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GB/T 26113-2010 English PDF

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GB/T 26113-2010140 Add to Cart Auto, < 3 mins Micro-electromechanical system technology -- General rules for the assessment of micro-geometrical parameters Valid

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Basic data

Standard ID: GB/T 26113-2010 (GB/T26113-2010)
Description (Translated English): Micro-electromechanical system technology -- General rules for the assessment of micro-geometrical parameters
Sector / Industry: National Standard (Recommended)
Classification of Chinese Standard: L55
Classification of International Standard: 31.200
Word Count Estimation: 12,152
Date of Issue: 1/10/2011
Date of Implementation: 10/1/2011
Quoted Standard: GB/T 3505; GB/T 18779.2; GB/T 26111
Regulation (derived from): Announcement of Newly Approved National Standards 2011 No. (No. 166 overall) 1
Issuing agency(ies): General Administration of Quality Supervision, Inspection and Quarantine of the People's Republic of China, Standardization Administration of the People's Republic of China
Summary: This Standard specifies the basic principles of assessment of micro-geometry, the assessment factors, assessment procedures, evaluation methods and assessment rules. This Standard is applicable to enterprises, research institutions, and other testing organizations engaged in MEMS technology and product research, design, production and testing.

GB/T 26113-2010: Micro-electromechanical system technology -- General rules for the assessment of micro-geometrical parameters


---This is a DRAFT version for illustration, not a final translation. Full copy of true-PDF in English version (including equations, symbols, images, flow-chart, tables, and figures etc.) will be manually/carefully translated upon your order.
Micro-electromechanical system technology. General rules for the assessment of micro-geometrical parameters ICS 31.200 L55 National Standards of People's Republic of China Micro-electromechanical systems (MEMS) technology Micro Geometrical assessment - General Issued on. 2011-01-10 2011-10-01 implementation Administration of Quality Supervision, Inspection and Quarantine of People's Republic of China Standardization Administration of China released

Foreword

This standard was drafted in accordance with GB/T 1.1-2009 given rules. This standard by the National MEMS Technology Standardization Technical Committee (SAC/TC336) and focal points. This standard is mainly drafted by. The machine Productivity Promotion Center, Xi'an Jiaotong University, Tianjin University, Zhongyuan University of Technology. The main drafters of this standard. Ding Hongyu, Zhang Ping, Liu Wei, Jiang Zhuang Germany, King Xuan Wei, Hu Xiaodong, Zhao Zexiang. Micro-electromechanical systems (MEMS) technology Micro Geometrical assessment - General

1 Scope

This standard specifies the basic principles of assessment of the amount of the micro-geometry, elements of assessment, assessment procedures, evaluation methods and assessment rules. This standard applies to enterprises, research institutions, testing institutions engaged in MEMS technology and product research, design, production and testing.

2 Normative references

The following documents for the application of this document is essential. For dated references, only the edition are not applicable to the present file. For undated references, the latest edition (including any amendments) applies to this document. GB/T 3505 Geometrical product specifications (GPS) Surface texture Profile method - Terms, definitions and surface texture parameters GB/T 18779.2 Geometrical Product Specifications (GPS) - Inspection by measurement of workpieces and measuring equipment - Part 2. measuring equipment Calibration and product testing in GPS measurements Uncertainty Evaluation Guide GB/T 26111 micro-electromechanical systems (MEMS) technology terms

3 Terms and Definitions

Terms and definitions in GB/T 3505 and GB/T 26111 and given the following terms and definitions apply to this document. 3.1 Micro geometric elements micro-geometricalfeature Dots microstructure geometric features basic, line, surface. 3.2 Micro-geometry micro-geometricalparameter Geometric parameters of MEMS components. 3.3 Dimensional characteristics featureofsize By a certain size of linear or angular dimensions sizing geometry. 3.4 Surface structure surfacestructure Geometric repetitive or accidental deviation surface, these deviations form a three dimensional topography of the surface. 3.5 Surface (structural) parameter surface (structure) parameter Surface micro-geometry parameters representing characteristics. 3.6 Shape Feature characteristicofform The actual shape of the single elements of the whole amount of variation allowed.
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