JJF 1613-2017 English PDF

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JJF 1613-2017: Calibration Specification for Thin Film Thickness Measurement Instruments by Grazing Incidence X-Ray Reflectivity
Status: Valid

Standard ID	USD	BUY PDF	Lead-Days	Standard Title (Description)	Status
JJF 1613-2017	349	Add to Cart	3 days	Calibration Specification for Thin Film Thickness Measurement Instruments by Grazing Incidence X-Ray Reflectivity	Valid

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Basic data

Standard ID: JJF 1613-2017 (JJF1613-2017)
Description (Translated English): Calibration Specification for Thin Film Thickness Measurement Instruments by Grazing Incidence X-Ray Reflectivity
Sector / Industry: Metrology & Measurement Industry Standard
Classification of Chinese Standard: A58
Classification of International Standard: 17.240
Word Count Estimation: 15,111
Date of Issue: 2017-02-28
Date of Implementation: 2017-05-28
Quoted Standard: JJG 629-2014; JJF 1071
Adopted Standard: ISO 18613-2013, NEQ
Regulation (derived from): General Administration of Quality Supervision, Inspection and Quarantine No. 23 of 2017
Issuing agency(ies): General Administration of Quality Supervision, Inspection and Quarantine
Summary: This standard is applicable to the calibration of grazing incidence X-ray reflectance film measuring instrument (hereinafter referred to as instrument).

JJF 1613-2017: Calibration Specification for Thin Film Thickness Measurement Instruments by Grazing Incidence X-Ray Reflectivity

---This is a DRAFT version for illustration, not a final translation. Full copy of true-PDF in English version (including equations, symbols, images, flow-chart, tables, and figures etc.) will be manually/carefully translated upon your order.
Calibration Specification for Thin Film Thickness Measurement Instruments by Grazing Incidence X-Ray Reflectivity National Metrological Technical Code of the People's Republic of China Grazing incidence X - ray reflectance film thickness measuring instrument Calibration specification 2017-02-28 released 2017-05-28 Implementation State Administration of Quality Supervision, Inspection and Quarantine issued Grazing incidence X - ray reflectance film thickness measuring instrument Calibration specification Coordinate Unit. National New Materials and Nanometer Metrology Technical Committee The main drafting unit. China Institute of Metrology Participated in the drafting unit. Changzhou Institute of Metrology and Testing Technology This specification entrusts the National New Materials and Nanometer Metrology Technical Committee to explain The main drafters of this specification. Ren Lingling (China Institute of Metrology) Gao Huifang (China Institute of Metrology) Participate in the drafters. Zhou Zhifeng (Changzhou Institute of Metrology and Testing Technology)

table of Contents

Introduction (Ⅲ) 1 Scope (1) 2 References (1) 3 Overview (1) 4 Metering characteristics (1) 4.1 Instrument 2θ angle indication error and repeatability (1) 4.2 Thickness measurement error (1) 4.3 Film thickness measurement repeatability (1) 5 Calibration conditions (1) 5.1 Environmental conditions (1) 5.2 Measurement standards and other equipment (2) 6 Calibration items and calibration methods (2) 6.1 Calibration items (2) 6.2 Calibration method (2) 7 Calibration results (3) 8 re-school time interval (3) Appendix A Example of Uncertainty Evaluation of Indication Error of Instrument Thickness Measurement (4) Appendix B Calibration Record Format (7) Appendix C Calibration Certificate (End Page) Format (9)

Introduction

JJF 1071 "National Metrological Calibration Rules Writing Rules", JJF 1001 "General Metrology Terms and Definitions" JJF 1059.1 "Measurement Uncertainty Evaluation and Representation" and JJF 1094 "Evaluation of measuring instruments" Support the normative work to develop the basic series of norms. This specification refers to ISO 16413..2013 "X-ray reflectance assessment of film thickness, density and interface width Instrument requirements, collimation and positioning, data collection, data analysis and reporting "(Evaluation ofthickness, densityandinterfacewidthofthinfilmsbyX-rayreflectometry-instrumentalrequirements, alignmentandpositioning, datacolection, dataanalysisandreporting). This specification is the first release. Calibration standard for gravitational incidence X - ray reflectance film measuring instrument

1 Scope

This specification applies to the calibration of grazing incidence X-ray reflectance film measuring instruments (hereinafter referred to as instruments).

2 reference file

This specification refers to the following documents. JJG629-2014 Polycrystalline X - ray Diffractometer Verification Regulation JJF 1071 national measurement calibration rules For dated references, only the dated edition applies to this specification; references that are not dated , The latest version (including all modifications) applies to this specification.

3 Overview

The instrument is usually composed of collimated incident X-ray light source, sample table, detection system and other components (see Figure 1). its The working principle is. when the X-ray incident at a very small angle to the surface of the sample will occur when the interface reflection, The intensity of the film will change, the relationship between the reflection intensity and the reflection angle is obtained, and the film thickness can be obtained by data processing. Figure 1 Schematic diagram of the instrument

4 measurement characteristics

4.1 instrument 2θ angle indication error and repeatability Instrument 2θ angle indication error should be within ± 0.02 °; repeatability in standard deviation, should not exceed 0.002 °. 4.2 Thickness measurement error The relative error of the measured value of the instrument should not exceed ± 6%. 4.3 film thickness measurement repeatability The instrument thickness measurement repeatability should not exceed 1%. Note. Because the calibration work only gives the measurement results, do not determine the pass or not, the measurement characteristics are for reference only.

5 calibration conditions

5.1 Environmental conditions 5.1.1 Indoor temperature (20 ± 5) ℃, humidity ≤ 65% RH. ......

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