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GB/T 46173-2025: Electronic gas - Noble gas
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GB/T 46173-2025: Electronic gas - Noble gas

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ICS 71.100.20 CCSG86 National Standards of the People's Republic of China Electron gas, inert rare gas Published on 2025-10-05 Implemented on May 1, 2026 State Administration for Market Regulation The State Administration for Standardization issued a statement.

Table of Contents

Preface III 1.Scope 1 2 Normative References 1 3.Terms and Definitions 1 4.Technical Requirements 2 5 sampling 3 6.Test Methods 3 6.1 Purity of inert rare gases 4 6.2 Contents of hydrogen, oxygen, argon, nitrogen, carbon monoxide, carbon dioxide, methane, xenon, carbon tetrafluoride, hexafluoroethane, and sulfur hexafluoride in krypton. 5.Determination 6.3 Determination of non-methane total hydrocarbon content in krypton 6 6.4 Determination of Helium Content in Neon 7 6.5 Determination of the content of hydrogen, oxygen, argon, nitrogen, carbon monoxide, carbon dioxide, and methane in neon 7 6.6 Determination of total hydrocarbon content in neon 8 6.7 Contents of hydrogen, oxygen, argon, nitrogen, carbon monoxide, carbon dioxide, methane, krypton, carbon tetrafluoride, hexafluoroethane, and sulfur hexafluoride in xenon. The determination of 8 6.8 Determination of non-methane total hydrocarbon content in xenon 9 6.9 Determination of Nitric Oxide, Nitric Oxide and Nitrous Oxide Contents in Xenon 9 6.10 Determination of Moisture Content 11 6.11 Exhaust Gas Treatment 11 7.Inspection Rule 11 8.Marking, Packaging, Transport, Storage and Safety Information 11 8.1 Mark 11 8.2 Packaging, Transportation and Storage 11 8.3 Security Information 11 Appendix A (Informative) Schematic Diagram of Gas Flow 12 A.1 Determination of hydrogen, oxygen, argon, nitrogen, carbon monoxide, carbon dioxide, methane, xenon, carbon tetrafluoride, hexafluoroethane, and carbon hexafluoride in krypton. Schematic diagram of gas flow path for sulfur content 12 A.2 Schematic diagram of the gas flow path for determining the helium content in neon 13 A.3 Schematic diagram of the gas flow path for determining the content of hydrogen, oxygen, argon, nitrogen, carbon monoxide, carbon dioxide, and methane in neon. 13 A.4 Determination of hydrogen, oxygen, argon, nitrogen, carbon monoxide, carbon dioxide, methane, krypton, carbon tetrafluoride, hexafluoroethane, and carbon hexafluoride in xenon. Schematic diagram of gas flow path for sulfur content 14 A.5 Schematic diagram of the gas flow path for determining the total non-methane hydrocarbon content in xenon 15 Appendix B (Informative) Safety Information 17 B.1 Basic Information 17 B.2 Hazard Statement 17 B.3 Operating Precautions 17 B.4 Emergency Response Measures 17 B.5 Leakage Handling and Disposal 18 B.6 Storage Precautions 18 B.7 Waste Disposal Instructions 18 Reference 19

