JJG 508-2004 English PDFUS$519.00 · In stock
Delivery: <= 4 days. True-PDF full-copy in English will be manually translated and delivered via email. JJG 508-2004: Verification Regulation of Resistivity Measuring Instruments with Four-Probe Array Method Status: Valid JJG 508: Historical versions
Basic dataStandard ID: JJG 508-2004 (JJG508-2004)Description (Translated English): Verification Regulation of Resistivity Measuring Instruments with Four-Probe Array Method Sector / Industry: Metrology & Measurement Industry Standard Classification of Chinese Standard: A56 Classification of International Standard: 17.220 Word Count Estimation: 20,295 Date of Issue: 2004-09-21 Date of Implementation: 2005-03-01 Older Standard (superseded by this standard): JJG 508-1987 Quoted Standard: 2004 technical regulations issued by national metrology (industrial measurement 2005 Volume 15, Issue 1) Regulation (derived from): 2004 technical regulations issued by national metrology (industrial measurement 2005 Volume 15, Issue 1) Issuing agency(ies): State Administration of Quality Supervision, Inspection and Quarantine Summary: This standard applies to the touch, measuring range 10 ^ (-3) ��/cm ~ 10 ^ 3��/cm the four-probe resistivity tester initial verification, testing and use of follow-up inspection. Some versatile four-probe resistivity tester or can only measure the sheet resistance of the four-probe tester also applicable. Sheet resistance measurement range of 10 ^ (-2) ��/cm ~ 10 ^ 4��/cm. This procedure does not apply to two probes, three probes, six probes and a square four-probe resistivity tester checks. JJG 508-2004: Verification Regulation of Resistivity Measuring Instruments with Four-Probe Array Method---This is a DRAFT version for illustration, not a final translation. Full copy of true-PDF in English version (including equations, symbols, images, flow-chart, tables, and figures etc.) will be manually/carefully translated upon your order. Verification Regulation of Resistivity Measuring Instruments with Four-Probe Array Method National Metrology Verification Regulations of the People's Republic Four probe resistivity tester Released on.2004-09-21 2005-03-21 implementation The General Administration of Quality Supervision, Inspection and Quarantine issued Four-probe resistivity tester verification procedure Four-ProbeArray Method Replace JJG 508-1987 This regulation was approved by the General Administration of Quality Supervision, Inspection and Quarantine on September 21,.2004, and It will take effect on March 21,.2005. Focal Point. National Radio Measurement Technology Committee Main drafting unit. China Institute of Metrology Participated in the drafting unit. Guangzhou Institute of Semiconductor Materials This procedure entrusts the National Radiometric Technical Committee to explain The main drafters of this procedure. Lu Xiaoming (China Institute of Metrology) Participate in the drafters. Xie Hongbo (Guangzhou Institute of Semiconductor Materials) table of Contents1 Scope (1) 2 Overview (1) 3 Metrological performance requirements (1) 3.1 Requirements for the technical index of the resistivity tester (1) 3.2 Measurement of insulation resistance and test of insulation strength (2) 4 General technical requirements (3) 4.1 Appearance of Resistivity Tester (3) 4.2 Check of the normality of the resistivity tester (3) 5 measuring instrument control (3) 5.1 Verification conditions (3) 5.2 Verification project (5) 5.3 Verification method (5) 5.4 Processing of verification results (8) 5.5 Verification cycle (8) Appendix A Probe Indentation Verification Record and Calculation Method (9) Appendix B Verification of the recording format of the resistivity tester using the resistivity standard sample method (10) Appendix C Checking the Correction Coefficient Table of Resistivity Tester with Standard Samples (11) Appendix D Sub-component verification Four-probe resistivity tester verification results processing (12) Appendix E Four-Probe Resistivity Tester Verification Certificate and Verification Result Notice Page Format (14) Four-probe resistivity tester verification procedure1 ScopeThis procedure is applicable to four-probe resistivity testers with a contact range of 10-3 Ω·cm to 103 Ω·cm. First verification, subsequent verification and in-use inspection. For some versatile four-probe resistivity testers or only for measurement Block resistance four probe testers are also suitable. The sheet resistance is measured from 10-2 Ω/□ to 104 Ω/□. This procedure does not apply to the verification of two-probe, three-probe, six-probe and square four-probe resistivity testers.2 OverviewThe four-probe resistivity tester (hereinafter referred to as the resistivity tester) is used to measure semiconductor materials and process silicon. The resistivity of the sheet, or the diffusion layer and the epitaxial layer, and the measuring instrument for the sheet resistance of the insulating substrate coating layer. It is mainly The electrical part and the probe are composed of parts. The automatic tester also includes a computer and an interface, etc., and the electrical part is generally Including adjustable steady current source, A/D converter, digital display, reversing switch and other instruments and components. Probe part general package The probe fixture, the probe and the sample stage are shown in Fig. 1 and Fig. 2. Figure 1 Schematic diagram of the standard sample test resistivity tester K1-commutation switch; RN-standard resistance; D-probe wiring; K2-no thermoelectric potential switch; RX-tested standard sample Figure 2 Block diagram of the standard sample test resistivity tester3 Metrological performance requirements3.1 Requirements for technical indicators of resistivity tester 3.1.1 The technical specifications of various types of resistivity testers shall comply with the requirements of the factory technical specifications. Level I, The technical specifications of the Class II resistivity tester shall comply with the ministerial standards of SJ/T 10314-92 and SJ/T 10315-92. ......Tips & Frequently Asked Questions:Question 1: How long will the true-PDF of JJG 508-2004_English be delivered?Answer: Upon your order, we will start to translate JJG 508-2004_English as soon as possible, and keep you informed of the progress. The lead time is typically 2 ~ 4 working days. The lengthier the document the longer the lead time.Question 2: Can I share the purchased PDF of JJG 508-2004_English with my colleagues?Answer: Yes. The purchased PDF of JJG 508-2004_English will be deemed to be sold to your employer/organization who actually pays for it, including your colleagues and your employer's intranet.Question 3: Does the price include tax/VAT?Answer: Yes. 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Complying with the latest version means that, by default, it also complies with all the earlier versions, technically. |