the power equipment and process equipment should be carried out to evaluate the final anti-micro-vibration system of the structure, and the calculation results should be compared and analyzed to confirm Its effectiveness provides a design basis for local vibration isolation schemes of power equipment and process equipment.
7 Vibration isolation design
7.1 General provisions
7.1.1 Power equipment should use products with little vibration impact, and rotating equipment should use products with medium and high speeds.
7.1.2 When power equipment has vibration effects on precision equipment and instruments, vibration isolation measures should be taken.
7.1.3 When anti-microvibration measures are taken for the building structure and vibration isolation measures are taken for power equipment, the requirements cannot be met, and vibration isolation measures should be taken for precision equipment and instruments.
7.1...
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