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GB/T 14604: Historical versions
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| GB/T 14604-2009 | English | 259 |
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Gas for electronic industry -- Oxygen
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| GB/T 14604-1993 | English | 319 |
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Gases for electronic industry. Oxygen
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Basic data
| Standard ID | GB/T 14604-2009 (GB/T14604-2009) |
| Description (Translated English) | Gas for electronic industry -- Oxygen |
| Sector / Industry | National Standard (Recommended) |
| Classification of Chinese Standard | G86 |
| Classification of International Standard | 71.100.20 |
| Word Count Estimation | 11,111 |
| Date of Issue | 2009-10-30 |
| Date of Implementation | 2010-05-01 |
| Older Standard (superseded by this standard) | GB/T 14604-1993 |
| Quoted Standard | GB 190; GB/T 3723; GB/T 3863; GB 5099; GB 7144; GB/T 8984; GB 14194; GB/T 14600; GB 16912; JB/T 5905; JB/T 6897; JB/T 6898; pressure Vessel safety Technology Supervision; ; pressure pipeline safety management and monitoring requirements cylinders safety Supervision |
| Regulation (derived from) | National Standard Approval Announcement 2009 No.12 (Total No.152) |
| Issuing agency(ies) | General Administration of Quality Supervision, Inspection and Quarantine of the People's Republic of China, Standardization Administration of the People's Republic of China |
| Summary | This standard specifies the electronics industry with the technical requirements set out, test methods and packaging, signs, storage and safety. This standard applies to cryogenic method, electrolytic extraction of gaseous or liquid oxygen, and oxygen obtained by purification methods. They are mainly used for chemical vapor deposition of silicon dioxide, used as the oxidizing source and high-purity water producing reactants for plasma etching and stripping. |
GB/T 14604-2009: Gas for electronic industry -- Oxygen
---This is a DRAFT version for illustration, not a final translation. Full copy of true-PDF in English version (including equations, symbols, images, flow-chart, tables, and figures etc.) will be manually/carefully translated upon your order.
Gas for electronic industry. Oxygen
ICS 71.100.20
G86
National Standards of People's Republic of China
Replacing GB/T 14604-1993
Electronic industrial gas oxygen
Posted 2009-10-30
2010-05-01 implementation
Administration of Quality Supervision, Inspection and Quarantine of People's Republic of China
Standardization Administration of China released
Foreword
This standard replaces GB/T 14604-1993 "Electronic industrial gases oxygen."
This standard and GB/T 14604-1993 compared to the main changes are as follows.
--- Modify the electronics industry with a range of suitable oxygen (GB/T 14604-1993 Chapter 1, Chapter 1 of this edition);
--- Modify Normative references (GB/T 14604-1993 of Chapter 2, this version of Chapter 2);
--- Modify the contents of the technical indicators (GB/T 14604-1993 Chapter 3, Chapter 3 of this edition);
--- Modify the electronics industry with bottled oxygen sampling requirements (GB/T 14604-1993 4.1, this version 4.1.3);
--- Modify the electronics industry with bottled oxygen sampling method (GB/T 14604-1993 Chapter 5, this edition 4.1.1,4.1.2,4.1.4);
--- Modify hydrogen, argon, nitrogen, krypton, carbon monoxide, carbon dioxide, nitrous oxide, total hydrocarbons and water content analysis and standard samples of Regulation
Set, when a variety of assays appears to require arbitration method (GB/T 14604-1993 of 4.3,4.4,4.5,4.6,4.7,
4.8, this version of 4.3,4.4,4.6,4.7,4.8);
--- Increase nitric oxide content analysis (edition 4.5);
--- Modify signs, packaging, storage and security (GB/T 14604-1993 of Chapter 6, Chapter 7, Chapter 5 of this edition);
--- Omitted GB/T 14604-1993 Appendix A and Appendix B;
--- Increase Normative Appendix A, and the determination of the electronics industry uses helium ionization gas chromatography with oxygen in hydrogen, argon, nitrogen and krypton component
The method to write the appendix (see Appendix A);
--- Increase Normative Appendix B, and the determination of the electronics industry uses helium ionization gas chromatography with oxygen in carbon monoxide, carbon dioxide
Nitrous oxide components and methods of writing the appendix (see Appendix B).
This standard Annex A, Annex B normative appendix.
This standard by the National Standardization Technical Committee of semiconductor equipment and materials proposed.
The standard equipment by the National Standardization Technical Committee and the semiconductor material gas partial Technical Committee.
This standard was drafted. China Institute of Metrology, Southwest Chemical Industry Research and Design Institute.
The main drafters of this standard. Zhouze Yi, Zhou Pengyun.
This standard replaces the standards previously issued as follows.
--- GB/T 14604-1993.
Electronic industrial gas oxygen
1 Scope
This standard specifies the technical requirements of the electronics industry with oxygen, test methods and packaging, labeling, storage and security.
This standard applies to cryogenic, electrolysis extraction of gaseous or liquid oxygen, and oxygen obtained through the purification process. They are mainly used for two
Chemical vapor deposition of silicon oxide, used as an oxidizing source and production of high pure reagents for plasma etching and stripping, the optical fiber.
Molecular formula. O2.
Molecular Weight. 31.9988 (according to 2005 international relative atomic mass calculation).
2 Normative references
The following documents contain provisions which, through reference in this standard and become the standard terms. For dated references, subsequent
Amendments (not including errata content) or revisions do not apply to this standard, however, encourage the parties to the agreement are based on research
Whether the latest versions of these documents. For undated reference documents, the latest versions apply to this standard.
GB 190 packaging and marking of dangerous goods
GB/T 3723 Sampling of chemical products for industrial use General Safety
GB/T 3863 industrial oxygen
GB 5099 seamless steel gas cylinders (GB 5099-1994, neqISO 4705.1993)
GB 7144 cylinders color logo
GB/T 8984 of carbon monoxide, carbon dioxide and hydrocarbons by gas chromatography
GB 14194 permanent gas cylinders
GB/T 14600 electronic industrial gas nitrous oxide
GB 16912 Deep frozen production of oxygen and gas safety related technical specifications
JB/T 5905 multi-layer vacuum insulated cryogenic liquid containers
JB/T 6897 cryogenic liquid tanker
JB/T 6898 cryogenic liquid storage equipment safety rules
Gas Cylinder Safety Supervision
Pressure Vessel Safety Technology Supervision
Pressure pipeline safety management and monitoring requirements
3 Technical requirements
Electronic industrial oxygen gas quality shall meet the requirements of Table 1.
Table 1 Technical Specifications
Item Index
Oxygen (O2) purity/content (volume fraction)/10-2 ≥ 99.9998 99.98 99.5
Hydrogen (H2) content (volume fraction)/10-6 < 0.1 11
Argon (Ar) content (volume fraction)/10-6 < 1.0 100--
Nitrogen (N2) content (volume fraction)/10-6 < 0.5 30 100
Carbon monoxide (CO) content (volume fraction)/10-6 < 0.1 1--
...
