SJ/T 10312-1992 English PDF

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SJ/T 10312-1992: General specification of electron beam exposure system

Standard ID	USD	BUY PDF	Lead-Days	Standard Title (Description)	Status
SJ/T 10312-1992	459	Add to Cart	3 days	General specification of electron beam exposure system

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Basic data

Standard ID: SJ/T 10312-1992 (SJ/T10312-1992)
Description (Translated English): General specification of electron beam exposure system
Sector / Industry: Electronics Industry Standard (Recommended)
Classification of Chinese Standard: N38;L99
Word Count Estimation: 13,143
Date of Issue: 6/15/1992
Date of Implementation: 12/1/1992
Quoted Standard: SJ/Z 1793; SJ 1276; JB 8; GBN 193; GB 191; GB 6388
Summary: This standard specifies the electron beam lithography machine (hereinafter referred to as the exposure machine) terminology, technical requirements, test methods, inspection rules. This standard applies to a fine pattern of integrated circuits, microwave devices, optoelectronic devices, SAW devices such as the production of electron-beam lithography.

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