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GB/T 37959-2019 English PDF

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US$359.00 · In stock
Delivery: <= 4 days. True-PDF full-copy in English will be manually translated and delivered via email.
GB/T 37959-2019: Information model for containing process chamber IC equipment design
Status: Valid

Standard ID	USD	BUY PDF	Lead-Days	Standard Title (Description)	Status
GB/T 37959-2019	359	Add to Cart	4 days	Information model for containing process chamber IC equipment design	Valid

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Basic data

Standard ID: GB/T 37959-2019 (GB/T37959-2019)
Description (Translated English): Information model for containing process chamber IC equipment design
Sector / Industry: National Standard (Recommended)
Classification of Chinese Standard: J07
Classification of International Standard: 35.240.50
Word Count Estimation: 18,137
Date of Issue: 2019-08-30
Date of Implementation: 2020-03-01
Issuing agency(ies): State Administration for Market Regulation, China National Standardization Administration

GB/T 37959-2019: Information model for containing process chamber IC equipment design

---This is a DRAFT version for illustration, not a final translation. Full copy of true-PDF in English version (including equations, symbols, images, flow-chart, tables, and figures etc.) will be manually/carefully translated upon your order.
Information model for containing process chamber IC equipment design ICS 35.240.50 J07 National Standards of People's Republic of China Process chamber type integrated circuit equipment Design information model Published on.2019-08-30 2020-03-01 implementation State market supervision and administration China National Standardization Administration issued

Content

Foreword I 1 Scope 1 2 Terms and Definitions 1 3 Abbreviations 2 4 Model System 2 4.1 General Provisions for Modeling and Simulation Design Process of Integrated Circuit Equipment with Process Chambers 2 4.2 Structural System Design System for Modeling and Simulation Design of Integrated Circuit Equipment with Process Chambers 3 5 Modeling simulation design information model with process chamber type integrated circuit equipment 4 5.1 Concept Model 4 5.2 Element 4 5.3 Relationship 5 5.4 Information Model Element 5 Appendix A (informative) Example 13 of design information model for process chamber type integrated circuit equipment

Foreword

This standard was drafted in accordance with the rules given in GB/T 1.1-2009. Please note that some of the contents of this document may involve patents. The issuing organization of this document is not responsible for identifying these patents. This standard was proposed by the China Machinery Industry Federation. This standard is under the jurisdiction of the National Automation System and Integration Standardization Technical Committee (SAC/TC159). This standard was drafted. CRRC Information Technology Co., Ltd., Tsinghua University, Beijing Machinery Industry Automation Research Institute Co., Ltd., China Stone Oil Planning General Hospital. The main drafters of this standard. Gu Ming, Cheng Jia, Li Li, Ji Linhong, Chen Li, Cao Zili, Zhang Ying, Li Xiaodong, Wang Haidan, Wang Feng. Process chamber type integrated circuit equipment Design information model

1 Scope

This standard specifies the information model of the modeling and simulation design software platform for process-type integrated circuit equipment, which stipulates the construction of process chambers. General requirements for modeling and simulation design software platforms for room type integrated circuits. This standard applies to modeling and simulation design software including process chamber type integrated circuit equipment.

2 Terms and definitions

The following terms and definitions apply to this document. 2.1 Modeling A geometric model for simulation is built for the object being designed using CAD software. 2.2 Simulation simulation Using computer virtual models to reproduce the essential processes occurring in the actual system, and to study the existence of experiments on the system virtual model Or the system in design. 2.3 Simulation process template simulationprocesstemplate An XML file that describes the customized simulation process information, which preserves the complete logical relationship of a simulation process. Note. Contains software modules, solves the logical sequence, and variable information for upstream and downstream transfers. 2.4 Parameter Adjustable key settings that have a significant impact on the results during the simulation design process. 2.5 Experimental designofoferiture A planned study that performs a series of intentional changes to process elements, performs observations of the effects, and performs statistical analysis of the results. In order to determine the relationship between effects and changes in factors, to better understand and control this process. 2.6 Optimization design optimaldesign Based on the optimization theory in mathematics, using computer as a means, based on the performance goals pursued by the design, the objective function is established. The process of seeking an optimal design solution under various constraints. 2.7 Eigenvalues Some representative values that are statistically reflected by the simulation results that reflect the design performance. Examples. minimum, maximum, average, deviation, and so on. ......

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Tips & Frequently Asked Questions:

Question 1: How long will the true-PDF of GB/T 37959-2019_English be delivered?

Answer: Upon your order, we will start to translate GB/T 37959-2019_English as soon as possible, and keep you informed of the progress. The lead time is typically 2 ~ 4 working days. The lengthier the document the longer the lead time.

Question 2: Can I share the purchased PDF of GB/T 37959-2019_English with my colleagues?

Answer: Yes. The purchased PDF of GB/T 37959-2019_English will be deemed to be sold to your employer/organization who actually pays for it, including your colleagues and your employer's intranet.

Question 3: Does the price include tax/VAT?

Answer: Yes. Our tax invoice, downloaded/delivered in 9 seconds, includes all tax/VAT and complies with 100+ countries' tax regulations (tax exempted in 100+ countries) -- See Avoidance of Double Taxation Agreements (DTAs): List of DTAs signed between Singapore and 100+ countries

Question 4: Do you accept my currency other than USD?

Answer: Yes. If you need your currency to be printed on the invoice, please write an email to Sales@ChineseStandard.net. In 2 working-hours, we will create a special link for you to pay in any currencies. Otherwise, follow the normal steps: Add to Cart -- Checkout -- Select your currency to pay.