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GB/T 30652-2023 English PDF

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Q: Should I purchase the latest version GB/T 30652-2023?

Yes. Unless special scenarios such as technical constraints or academic study, you should always prioritize to purchase the latest version GB/T 30652-2023 even if the enforcement date is in future. Complying with the latest version means that, by default, it also complies with all the earlier versions, technically.

US$189.00 · In stock
Delivery: <= 3 days. True-PDF full-copy in English will be manually translated and delivered via email.
GB/T 30652-2023: Trichlorosilane for silicon epitaxial
Status: Valid

GB/T 30652: Historical versions

Standard ID	USD	BUY PDF	Lead-Days	Standard Title (Description)	Status
GB/T 30652-2023	189	Add to Cart	3 days	Trichlorosilane for silicon epitaxial	Valid
GB/T 30652-2014	239	Add to Cart	2 days	Trichlorosilane for silicon epitaxial	Obsolete

Similar standards

GB/T 29055 GB/T 31854 SJ/T 11488 GB/T 43662 GB/T 30656

Basic data

Standard ID: GB/T 30652-2023 (GB/T30652-2023)
Description (Translated English): Trichlorosilane for silicon epitaxial
Sector / Industry: National Standard (Recommended)
Classification of Chinese Standard: H83
Classification of International Standard: 29.045
Word Count Estimation: 10,132
Date of Issue: 2023-08-06
Date of Implementation: 2024-03-01
Older Standard (superseded by this standard): GB/T 30652-2014
Issuing agency(ies): State Administration for Market Regulation, China National Standardization Administration

GB/T 30652-2023: Trichlorosilane for silicon epitaxial

---This is a DRAFT version for illustration, not a final translation. Full copy of true-PDF in English version (including equations, symbols, images, flow-chart, tables, and figures etc.) will be manually/carefully translated upon your order.
ICS 29.045 CCSH83 National Standards of People's Republic of China Replace GB/T 30652-2014 Trichlorosilane for silicon epitaxy Published on 2023-08-06 2024-03-01 Implementation State Administration for Market Regulation Released by the National Standardization Administration Committee

Foreword

This document complies with the provisions of GB/T 1.1-2020 "Standardization Work Guidelines Part 1.Structure and Drafting Rules of Standardization Documents" Drafting. This document replaces GB/T 30652-2014 "Trichlorosilane for Silicon Epitaxy". Compared with GB/T 30652-2014, except for structural adjustments and In addition to editorial changes, the main technical changes are as follows. a) Changed the scope of application (see Chapter 1, Chapter 1 of the.2014 edition); b) Added a chapter on terms and definitions (see Chapter 3); c) Changed some technical index requirements (see 4.1, 3.2 of the.2014 version); d) Added test methods for some projects (see Chapter 5, Chapter 4 of the.2014 edition); e) The regulations for group batching have been changed (see 6.2, 5.2 of the.2014 version); f) Added inspection items (see 6.3); g) Changed the requirements for sampling and sample preparation (see 6.4, 5.3 of the.2014 edition); h) The judgment of inspection results has been changed (see 6.5,.2014 version 5.4); i) Changed the requirements for marking (see 7.1, 6.1 of the.2014 version); j) Changed the requirements for marking, packaging, transportation, storage, etc. (see Chapter 7, Chapter 6 of the.2014 edition). Please note that some content in this document may be subject to patents. The publisher of this document assumes no responsibility for identifying patents. This document is jointly developed by the National Semiconductor Equipment and Materials Standardization Technical Committee (SAC/TC203) and the National Semiconductor Equipment and Materials Standards It was jointly proposed and coordinated by the Materials Sub-Technical Committee of the Chemistry Technical Committee (SAC/TC203/SC2). This document was drafted by. Luoyang China Silicon High-tech Co., Ltd., Nonferrous Metals Technology and Economic Research Institute Co., Ltd., Shanghai Yibo Gas Body Co., Ltd., Nanjing Guosheng Electronics Co., Ltd., Tangshan Sanfu Electronic Materials Co., Ltd., Shanghai Xinsheng Semiconductor Technology Co., Ltd., Shanghai Jingmeng Silicon Materials Co., Ltd., Xinjiang Daqo New Energy Co., Ltd., Shaanxi Nonferrous Tianhongruike Silicon Materials Co., Ltd., Wuhan New Silicon Technology Qianjiang Co., Ltd., Yichang CSG Silicon Materials Co., Ltd., China Jinghua (Tianjin) Semiconductor Materials Co., Ltd., Haohua Gas Co., Ltd. Company, Xinjiang Xinte New Energy Materials Testing Center Co., Ltd., Qinghai AVIC Silicon Materials Co., Ltd., Qinyang Guoshun Silicon Source Optoelectronic Gas Co., Ltd. Company, Jiangxi Chenguang New Materials Co., Ltd. The main drafters of this document. Wan Ye, Zhao Xiong, Yan Dazhou, Liu Jianhua, Zhang Yuanyuan, Li Suqing, Li Jianxin, Li Feiming, Feng Yongping, Sun Renjing, Zhang Bin, Gu Guangan, Yu Shenghai, Deng Yuanhong, Xu Yan, Li Kaidong, Liu Wenming, Li Mingda, Fu Mengyue, Qiu Yanmei, Bian Hongli, Shi Juntao, Liang Qiuhong. This document was first published in.2014 and this is the first revision. Trichlorosilane for silicon epitaxy

