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YS/T 1124-2016: Testing method on pass through flux of magnetic sputtering target
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| Standard ID | Contents [version] | USD | STEP2 | [PDF] delivered in | Standard Title (Description) | Status | PDF |
| YS/T 1124-2016 | English | 149 |
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Testing method on pass through flux of magnetic sputtering target
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YS/T 1124-2016
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Basic data | Standard ID | YS/T 1124-2016 (YS/T1124-2016) | | Description (Translated English) | Testing method on pass through flux of magnetic sputtering target | | Sector / Industry | Nonferrous Metallurgy Industry Standard (Recommended) | | Classification of Chinese Standard | H21 | | Word Count Estimation | 5,543 | | Date of Issue | 2016-07-11 | | Date of Implementation | 2017-01-01 | | Regulation (derived from) | Notice of the Ministry of Industry and Information Technology (2016 No. 37) | | Issuing agency(ies) | Ministry of Industry and Information Technology | | Summary | This standard specifies the terms and definitions of magnetic permeability of magnetic targets for magnetron sputtering, testing equipment, inspection procedures and calculation of results. | YS/T 1124-2016: Testing method on pass through flux of magnetic sputtering target---This is a DRAFT version for illustration, not a final translation. Full copy of true-PDF in English version (including equations, symbols, images, flow-chart, tables, and figures etc.) will be manually/carefully translated upon your order.
Testing method on pass through flux of magnetic sputtering target
ICS 77.120.99
H21
People's Republic of China Nonferrous Metals Industry Standard
Measurement method of magnetic permeability of magnetic sputtering target
2016-07-11 released
2017-01-01 Implementation
Issued by the Ministry of Industry and Information Technology of the People's Republic of China
Foreword
This standard is drafted in accordance with the rules given in GB/T 1.1-2009.
This standard is proposed by the National Committee for Standardization of Nonferrous Metals (SAC/TC243).
The drafting of the standard units. the new research and development of new materials Co., Ltd., non-ferrous metals technology and economic research institute.
The main drafters of this standard. Luo Junfeng, Wan Xiaoyong, Xiang Lei, Ding Zhaoocong, Li Yongjun, He Jinjiang, Xu Guojin, Xia Qiankun, Liu Xiao, Wang Yue.
Measurement method of magnetic permeability of magnetic sputtering target
1 Scope
This standard specifies the terms and definitions of the permeability of magnetic targets for magnetron sputtering, the testing equipment, the inspection process and the calculation of the results.
This standard applies to the sputtering film with a variety of magnetic target permeability test.
2 terms and definitions
The following terms and definitions apply to this standard.
2.1
Permeability passthroughflux
PTF
DC magnetic field from the magnetic target side through the other side of the ratio, also known as magnetic permeability.
2.2
Source magnetic field
The magnetic field near the surface of the stage, measured by the Hall probe Gauss meter, is the DC magnetic field in units of Gs.
2.3
Reference field
The magnitude of the magnetic field at the top surface of the stage preset target depends on the distance of the Hall probe to the source magnet.
2.4
Measuring the magnetic field
The magnetic field at which the sputtering target is placed on the upper surface of the target after the stage.
3 detection equipment
The magnetic permeability testing equipment mainly comprises a source magnet, a stage, a Gauss meter and a Hall probe, etc. The device is placed on a non-ferromagnetic material or external
Strong magnetic field interference in the environment. Schematic diagram shown in Figure 1.
3.1 source magnet
The source magnet is a horseshoe shaped permanent magnet, fixed to the bottom of the stage and remains stable. The source magnet is polarized parallel to the stage of the stage. Adjustment
The position of the source magnet from the stage is such that the source magnetic field measured by the Hall probe Gauss meter is 825Gs ± 50Gs.
3.2 Gauss meter
The Gauss meter is the core device for PTF detection, with a horizontal field Hall probe. The Gauss meter DC magnetic field measurement range is 0 ~
3500Gs, accuracy of ± 2%. Hall probe in the source magnet positive pole position, as shown in Figure 1a). Hall probe is located above the sample,
Can only be moved up and down by the adjustment bracket and relatively fixed with the magnet at the horizontal position.
3.3 stage
The carrier platform as a target bearing platform exists in the permeability testing equipment, located between the source magnet and the Hall probe, the stage is equipped with
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