SJ/T 31079-1994 English PDF

US$139.00 · In stock
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SJ/T 31079-1994: Requirements of readiness and methods of inspection and assessment for negative/positive resist developers and spin coaters

Standard ID	USD	BUY PDF	Lead-Days	Standard Title (Description)	Status
SJ/T 31079-1994	139	Add to Cart	2 days	Requirements of readiness and methods of inspection and assessment for negative/positive resist developers and spin coaters

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Basic data

Standard ID: SJ/T 31079-1994 (SJ/T31079-1994)
Description (Translated English): Requirements of readiness and methods of inspection and assessment for negative/positive resist developers and spin coaters
Sector / Industry: Electronics Industry Standard (Recommended)
Classification of Chinese Standard: L97
Word Count Estimation: 3,384
Date of Issue: 4/15/1994
Date of Implementation: 6/1/1994
Summary: This standard specifies the developing machine is plastic, rubber intact require negative developing machine, spin coater and wipes machine and inspection, evaluation methods. This standard applies to semiconductor integrated circuits, transistors production, silicon rubber positive development of positive photoresist developing machine, glue developing negative negative stocks developing machine, wafer coating automatic and automatic wipe spin coater machine.

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