1 Scope

This document specifies the technical requirements, test methods, inspection rules, marking, packaging, transportation and storage of trichlorosilane (SiHCl3) for silicon epitaxy. Deposit, accompanying documents and order form contents. This document applies to trichlorosilane for silicon epitaxy (hereinafter referred to as the product) produced by refining and purifying trichlorosilane as raw material.

2 Normative reference documents

The contents of the following documents constitute essential provisions of this document through normative references in the text. Among them, the dated quotations For undated referenced documents, only the version corresponding to that date applies to this document; for undated referenced documents, the latest version (including all amendments) applies to this document. GB 190 Dangerous goods packaging markings GB/T 191 Packaging, storage and transportation pictorial mark GB/T 1551 Determination of resistivity of silicon single crystal. direct current four-probe method and direct current two-probe method GB/T 3723 General Safety Principles for Sampling Industrial Chemical Products GB 12463 General technical conditions for transport and packaging of dangerous goods GB/T 14264 Semiconductor Material Terminology GB 15258 Regulations on Preparing Chemical Safety Labels GB/T 16483 Chemical Safety Data Sheet Contents and Project Sequence GB/T 24581 Determination of Group III and V impurity content in silicon single crystals by low-temperature Fourier transform infrared spectroscopy GB/T 26571 Specification for storage period of special gases GB/T 28654 Industrial trichlorosilane GB/T 29056 Methods for chemical analysis of trichlorosilane for silicon epitaxy Quantities of boron, aluminum, phosphorus, vanadium, chromium, manganese, iron, cobalt, nickel, copper, molybdenum, arsenic and antimony Determination of inductively coupled plasma mass spectrometry GB/T 29057 Procedure for evaluating polycrystalline silicon rods using zone melting crystal pulling method and spectral analysis method GB 30000.19 Specification for Classification and Labeling of Chemicals Part 19.Skin Corrosion/Irritation YS/T 987 Determination of carbon content in chlorosilane gas chromatography mass spectrometry YS/T 1059 Gas chromatography method for determination of total carbon in trichlorosilane for silicon epitaxy YS/T 1060 Determination of other chlorosilanes in trichlorosilane for silicon epitaxy by gas chromatography

3 Terms and definitions

The terms and definitions defined in GB/T 14264 apply to this document.

4 Technical requirements

4.1 Technical indicators The technical indicators of the product should comply with the provisions of Table 1. ......

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Tips & Frequently Asked Questions:

Question 1: How long will the true-PDF of GB/T 30652-2023_English be delivered?

Answer: Upon your order, we will start to translate GB/T 30652-2023_English as soon as possible, and keep you informed of the progress. The lead time is typically 1 ~ 3 working days. The lengthier the document the longer the lead time.

Question 2: Can I share the purchased PDF of GB/T 30652-2023_English with my colleagues?

Answer: Yes. The purchased PDF of GB/T 30652-2023_English will be deemed to be sold to your employer/organization who actually pays for it, including your colleagues and your employer's intranet.

Question 3: Does the price include tax/VAT?

Answer: Yes. Our tax invoice, downloaded/delivered in 9 seconds, includes all tax/VAT and complies with 100+ countries' tax regulations (tax exempted in 100+ countries) -- See Avoidance of Double Taxation Agreements (DTAs): List of DTAs signed between Singapore and 100+ countries

Question 4: Do you accept my currency other than USD?

Answer: Yes. If you need your currency to be printed on the invoice, please write an email to Sales@ChineseStandard.net. In 2 working-hours, we will create a special link for you to pay in any currencies. Otherwise, follow the normal steps: Add to Cart -- Checkout -- Select your currency to pay.

Question 5: Should I purchase the latest version GB/T 30652-2023?

Answer: Yes. Unless special scenarios such as technical constraints or academic study, you should always prioritize to purchase the latest version GB/T 30652-2023 even if the enforcement date is in future. Complying with the latest version means that, by default, it also complies with all the earlier versions, technically.