GB/T 30901-2025 English PDF

Standard ID	USD	BUY PDF	Lead-Days	Standard Title (Description)	Status
GB/T 30901-2025	339	Add to Cart	4 days	High purity ammonium fluoride solution	Valid
GB/T 30901-2014	329	Add to Cart	3 days	High purity ammonium fluoride solution for industrial use	Valid

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Basic data

Standard ID: GB/T 30901-2025 (GB/T30901-2025)
Description (Translated English): High purity ammonium fluoride solution
Sector / Industry: National Standard (Recommended)
Classification of Chinese Standard: G12
Classification of International Standard: 71.060.50
Word Count Estimation: 17,174
Date of Issue: 2025-08-29
Date of Implementation: 2026-03-01
Older Standard (superseded by this standard): GB/T 30901-2014
Issuing agency(ies): State Administration for Market Regulation; Standardization Administration of China

GB/T 30901-2025: High purity ammonium fluoride solution

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ICS 71.060.50 CCSG12 National Standards of the People's Republic of China Replaces GB/T 30901-2014 High-purity ammonium fluoride solution Published on 2025-08-29 Implemented on 2026-03-01 State Administration for Market Regulation The State Administration for Standardization issued a statement.

Foreword

This document complies with the provisions of GB/T 1.1-2020 "Standardization Work Guidelines Part 1.Structure and Drafting Rules of Standardization Documents". Drafting. This document replaces GB/T 30901-2014 "High-purity ammonium fluoride solution". Compared with GB/T 30901-2014, the only changes are structural adjustments and rewriting. Aside from the logical changes, the main technical changes are as follows. a) Added EL, UP, and UP-SSS product grades and indicator requirements (see Chapter 5); b) The ammonium fluoride content has been changed (see 6.2, 5.2 in the.2014 edition); c) The content of UP-SS grade ammonium fluorosilicate has been changed (see 6.2, 5.2 in the.2014 edition); d) Fourteen new indicators, including silver, gold, and bismuth, have been added (see 6.2); e) The method for determining ammonium fluoride content has been changed to automated potentiometric titration (see 7.3, 6.3 in the.2014 edition); f) The method for determining the ammonium fluorosilicate content has been changed to inductively coupled plasma mass spectrometry (see 7.4, 6.4 in the.2014 edition); g) The test procedure in the method for determining the content of anions such as chloride has been modified (see 7.7.4, 6.7.4 in the.2014 version); h) The test procedures in the determination methods for the content of 35 impurity elements, including silver and aluminum, have been modified (see 7.8.4, 6.8.4 in the.2014 version); i) The security clause has been removed (see Chapter 10 of the.2014 edition). Please note that some content in this document may involve patents. The issuing organization of this document assumes no responsibility for identifying patents. This document was proposed by the China Petroleum and Chemical Industry Federation. This document is under the jurisdiction of the National Technical Committee on Chemical Standardization (SAC/TC63). This document was drafted by. Zhongjuxin Technology Co., Ltd., Duofuduo New Materials Co., Ltd., and Zhejiang Kaisheng Fluorochemical Co., Ltd. Company, Zhongjuxin (Hubei) Technology Co., Ltd., Guizhou Wengfu Lantian Fluorochemical Co., Ltd., Hubei Xingli Electronic Materials Co., Ltd., Guizhou Shengwei Kaiyang Chemical Co., Ltd., Hubei Yihua Fluorochemical Co., Ltd., Fujian Jianyang Jinshi Fluorine Industry Co., Ltd., and Metrohm China Ltd. The company, Mettler Toledo Technologies (China) Co., Ltd., Fujian Yongjing Technology Co., Ltd., Qingdao Shenghan Chromatography Technology Co., Ltd. CNOOC Tianjin Chemical Research and Design Institute Co., Ltd. The main drafters of this document are. Zhang Xueliang, Xue Xujin, Zhao Xiaoya, Fu Tiezhu, Zhang Nan, Peng Fei, Ma Lei, Yang Bo, Wu Zhenqiu, Liu Binhua, and Yuan Chunwei. Liu Chunhua, Tian Haifeng, Guo Fengxin, Cheng Wenhai, Ye Wenhao, Yang Jiancheng, Jiang Liangshu, Chen Wei, Wang Xuemei, Li Haiyan, Ying Yunjin, Li You, Hao He, Liu Shipeng, Ji Ran, Zhao Meijing, Li Xia. The release history of this document and the document it replaces is as follows. ---First published in.2014, this is the first revision. High-purity ammonium fluoride solution 1.Scope This document specifies the classification, requirements, test methods, inspection rules, marking and accompanying documents, packaging, and transportation of high-purity ammonium fluoride solutions. Storage. This document applies to high-purity ammonium fluoride solutions. Note. This product is mainly used in industries such as cleaning and etching of solar photovoltaic cells, integrated circuits, and ultra-large-scale integrated circuit chips.

