JJF 1739-2019 English PDF

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JJF 1739-2019: Calibration Specification for Digital Laser Spherical Interferometers
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Basic data

Standard ID: JJF 1739-2019 (JJF1739-2019)
Description (Translated English): Calibration Specification for Digital Laser Spherical Interferometers
Sector / Industry: Metrology & Measurement Industry Standard
Classification of Chinese Standard: A52
Classification of International Standard: 17.040
Word Count Estimation: 20,281
Date of Issue: 2019
Date of Implementation: 2019-12-27
Issuing agency(ies): State Administration for Market Regulation

JJF 1739-2019: Calibration Specification for Digital Laser Spherical Interferometers

---This is a DRAFT version for illustration, not a final translation. Full copy of true-PDF in English version (including equations, symbols, images, flow-chart, tables, and figures etc.) will be manually/carefully translated upon your order.
(Calibration Specification of Digital Laser Spherical Interferometer) National Measurement Technical Specification of the People's Republic of China Calibration Specification of Digital Laser Spherical Interferometer 2019-09-27 release 2019-12-27 Implementation Issued by the State Administration of Market Supervision and Administration Calibration Specification of Digital Laser Spherical Interferometer Centralized unit. National Technical Committee for Geometric Engineering Parameter Measurement Main drafting unit. Institute of Optoelectronic Technology, Chinese Academy of Sciences China Testing Technology Research Institute Participated in the drafting unit. China Academy of Metrology Suzhou Huili Instrument Co., Ltd. This specification entrusts the National Geometric Engineering Parameter Measurement Technical Committee to interpret The main drafters of this specification. Hou Xi (Institute of Optoelectronic Technology, Chinese Academy of Sciences) Quan Haiyang (Institute of Optoelectronic Technology, Chinese Academy of Sciences) Ran Qing (China Institute of Testing Technology) Song Weihong (Institute of Optoelectronic Technology, Chinese Academy of Sciences) Participating drafters. Kang Yanhui (Chinese Academy of Metrology) Han Sen (Suzhou Huili Instrument Co., Ltd.)

table of Contents

Introduction (Ⅱ) 1 Scope (1) 2 References (1) 3 Terms and definitions (1) 3.1 Surface deviation (1) 3.2 Peak-valley value (1) 3.3 PVr value (1) 3.4 F number of spherical elements (1) 4 Overview (1) 5 Metrological characteristics (2) 5.1 Indication error (2) 5.2 Measurement repeatability (2) 6 Calibration conditions (2) 6.1 Environmental conditions (2) 6.2 Calibration standard (2) 7 Calibration items and calibration methods (3) 7.1 Indication error (3) 7.2 Measurement repeatability (5) 8 Expression of calibration results (5) 9 Recalibration time interval (5) Appendix A PVr Value (6) Appendix B Derivation of the three-position method formula (7) Appendix C Example of Evaluation of Calibration Uncertainty of Digital Laser Spherical Interferometer Direct Comparison Method (9) Appendix D Example of Uncertainty Evaluation of Three-position Calibration of Digital Laser Spherical Interferometer (11) Appendix E Calibration Certificate Information and Internal Page Format (15)

Introduction

The preparation of this specification is based on JJF 1071-2010 "Rules for Compiling National Measurement and Calibration Specifications" "General Measurement Terms and Definitions" and JJF 1059.1-2012 "Measurement Uncertainty Evaluation and Expression" as the basis and in accordance with. This specification is the first release. Calibration Specification of Digital Laser Spherical Interferometer

1 Scope

This specification applies to the calibration of digital laser spherical interferometers.

2 Reference documents

This specification refers to the following documents. JJF 1100-2016 Calibration Specification for Plane Constant Thickness Interferometer GB/T 2831-2009 Surface deviation of optical parts ISO 14999-4..2015 Interferometry of optical and photonic optics and optical systems. Part 4. Description and evaluation of tolerances specified in ISO 10110 (Optics and photonics-Interferometricmeasurement ofopticalelementsandopticalsystems-Part 4. Interpretationandevaluationoftoler- ancesspecifiedinISO 10110) For dated reference documents, only the dated version applies to this specification; for those without date references The latest version (including all amendments) is applicable to this specification.

3 Terms and definitions

The terms and definitions defined in GB/T 2831-2009 and ISO 14999-4..2015 and the following apply to this specification. 3.1 Surface form deviation The deviation of the measured optical surface relative to the reference optical surface. 3.2 Peak-to-valey (PV) value The maximum value of surface deviation minus the minimum value, referred to as PV value. 3.3 PVr value robustpeak-to-valey (PVr) value 36-term Zernike polynomial fitting of surface shape deviation plus surface PV value plus 3 times fitting residuals (surface shape deviation minus 36 items Zernike polynomial fitting surface) root mean square value. Note. The definition of Zernike polynomials is defined according to the ISO 14999-4..2015 Appendix B standard. 3.4 F number of spherical optics The ratio of the radius of curvature of the spherical surface to the clear aperture. Note. The F number of the spherical element under test should be less than or equal to the F number of the spherical lens of the digital laser spherical interferometer in order to achieve digital Full-caliber calibration of laser spherical interferometer. It is recommended to choose the spherical mirror with the closest F number (slightly smaller) to be calibrated digital laser spherical interferometer The F-number of the measured spherical element, and the length of the optical cavity should be as short as possible to improve the measurement repeatability.

4 Overview

The digital laser spherical interferometer is mainly used for the measurement of the surface deviation of spherical optical elements. The digital laser spherical interferometer generates reference light and test light through its spherical lens, and the test light is incident on the ball under test The surface of the surface element is reflected back, and the light wave carrying the deviation of the surface shape of the measured spherical element forms an interference strip with the reference light ......

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