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SJ 20714-1998 PDF English

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SJ 20714-1998: Test method for sub-surface damage of gallium arsenide polished wafer by X-ray double crystal diffraction
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SJ 20714-1998English159 Add to Cart 2 days [Need to translate] Test method for sub-surface damage of gallium arsenide polished wafer by X-ray double crystal diffraction

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Basic data

Standard ID SJ 20714-1998 (SJ20714-1998)
Description (Translated English) Test method for sub-surface damage of gallium arsenide polished wafer by X-ray double crystal diffraction
Sector / Industry Electronics Industry Standard
Classification of Chinese Standard H83
Word Count Estimation 4,492
Date of Issue 3/18/1998
Date of Implementation 5/1/1998
Quoted Standard GJB 1926-94
Summary This standard specifies the sub-damaged layer of gallium arsenide polished double-crystal X-ray diffraction test methods. This standard applies to chemically, mechanically polished GaAs single-sided and double-sided wafer damage layer sub qualitative measurements.

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