2 Normative references

The contents of the following documents, through normative references within the text, constitute essential provisions of this document. Dated citations are not included. For references to documents, only the version corresponding to that date applies to this document; for undated references, the latest version (including all amendments) applies. This document. GB/T 191-2008 Pictorial Symbols for Packaging and Storage GB/T 6678 General Rules for Sampling of Chemical Products GB/T 6680 General Rules for Sampling of Liquid Chemical Products GB/T 6682-2008 Specifications and test methods for water used in analytical laboratories GB/T 8170 Rules for rounding off numerical values and the representation and determination of limiting values GB/T 23769-2009 General Method for Determination of pH Value in Aqueous Solutions of Inorganic Chemical Products GB/T 23770-2009 General Method for Determination of Color in Liquid Inorganic Chemical Products JJG814-2015 Verification Procedure for Automatic Potentiometric Titrator HG/T 3696.1 Preparation of standard solutions, preparations and products for chemical analysis of inorganic chemical products - Part 1.Standard titration solutions Preparation of liquid HG/T 3696.2 Preparation of standard solutions, preparations and products for chemical analysis of inorganic chemical products - Part 2.Impurity standard solutions Preparation of liquid HG/T 3696.3 Preparation of standard solutions, formulations and products for chemical analysis of inorganic chemical products - Part 3.Formulations and products Preparation 3.Terms and Definitions This document does not contain any terms or definitions that need to be defined. 4.Molecular formula and relative molecular mass Molecular formula. NH4F. Relative molecular mass. 37.04 (based on the 2022 international relative atomic mass).

5 categories

High-purity ammonium fluoride solution is classified into 5 grades according to its intended use. a) EL grade. mainly used in the manufacture of solar photovoltaic cells and liquid crystal display devices; b) UP grade. Primarily used for cleaning and etching integrated circuits with linewidths of 0.8μm~1.2μm; c) UP-S grade. Primarily used for cleaning and etching of integrated circuits with linewidths of 0.2μm~0.8μm; d) UP-SS grade. Primarily used for cleaning and etching integrated circuits with linewidths of 0.09μm~0.2μm; e) UP-SSS grade. mainly used for cleaning and etching of integrated circuits with line width less than 0.09μm.

