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GB 50781-2012 PDF English

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GB 50781-2012: Technical code for Chemical System of Electronic Factory
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GB 50781-2012: Technical code for Chemical System of Electronic Factory

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NATIONAL STANDARD OF THE PEOPLE’S REPUBLIC OF CHINA Technical Code for Chemical System of Electronic Factory Issued on: JUNE 28, 2012 Implemented on: DECEMBER 1, 2012 Jointly Issued by. Ministry of Housing and Urban-Rural Development of the People's Republic of China; General Administration of Quality Supervision, Inspection and Quarantine of the People’s Republic of China. GB

Foreword

According to the requirements of "Notice on Printing the Development and Revision Plan of National Engineering Construction Standards and Codes in 2007 (the Second Batch)" (JIANBIAO [2007] No. 126), this code is prepared by The IT Electronics Eleventh Design & Research Institute Scientific and Technological Engineering Corporation Limited jointly with other organizations concerned. According to the actual design, construction and operation conditions of integrated circuit factories, flat display device factories and solar panel factories in China, and considering the current status of factories, this code is finalized after conducting investigation and study for foreign engineering companies, taking advice from organizations and individuals concerned throughout the country, and making repeat modification and final examination. This code consists of 7 chapters, including General Provisions, Terms and Abbreviation, Chemical Supply System, Chemical Reclaiming System, Chemical Monitor and Safety System, Design of Relating Disciplines and Engineering Construction and Acceptance. In this code, the provisions printed in bold type are compulsory and must be enforced strictly. The Ministry of Housing and Urban-Rural Development is in charge of the administration of this code and the explanation of the compulsory provisions; the Ministry of Industry and Information Technology is responsible for routine management and The IT Electronics Eleventh Design & Research Institute Scientific and Technological Engineering Corporation Limited is responsible for the explanation of specific technical contents. During the process of implementation, if any opinion and suggestion, please send them to the Administrative Group for "Technical Code for Chemical System of Electronic Factory" of The IT Electronics Eleventh Design & Research Institute Scientific and Technological Engineering Corporation Limited (Address. No. 251, Shuanglin Road, Chengdu, Sichuan; Postcode. 610021; Fax. 028-84333172) for future reference in revision. Chief development organizations, participating development organizations, chief drafters and chief examiners of this code. Chief development organizations. The IT Electronics Eleventh Design & Research Institute Scientific and Technological Engineering Corporation Limited Electronic Engineering Standard Rating Station of the Ministry of Information Industry Participating development organizations. China Electronics System Engineering No.2 Construction Co., Ltd. Shanghai Hua Hong NEC Electronics Co., Ltd. Chengdu ED Engineering Co., Ltd. Shanghai Zhengfan Science and Technology Co., Ltd. Winmax Technology Corp. Air Liquide Shanghai Co., Ltd. Shanghai Brother Microelectronics Technology Co., Ltd.

Table of Contents

1 General Provisions ... 1 2 Terms and Abbreviation ... 2 2.1 Terms ... 2 2.2 Abbreviation ... 3 3 Chemical Supply System ... 4 3.1 General Requirements ... 4 3.2 Supply Equipment ... 4 3.3 Supply Piping System ... 6 3.4 Equipment and Piping Materials ... 7 3.5 Piping Identification ... 8 4 Chemical Reclaiming System ... 9 4.1 General Requirements ... 9 4.2 Reclaiming Equipment ... 9 4.3 Reclaiming Piping ... 9 5 Chemical Monitor and Safety System ... 11 5.1 General Requirements ... 11 5.2 Equipment Requirement ... 11 5.3 System Requirement ... 11 6 Design of Relating Disciplines ... 13 6.1 Building Structure ... 13 6.2 Electrical and Instrument Control ... 14 6.3 Plumbing and Fire Protection ... 14 6.4 Ventilation and Air Conditioning ... 15 7 Engineering Construction and Acceptance ... 17 7.1 General Requirement ... 17 7.2 Site Inspection and Acceptance of Equipment and Materials ... 17 7.3 Equipment Installation ... 18 7.4 Chemical Supply Piping Installation ... 19 7.5 Construction and Installation of Double-wall Piping ... 19 7.6 Welding Installation of Inner Piping of Acid/alkali Containing Piping ... 21 7.7 Installation of Solvent Chemical Piping ... 21 7.8 Construction of Waste Liquid Piping ... 23 7.9 Piping Equipment Identification ... 23 7.10 Pipeline and System Testing ... 23 7.11 Construction of Renovation Engineering ... 24 7.12 Engineering Acceptance... 25 Explanation of Wording in This Code ... 27 List of Quoted Standards ... 28

1 General Provisions

1.0.1 This code is prepared with a view to make the engineering design, construction and acceptance of chemical supply system, chemical reclaiming system and their supporting facilities of electronic factory, comply with the policy guidelines of national engineering construction, and ensure the safety and reliability, energy conservation, environmental protection, technical advancement, economic applicability of the engineering. 1.0.2 This code is applicable to the design, construction and acceptance of constructed, renovated or extended engineering of chemical supply system and chemical reclaiming system in such production processes of electronic factory as integrated circuit, flat display device and solar panel in electronics industry. 1.0.3 This code is not applicable to the design, construction and acceptance of chemical system engineering of production auxiliary and public facility system such as chemical warehouse, equipment cleaning, wastewater treatment, pure water preparation and waste gas treatment in electronic factory. 1.0.4 The design, construction and acceptance of chemical system engineering of electronic factory shall not only meet the requirements of this code, but also those in the current relevant ones of the nation.

2 Terms and Abbreviation

2.1 Terms 2.1.1 Chemical system A general term of acid/alkali containing chemical, solvent chemical and grinding fluid chemical systems of electronic factory. 2.1.2 Chemical supply system A general term of piping and equipment of acid/alkali containing chemical, solvent chemical and grinding fluid chemical supply system of electronic factory. 2.1.3 Chemical reclaiming system A general term of piping and equipment of acid/alkali containing chemical, solvent chemical and grinding fluid chemical reclaiming system of electronic factory. 2.1.4 Chemical lorry The specialized vehicle used for transporting large amount of chemicals in electronic factory. 2.1.5 Chemical container The small v... ......
Source: Above contents are excerpted from the full-copy PDF -- translated/reviewed by: www.ChineseStandard.net / Wayne Zheng et al.

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