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GB/T 28159-2025: Electronic grade phosphoric acid
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GB/T 28159-2025: Electronic grade phosphoric acid

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ICS 31.030 CCSL90 National Standards of the People's Republic of China Replaces GB/T 28159-2011 Electronic grade phosphoric acid Published on 2025-08-29 Implemented on 2026-03-01 State Administration for Market Regulation The State Administration for Standardization issued a statement.

Foreword

This document complies with the provisions of GB/T 1.1-2020 "Standardization Work Guidelines Part 1.Structure and Drafting Rules of Standardization Documents". Drafting. This document replaces GB/T 28159-2011 "Electronic Grade Phosphoric Acid". Compared with GB/T 28159-2011, the main differences are structural adjustments and editorial changes. Aside from the modifications, the main technical changes are as follows. a) The specification grades for electronic-grade phosphoric acid have been changed (see 4.2,.2011 edition of 4.2); b) The test method for the appearance of electronic-grade phosphoric acid has been changed (see 5.2, 5.3 in the.2011 edition); c) A method for testing the content of electronic-grade phosphoric acid using a potentiometric titrator and a density meter has been added (see 5.3.2.5 and 5.3.3); d) Colorimetric items and detection methods have been added (see 5.4); e) The test method for electronic-grade easily oxidized phosphoric acid has been changed (see 5.5,.2011 edition of 5.5); f) The test method for electronic-grade metal phosphate ions has been changed (see 5.6,.2011 edition of 5.6); g) The test methods for electronic-grade phosphate chloride, nitrate, and sulfate have been modified (see 5.7,.2011 edition of 5.7); h) The test method for electronic-grade phosphoric acid particles has been changed (see 5.8,.2011 edition of 5.8); i) Volatile acid items and detection methods have been added (see 5.9). Please note that some content in this document may involve patents. The issuing organization of this document assumes no responsibility for identifying patents. This document was proposed and is under the jurisdiction of the National Semiconductor Equipment and Materials Standardization Committee (SAC/TC203). This document was drafted by. China Electronics Technology Standardization Institute, Hubei Xingfu Electronic Materials Co., Ltd., and Guizhou Phosphate (Group) Co., Ltd. Limited Liability Company, Jiangyin Jianghua Microelectronics Materials Co., Ltd., Jiangsu Meiyang Electronic Materials Co., Ltd., Tianfu (Jiangsu) Technology Co., Ltd. The company, Xi'an Geely Electronic New Materials Co., Ltd., Xinlian Electronic Materials Technology Co., Ltd., and Guangxi Chuanjinno Chemical Co., Ltd. Company, Jiangsu Chengxing Phosphorus Chemical Co., Ltd., Yunnan Provincial Chemical Product Quality Supervision and Inspection Station, Lianshi New Materials (Suzhou) Co., Ltd. Hubei Saning Chemical Co., Ltd., Guangxi Qinzhou Zhicheng Chemical Co., Ltd., Meishan Shengke Electronic Chemical Co., Ltd., and Jingrui Electronic Materials Joint-stock limited company. The main drafters of this document are. Cao Kewei, Li Shaoping, Shi Zeyuan, Zhao Junsha, Jiang Fei, Chen Huiyun, Gu Lingyan, Wu Yiran, Li Xiangqing, and Su Shoujin. Nie Xinyu, Zhang Baoshuai, Hu Guotao, Jia Chenglin, Chen Wei, Xu Haisheng, Zhang Shujuan, Wang Qin, Yao Sha, Li Wanqing, Lei Huixian, Li Quandong, Ye Rui, He Zhaobo Huang Rulin, Zhang Yongping, Huang Junqun, Qian Senlin, and Wang Honghua. The release history of this document and the document it replaces is as follows. ---First published in.2011 as GB/T 28159-2011; ---This is the first revision. Electronic grade phosphoric acid 1.Scope This document specifies the requirements, inspection rules, marking, packaging, transportation, storage, and safety of electronic-grade phosphoric acid, and describes the corresponding test procedures. Verification method. This document applies to electronic-grade phosphoric acid used in industries such as semiconductor integrated circuits, chips, and display panels.

2 Normative references

The contents of the following documents, through normative references within the text, constitute essential provisions of this document. Dated citations are not included. For references to documents, only the version corresponding to that date applies to this document; for undated references, the latest version (including all amendments) applies. This document. GB/T 191 Pictorial Symbols for Packaging and Storage GB/T 601 Preparation of Standard Titration Solutions for Chemical Reagents GB/T 602 Preparation of standard solutions for the determination of impurities in chemical reagents GB/T 603 Preparation of reagents and products used in chemical reagent test methods GB/T 1282-2013 Chemical Reagent Phosphoric Acid GB 1886.15-2015 National Food Safety Standard for Food Additives - Phosphoric Acid GB/T 8170 Rules for rounding off numerical values and the representation and determination of limiting values GB/T 11446.1 Electronic Grade Water GB 15258 Regulations for Writing Safety Labels for Chemicals GB/T 23770 General Method for Determination of Color in Liquid Inorganic Chemical Products GB/T 25915.1 Cleanrooms and related controlled environments – Part 1.Classification of air cleanliness levels by particle concentration GB/T 34672-2017 General Rules for the Determination of Chemical Reagents by Ion Chromatography SJ/T 11637-2016 General Rules for Inductively Coupled Plasma Mass Spectrometry of Electronic Chemicals SJ/T 11638 Test methods for particulate matter in electronic chemicals 3.Terms and Definitions This document does not contain any terms or definitions that need to be defined.

