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SJZ2926-1988 PDF English

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SJZ2926-1988: Test methods for properties of mask-making equipment for manufacturing of ICs
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SJ/Z 2926-1988English669 Add to Cart 4 days [Need to translate] Test methods for properties of mask-making equipment for manufacturing of ICs

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Basic data

Standard ID SJ/Z 2926-1988 (SJ/Z2926-1988)
Description (Translated English) Test methods for properties of mask-making equipment for manufacturing of ICs
Sector / Industry Electronics Industry Standard
Classification of Chinese Standard L99
Word Count Estimation 19,155
Date of Issue 3/10/1988
Date of Implementation 10/1/1988
Regulation (derived from) Industry-Science (2010) No. 77
Summary This standard applies to automatic engraved (painted) Figure machine, pattern generator, minified camera optical lithography equipment three main performance test method. Technical performance testing aims to check whether the equipment or the use of the original design requirements. Performance test methods specified in this standard does not, in all types of equipment and technology should file separately.

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