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SJ/T 10311-1992 PDF English

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SJ/T 10311-1992: Generic specification of low pressure chemical vapor deposition system
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SJ/T 10311-1992English389 Add to Cart 3 days [Need to translate] Generic specification of low pressure chemical vapor deposition system

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Basic data

Standard ID SJ/T 10311-1992 (SJ/T10311-1992)
Description (Translated English) Generic specification of low pressure chemical vapor deposition system
Sector / Industry Electronics Industry Standard (Recommended)
Classification of Chinese Standard L99
Word Count Estimation 11,125
Date of Issue 6/5/1992
Date of Implementation 12/1/1992
Quoted Standard SJ 2065; SJ 142; SJ 946; GB 191; GB 6388
Summary This standard applies to horizontal hot wall type low pressure chemical vapor deposition equipment (hereinafter referred to as LPCVD equipment) for the design, manufacture and process applications. Development of other forms of LPCVD equipment should also refer to the use.

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