SJ/T 11493-2015 English PDF

Standard ID	USD	BUY PDF	Lead-Days	Standard Title (Description)	Status
SJ/T 11493-2015	479	Add to Cart	3 days	Test method for measuring nitrogen concentration in silicon substrates by secondary ion mass spectrometry	Obsolete

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Basic data

Standard ID: SJ/T 11493-2015 (SJ/T11493-2015)
Description (Translated English): Test method for measuring nitrogen concentration in silicon substrates by secondary ion mass spectrometry
Sector / Industry: Electronics Industry Standard (Recommended)
Classification of Chinese Standard: H82
Classification of International Standard: 29.045
Word Count Estimation: 12,176
Date of Issue: 2015-04-30
Date of Implementation: 2015-10-01
Quoted Standard: GB/T 24580-2009
Regulation (derived from): Ministry of Industry and Information Technology Announcement (2015 No. 28)
Issuing agency(ies): Ministry of Industry and Information Technology
Summary: This Standard specifies the secondary ion mass spectrometry (SIMS) test method for single crystal silicon substrate material, the total concentration of nitrogen. This Standard applies to antimony, arsenic, phosphorus doping concentration <0.2% (1 �� 1020at.cm-3) a single product sample, wherein the concentration of nitrogen is not less than 1 �� 1014at.cm-3.

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