SJ 20842-2002 PDF English
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Basic data
| Standard ID | SJ 20842-2002 (SJ20842-2002) |
| Description (Translated English) | Test method for Ga/As ratio of surface of gallium arsenide |
| Sector / Industry | Electronics Industry Standard |
| Classification of Chinese Standard | H83;L90 |
| Word Count Estimation | 5,528 |
| Date of Issue | 2002-10-30 |
| Date of Implementation | 2003-03-01 |
| Summary | This standard specifies the ratio of gallium arsenide GaAs surface X-ray photoelectron spectroscopy test methods. This standard applies to GaAs devices for monitoring various surface treatment during the manufacturing process of the gallium arsenide GaAs wafer surface than the impact, but also suitable for wafer processing in a variety of surface treatment. |