4 Requirements

4.1 Appearance Electronic grade phosphoric acid should be a colorless and transparent liquid. 4.2 Specifications Electronic grade phosphoric acid is divided into three grades. E1, E2, and E3.E1 grade is mainly used in the display panel industry, while E2 grade is mainly used in... It is used in the 8-inch integrated circuit industry, while E3 grade is mainly used in the 12-inch integrated circuit industry. 4.3 Technical Requirements The technical requirements for electronic-grade phosphoric acid shall comply with the provisions of Table 1. Table 1 Technical Requirements project index E3 E2 E1 Phosphoric acid (H3PO4) mass fraction/% 85~90 85~90 85~90 Chromaticity/Black Level ≤ 5 ≤ 5 ≤ 10 Mass fraction of easily oxidized compounds (as H3PO3)/% ≤0.0005 ≤0.0005 ≤0.001 Nitrate (NO₃⁻) mass fraction (mg/kg). ≤0.1 ≤0.1 ≤0.5 Sulfate (SO₄⁻) mass fraction (mg/kg). ≤0.5 ≤0.5 ≤5 Chloride (Cl-) mass fraction/(mg/kg) ≤0.5 ≤0.5 ≤0.5 Volatile acid content (calculated as H+)/(mmol/g) ≤0.0002 ≤0.0002 ≤0.0002 Silver (Ag) mass fraction (μg/kg). ≤1, ≤5, ≤20 Aluminum (Al) mass fraction (μg/kg). ≤1, ≤5, ≤50 Arsenic (As) mass fraction (μg/kg) ≤1 ≤5 ≤20 Gold (Au) mass fraction (μg/kg). ≤1, ≤5, ≤10 Boron (B) mass fraction (μg/kg). ≤1, ≤5, ≤50 Barium (Ba) mass fraction (μg/kg). ≤1, ≤5, ≤20 Calcium (Ca) mass fraction (μg/kg). ≤1, ≤5, ≤50 Cadmium (Cd) mass fraction (μg/kg). ≤1, ≤5, ≤20 Cobalt (Co) mass fraction (μg/kg). ≤1, ≤5, ≤20 Chromium (Cr) mass fraction (μg/kg). ≤3 ≤5 ≤20 Copper (Cu) mass fraction (μg/kg). ≤1, ≤5, ≤20 Iron (Fe) mass fraction (μg/kg). ≤5, ≤20, ≤50 Gallium (Ga) mass fraction (μg/kg) ≤1 ≤5 ≤10 Potassium (K) mass fraction (μg/kg). ≤1, ≤5, ≤20 Lithium (Li) mass fraction (μg/kg). ≤1, ≤5, ≤10 Magnesium (Mg) mass fraction (μg/kg). ≤1, ≤5, ≤20 Manganese (Mn) mass fraction (μg/kg) ≤1 ≤5 ≤20 Molybdenum (Mo) mass fraction (μg/kg). ≤1, ≤5, ≤20 Sodium (Na) mass fraction (μg/kg). ≤1, ≤5, ≤50 Nickel (Ni) mass fraction (μg/kg). ≤3, 5, ≤20 Lead (Pb) mass fraction (μg/kg). ≤1, ≤5, ≤20 Antimony (Sb) mass fraction (μg/kg). ≤1, ≤5, ≤100 Tin (Sn) mass fraction (μg/kg). ≤1, ≤5, ≤10 Table 1 Technical Requirements (Continued) project index E3 E2 E1 Strontium (Sr) mass fraction (μg/kg). ≤1, ≤5, ≤20 Titanium (Ti) mass fraction (μg/kg). ≤1, ≤5, ≤50 Thallium (Tl) mass fraction (μg/kg) ≤1 ≤5 ≤20 Zinc (Zn) mass fraction (μg/kg). ≤1, ≤5, ≤50 Particle size ≥0.2μm/(particles/mL) ≤20 ≤50 - Particle size ≥0.1μm/(particles/mL) ≤50 ≤100 - Other particle sizes (particles/mL) to be agreed upon by both the supplier and the buyer. Note. "-" indicates that no requirement is made. 5.Test Methods 5.1 General Provisions Unless otherwise specified, all reagents used in this document are analytical grade reagents, and the water used is EW-I as specified in GB/T 11446.1. Grade electronic-grade water. Unless otherwise specified, all standard titration solutions, impurity standard solutions, preparations, and products used in the experiment shall be in accordance with... Preparation should conform to the specifications in GB/T 601, GB/T 602, and GB/T 603.This includes the determination of metal ions, particle determination, solution preparation, and sample treatment. All treatments must be carried out in an ISO Class 6 cleanroom as specified in GB/T 25915.1. 5.2 Visual Inspection Inject the sample into a 50mL colorimetric tube up to the 50mL mark, and observe it against the light along the diameter of the colorimetric tube to see if it is a colorless and transparent liquid. 5.3 Determination of Phosphoric Acid Mass Fraction 5.3.1 Weight method (arbitration method) Perform according to the method specified in A.4.1 of GB 1886.15-2015. 5.3.2 Capacity Method 5.3.2.1 Principle Phosphoric acid content was determined by titrating it with sodium hydroxide standard titration solution using thymolphthalein as an indicator. 5.3.2.2 Reagents 5.3.2.2.1 Standard titration solution of sodium hydroxide. c(NaOH) = 0.5 mol/L. 5.3.2.2.2 Thyme phenolphthalein indicator solution. 1 g/L. 5.3.2.3 Analysis Steps Weigh approximately 1 g of the sample, accurate to 0.0002 g. Place it in a 250 mL Erlenmeyer flask, add 80 mL of water and 5 drops of thymolphthalein indicator. The solution is titrated with a standard sodium hydroxide solution until it turns light blue, which is the endpoint. ...