Foreword

This document complies with the provisions of GB/T 1.1-2020 "Standardization Work Guidelines Part 1.Structure and Drafting Rules of Standardization Documents". Drafting. Please note that some content in this document may involve patents. The issuing organization of this document assumes no responsibility for identifying patents. This document was proposed and is under the jurisdiction of the National Technical Committee on Standardization of Semiconductor Equipment and Materials (SAC/TC203). This document was drafted by. Southwest Branch of Haohua Gas Co., Ltd., Quzhou Hangyang Special Gases Co., Ltd., and Huace Testing & Certification Group. Joint-stock company, Henan Xinlianxin Cryogenic Energy Co., Ltd., Fujian Detianchen New Material Technology Co., Ltd., Hubei Heyuan Gas Co., Ltd. Co., Ltd., Beijing Control Engineering Research Institute, Hebei Handan Iron & Steel Special Gases Co., Ltd., Dalian Huabang Chemical Co., Ltd., Guangdong Huatai Gas Joint-stock company, Sinopec (Beijing) Chemical Research Institute Co., Ltd., Chongqing Ruixin Gas Co., Ltd., Beijing PURE Analytical Instruments Co., Ltd. Company, Shenzhen Jiegong Technology Co., Ltd., Three Gorges Public Inspection and Testing Center, China Shipbuilding (Handan) Parry Special Gases Co., Ltd., Fujian Hengshen Electronic Materials Technology Co., Ltd., Beijing Shougang Gas Co., Ltd., National Institute of Metrology, China, Bruker (Beijing) Technology Co., Ltd. Company, CNOOC Energy Development Co., Ltd. Safety and Environmental Protection Branch, Zhonghao Guangming Chemical Research and Design Institute Co., Ltd., Zhejiang Hongxin Semiconductor Co., Ltd., Zhejiang Provincial Chemical Research Institute Co., Ltd., Shanghai Huaai Chromatography Analysis Technology Co., Ltd., Dalian Date Gas Co., Ltd. Hangzhou New Century Mixed Gas Co., Ltd., China Jiliang University, China Metrology and Testing Society, Lianxiong Investment (Shanghai) Co., Ltd., Kunming Guangrui Datong Special Gases Co., Ltd., Superspectrum Technology (Chengdu) Co., Ltd., Shanghai Fanwei Instrument Equipment Co., Ltd., and Shenyang Zhongfu Kejin Pressure Container Co., Ltd., Air Liquide (China) Investment Co., Ltd., AGC Instruments Ltd. (Ireland) Beijing Representative Office, Suzhou Yivite New Materials Co., Ltd. Materials Co., Ltd., Guizhou Provincial Institute of Product Quality Inspection and Testing, Langxi Instruments (Shanghai) Co., Ltd., and Southwest Chemical Research and Design Institute Co., Ltd. The main drafters of this document are. Hu Ying, Wang Han, Chen Guilin, Guo Yingge, Cui Zengtao, Qi Ruijia, Cao Suying, Pan Zhenhuan, Jiang Luo, Fang Qiang, and Song Fei. Fan Chao, Ma Weidong, Chen Libin, Hou Peng, Qian Ji, Fu Zhuhong, Chen Yanshan, Wu Changjiang, Hou Xiuhua, Wei Xin, Jiang Yuejun, Jin Xingyi, Shi Lan, Liu Junhang Wang Lu, Xie Lei, Teng Xinsheng, Zheng Yangguang, Ma Binqi, Liao Hongchang, Zhao Guangming, Li Xiao, Yin Dongmei, Wang Man, Zhao Yue, Cai Changqing, Sun Funan, Wang Feihua Lan Feng, Wu Ningjie, Zhang Qiyan, Fang Hua, Zheng Xinrui, Cheng Xin, Zhang Jinbo, Zhang Jing, Yang Yangzhongfu, Huang Hui, Gao Jing, Qu Qiang, He Bo, Huang Xiaoqiang Fang Song, Yin Hao, Li Ming, Gong Bing, Ren Xihui, Tan Yiqiang, Yin Lele, Li Jianhao, Cheng Huapeng, Zhou Pengyun, Tang Xiamei. Electron gas, inert rare gas 1.Scope This document specifies the technical requirements for inert rare gases, describes the corresponding test methods, and also specifies sampling, inspection rules, and marking procedures. Packaging, transportation and storage requirements are provided, along with safety information. This document applies to inert rare gases obtained by purification from industrial inert rare gases.

2 Normative references

The contents of the following documents, through normative references within the text, constitute essential provisions of this document. Dated citations are not included. For references to documents, only the version corresponding to that date applies to this document; for undated references, the latest version (including all amendments) applies. This document. GB 190 Packaging Marks for Dangerous Goods GB/T 4842 Argon GB/T 4844 Pure Helium, High-Purity Helium and Ultra-Purity Helium GB/T 5099 (all parts) Seamless steel gas cylinders GB/T 5275.7 Gas analysis - Preparation of calibration mixed gases by dynamic volumetric method - Part 7.Thermal mass flow controller GB/T 5828 Pure Xenon, High-Purity Xenon and Ultra-Purity Xenon GB/T 5829 Pure Krypton, High-Purity Krypton, and Ultra-Purity Krypton GB/T 5832.1 Gas analysis – Determination of trace moisture – Part 1.Electrolytic method GB/T 5832.2 Gas analysis – Determination of trace moisture – Part 2.Dew point method GB/T 5832.3 Gas Analysis - Determination of Trace Moisture in Gases - Part 3.Cavity Ring-down Spectroscopy GB/T 7144 Color Marking for Gas Cylinders GB/T 8979 Pure Nitrogen, High-Purity Nitrogen and Ultra-Purity Nitrogen GB/T 8984 Gas Analysis - Determination of Trace Carbon Monoxide, Carbon Dioxide and Hydrocarbons in Gases - Flame Ionization Gas chromatography GB/T 11640 Seamless Aluminum Alloy Gas Cylinders GB/T 14193 Regulations for Filling Liquefied Gas Cylinders GB/T 14194 Regulations for Filling Compressed Gas Cylinders GB 15258 Regulations for Writing Safety Labels for Chemicals GB/T 16804 Warning Labels for Gas Cylinders GB/T 28726 Gas Analysis - Helium Ionization Gas Chromatography GB/T 43306 Sampling Guidelines for Gas Analysis TSG23 Gas Cylinder Safety Technical Regulations 3.Terms and Definitions The following terms and definitions apply to this document. ...