YS/T 1059-2015 English PDFUS$249.00 · In stock
Delivery: <= 3 days. True-PDF full-copy in English will be manually translated and delivered via email. YS/T 1059-2015: Determination of total carbon content in trichlorosilane for silicon eqitaxy - Gas chromatographic method
Basic dataStandard ID: YS/T 1059-2015 (YS/T1059-2015)Description (Translated English): Determination of total carbon content in trichlorosilane for silicon eqitaxy - Gas chromatographic method Sector / Industry: Nonferrous Metallurgy Industry Standard (Recommended) Classification of Chinese Standard: H17 Classification of International Standard: 77.040.30 Word Count Estimation: 7,775 Date of Issue: 2015-04-30 Date of Implementation: 2015-10-01 Regulation (derived from): Ministry of Industry and Information Technology Announcement (2015 No. 28) Issuing agency(ies): Ministry of Industry and Information Technology Summary: This Standard specifies the gas chromatographic method using trichlorosilane silicon epitaxial total carbon content. This Standard applies to the epitaxial silicon with trichlorosilane in the determination of total carbon content of 05% was measured in the range of 0.000% to 0.005%. YS/T 1059-2015: Determination of total carbon content in trichlorosilane for silicon eqitaxy - Gas chromatographic method---This is a DRAFT version for illustration, not a final translation. Full copy of true-PDF in English version (including equations, symbols, images, flow-chart, tables, and figures etc.) will be manually/carefully translated upon your order. (Epitaxial silicon with trichlorosilane total carbon by Gas Chromatography) ICS 77.040.30 H17 People's Republic of China Nonferrous Metals Industry Standard Determination of silicon epitaxy with trichlorosilane total carbon Gas chromatography Issued on. 2015-04-30 2015-10-01 implementation Ministry of Industry and Information Technology of the People's Republic of China released ForewordThis standard was drafted in accordance with GB/T 1.1-2009 given rules. This standard by the national non-ferrous metals Standardization Technical Committee (SAC/TC243) and focal points. This standard was drafted. Germanium Technology Co., Ltd. Kunming Metallurgical Institute New Materials Co., Limited Jiangsu Zhongneng Polysilicon Technology Development The company, New Energy Co., Ltd. special. The main drafters of this standard. Liu Yingjie, Zheng Huarong, Kezun Bin, Liu Xinjun, as Zhao, Xia Wang Tao, Zhang Jing, Zhang Yunhui, Yang Hongyan, Chen Xiqing, Yang Shuai. Determination of silicon epitaxy with trichlorosilane total carbon Gas chromatography1 ScopeThis standard specifies the gas chromatographic method using trichlorosilane silicon epitaxial total carbon content. This standard applies to the epitaxial silicon with trichlorosilane Determination of total carbon content was measured in the range of 0.00005% to 0.005%.2 Method summaryTrichlorosilane sample into the gas chromatograph in an inert gas, wherein the carbonaceous component in high temperature, hydrogen-rich reduction furnace to fully transfer Into methane and methane content is detected with a flame ionization detector, trichlorosilane calculated the total carbon content. Conversion reactions are as follows. HxSiCyClz 1/2 (z 4y-x) H2 850 ℃ → Si zHCl yCH43 Reagents and materials3.1 hydrogen volume fraction ≥99.999%. 3.2 an inert gas, the volume fraction ≥99.999%. 3.3 compressed air, drying by charcoal. 3.4 acetone, AR. 3.5 standard methane gas, hydrogen gas was added.4 Equipment4.1 Gas chromatograph. equipped with a flame ionization detector (FID), hydrogen reduction furnace, and the corresponding chromatography workstation. 4.2 Columns. carbon molecular sieve column or other equivalent column, size φ3mm × 50cm. 4.3 hydrogen reduction furnace. the furnace is equipped with a long 40cm, inner diameter of about 3mm built quartz sand quartz tube. 4.4 micro syringe. 10μL.5 disturbances5.1 Samples should be placed in the refrigerator freezer to save, prevent sample evaporation loss. 5.2 Indoor humidity should be controlled below 40%, to prevent the influence of humidity on the sample. 5.3 Inert gas operated air box must be replaced with a clean high-purity gases, otherwise the sample hydrolysis, affect the test results. 5.4 Samples should avoid contact with organic materials, instruments sampling system to avoid the introduction of organic matter; otherwise it will cause high test results. Step 6 Analysis Warning. Pipette trichlorosilane sample to prevent sample leakage. It recommends transferring samples under an inert gas, and wear protective equipment. ......Tips & Frequently Asked Questions:Question 1: How long will the true-PDF of YS/T 1059-2015_English be delivered?Answer: Upon your order, we will start to translate YS/T 1059-2015_English as soon as possible, and keep you informed of the progress. The lead time is typically 1 ~ 3 working days. The lengthier the document the longer the lead time.Question 2: Can I share the purchased PDF of YS/T 1059-2015_English with my colleagues?Answer: Yes. The purchased PDF of YS/T 1059-2015_English will be deemed to be sold to your employer/organization who actually pays for it, including your colleagues and your employer's intranet.Question 3: Does the price include tax/VAT?Answer: Yes. 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