6 Requirements

6.1 Appearance. Colorless and transparent liquid. 6.2 The high-purity ammonium fluoride solution shall conform to the requirements of Table 1 when tested according to the test methods specified in this document. Table 1 project index EL level UP level UP-S level UP-SS level UP-SSS level Ammonium fluoride (NH4F) w/% 35.0±1.0 or 40.0±1.0 Ammonium fluorosilicate [(NH4)2SiF6]/(mg/kg) ≤ - - 10 5 1 Chroma/Black Level ≤ 10 10 10 10 5 pH (10 g/L solution, 25℃). 6.0~7.5 Chloride (as Cl)/(mg/kg) ≤ 5 5 0.2 0.05 0.01 Nitrate (as NO3)/(mg/kg) ≤ 3 3 0.1 0.05 0.01 Phosphate (as PO4)/(mg/kg) ≤ 1 1 0.1 0.05 0.01 Sulfate (as SO4)/(mg/kg) ≤ 5 5 0.2 0.05 0.01 Silver (Ag)/(μg/kg) ≤ -10 1 0.1 0.02 Aluminum (Al)/(μg/kg) ≤ 100 10 1 0.1 0.02 Arsenic (As)/(μg/kg) ≤ 300 10 1 0.1 0.02 Gold (Au)/(μg/kg) ≤ -10 1 0.1 0.02 Boron (B)/(μg/kg) ≤ 100 10 1 0.1 0.02 Barium (Ba)/(μg/kg) ≤ 100 10 1 0.1 0.02 Beryllium(Be)/(μg/kg) ≤ - - 1 0.1 0.02 Bismuth (Bi)/(μg/kg) ≤ - 10 1 0.1 0.02 Calcium (Ca)/(μg/kg) ≤ 100 10 1 0.1 0.02 Cadmium (Cd)/(μg/kg) ≤ 50 10 1 0.1 0.02 Cobalt (Co)/(μg/kg) ≤ - - 1 0.1 0.02 Chromium (Cr)/(μg/kg) ≤ 20 10 1 0.1 0.02 Copper (Cu)/(μg/kg) ≤ 20 10 1 0.1 0.02 Iron (Fe)/(μg/kg) ≤ 100 10 1 0.1 0.02 Gallium(Ga)/(μg/kg) ≤ - - 1 0.1 0.02 Germanium (Ge)/(μg/kg) ≤ - 10 1 0.1 0.02 Table 1 (continued) project index EL level UP level UP-S level UP-SS level UP-SSS level Potassium (K)/(μg/kg) ≤ 100 10 1 0.1 0.02 Lithium (Li)/(μg/kg) ≤ 20 10 1 0.1 0.02 Magnesium (Mg)/(μg/kg) ≤ 100 10 1 0.1 0.02 Manganese (Mn)/(μg/kg) ≤ 50 10 1 0.1 0.02 Molybdenum (Mo)/(μg/kg) ≤ - 10 1 0.1 0.02 Sodium (Na)/(μg/kg) ≤ 100 10 1 0.1 0.02 Niobium (Nb)/(μg/kg) ≤ - - 1 0.1 0.02 Nickel (Ni)/(μg/kg) ≤ 50 10 1 0.1 0.02 Lead (Pb)/(μg/kg) ≤ 50 10 1 0.1 0.02 Palladium (Pd)/(μg/kg) ≤ -10 1 0.1 0.02 Antimony (Sb)/(μg/kg) ≤ 50 10 1 0.1 0.02 Tin (Sn)/(μg/kg) ≤ 20 10 1 0.1 0.02 Strontium (Sr)/(μg/kg) ≤ -10 1 0.1 0.02 Tantalum (Ta)/(μg/kg) ≤ -10 1 0.1 0.02 Titanium (Ti)/(μg/kg) ≤ 100 10 1 0.1 0.02 Thallium(Tl)/(μg/kg) ≤ - 10 1 0.1 0.02 Vanadium (V)/(μg/kg) ≤ - - 1 0.1 0.02 Zinc (Zn)/(μg/kg) ≤ 50 10 1 0.1 0.02 Zirconium (Zr)/(μg/kg) ≤ - 10 1 0.1 0.02 Particles/(pieces/mL) (≥1.0μm) ≤ 50 - - - - (≥0.5μm) ≤ - 25 5 - - (≥0.2μm) ≤ - - - 10 10 (≥0.1μm) ≤ - - - - 50 7.Test Methods Warning. Some reagents or materials used in this test method are corrosive. Operators should exercise caution and avoid skin contact. If it comes into contact with skin, rinse immediately with water; in severe cases, seek immediate medical attention. 7.1 General Provisions Unless otherwise specified, all reagents and water used in this document refer to analytical grade reagents or materials and those specified in GB/T 6682-2008. Grade III water as specified. Unless otherwise specified, all standard titration solutions, impurity standard solutions, preparations, and products used in the experiment shall be in accordance with... Prepared according to the provisions of HG/T 3696.1, HG/T 3696.2 and HG/T 3696.3. ......

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