SJ/T 11490-2015 English PDF

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SJ/T 11490-2015: Test method for measuring etch pit density (EPD) in low dislocation density gallium arsenide wafers
Status: Valid

Standard ID	USD	BUY PDF	Lead-Days	Standard Title (Description)	Status
SJ/T 11490-2015	189	Add to Cart	3 days	Test method for measuring etch pit density (EPD) in low dislocation density gallium arsenide wafers	Valid

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GB/T 12963   SJ/T 11488   SJ/T 11489   SJ/T 11487   

Basic data

Standard ID: SJ/T 11490-2015 (SJ/T11490-2015)
Description (Translated English): Test method for measuring etch pit density (EPD) in low dislocation density gallium arsenide wafers
Sector / Industry: Electronics Industry Standard (Recommended)
Classification of Chinese Standard: H83
Classification of International Standard: 29.045
Word Count Estimation: 8,896
Date of Issue: 2015-04-30
Date of Implementation: 2015-10-01
Quoted Standard: GB/T 8760-2006
Regulation (derived from): Ministry of Industry and Information Technology Announcement (2015 No. 28)
Issuing agency(ies): Ministry of Industry and Information Technology
Summary: This Standard specifies the low dislocation density gallium arsenide (GaAs) polished etch pit density (EPD) measurement method. This Standard applies to a diameter of 2 inches and 3 inches and EPD measuring less than 5000/cm2 circular GaAs wafer.

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