GB/T 37466-2019 English PDF

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GB/T 37466-2019: Laser lift-off equipment used for GaN
Status: Valid

Standard ID	USD	BUY PDF	Lead-Days	Standard Title (Description)	Status
GB/T 37466-2019	359	Add to Cart	4 days	Laser lift-off equipment used for GaN	Valid

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Basic data

Standard ID: GB/T 37466-2019 (GB/T37466-2019)
Description (Translated English): Laser lift-off equipment used for GaN
Sector / Industry: National Standard (Recommended)
Classification of Chinese Standard: L95
Classification of International Standard: 31.550
Word Count Estimation: 18,152
Date of Issue: 2019-06-04
Date of Implementation: 2019-10-01
Issuing agency(ies): State Administration for Market Regulation, China National Standardization Administration

GB/T 37466-2019: Laser lift-off equipment used for GaN

---This is a DRAFT version for illustration, not a final translation. Full copy of true-PDF in English version (including equations, symbols, images, flow-chart, tables, and figures etc.) will be manually/carefully translated upon your order.
Laser lift-off equipment used for GaN ICS 31-550 L95 National Standards of People's Republic of China GaN laser stripping equipment Published on.2019-06-04 2019-10-01 implementation State market supervision and administration China National Standardization Administration issued

Content

Foreword III 1 Scope 1 2 Normative references 1 3 Terms and Definitions 1 4 Product Classification and Marking 2 4.1 Classification 2 4.2 Model Mark 3 5 working conditions 4 5.1 Power supply 4 5.2 Ambient temperature 4 5.3 Relative humidity 4 5.4 Atmospheric pressure 4 5.5 Clean room level 4 5.6 Electromagnetic interference 4 5.7 Ground vibration requirements 4 6 Requirements 4 6.1 Appearance 4 6.2 Laser requirements 4 6.3 Scan Station 5 6.4 Machine Performance 5 6.5 Electrical requirements 5 6.6 Control device 5 6.7 Software Requirements 6 6.8 Electromagnetic compatibility 6 6.9 Noise 6 6.10 Mean Time Between Failures 6 6.11 Security Requirements 6 7 Detection method 7 7.1 Visual inspection 7 7.2 Laser inspection 7 7.3 Scanning Station Inspection 8 7.4 Machine performance test 9 7.5 Electrical inspection 9 7.6 Control device inspection 10 7.7 Software Detection 10 7.8 Electromagnetic compatibility test 10 7.9 Noise Test 10 7.10 Mean Time Between Failures Verification 10 7.11 Safety Requirements Check 10 8 Inspection rules 11 8.1 Inspection classification 11 8.2 Identification test 11 8.3 Factory inspection 11 8.4 Decision Rule 11 9 Marking, packaging, transport and storage 12 9.1 Mark 12 9.2 Packing 12 9.3 Transportation 13 9.4 Storage 13

Foreword

This standard was drafted in accordance with the rules given in GB/T 1.1-2009. Please note that some of the contents of this document may involve patents. The issuing organization of this document is not responsible for identifying these patents. This standard is proposed and managed by the National Semiconductor Equipment and Materials Standardization Technical Committee (SAC/TC203). This standard was drafted. Dongguan Zhongjiao Semiconductor Technology Co., Ltd., China Electronics Technology Standardization Institute. The main drafters of this standard. Sun Yongjian, Liu Peng, Ding Xiaomin, Feng Yabin, Wang Qing. GaN laser stripping equipment

1 Scope

This standard specifies the product classification and marking, working conditions, and requirements for GaN laser stripping equipment (hereinafter referred to as "laser stripping equipment"). Requirements, test methods, inspection rules, marking, packaging, transportation and storage. This standard applies to equipment for stripping gallium nitride (GaN)-based epitaxial layers grown by sapphire substrates by laser method, aluminum nitride Laser stripping equipment can refer to this standard.

2 Normative references

The following documents are indispensable for the application of this document. For dated references, only dated versions apply to this article. Pieces. For undated references, the latest edition (including all amendments) applies to this document. GB/T 191 packaging storage and transportation icon GB 2893-2008 security color GB 2894-2008 Safety signs and guidelines for their use GB/T 3768-2017 Acoustic sound pressure method for the determination of noise source sound power level and sound energy level using the envelope measurement surface above the reflective surface Simple method GB/T 4208-2017 enclosure protection grade (IP code) GB 4824-2013 Industrial, scientific and medical (ISM) radio frequency equipment disturbance characteristics limits and methods of measurement GB/T 4942.1-2006 Degree of protection (IP code) for the overall structure of rotating electrical machines - Grading GB/T 5080.7-1986 Equipment reliability test Verification test for failure rate and mean time between failures under the assumption of constant failure rate Inspection plan GB/T 5171.1-2014 Low-power motors - Part 1. General technical conditions GB 5226.1-2008 Mechanical electrical safety machinery and electrical equipment - Part 1. General technical conditions GB/T 6388 transport packaging receipt and delivery mark GB 7247.1-2012 Safety of laser products - Part 1. Equipment classification, requirements GB/T 7251.1-2013 Low-voltage switchgear and control equipment - Part 1. General GB/T 9969 General guidelines for the use of industrial products GB/T 14436 General Rules for Industrial Product Assurance Documents GB/T 15706-2012 Mechanical Safety Design General Risk Assessment and Risk Reduction GB/T 18268.1-2010 Electromagnetic compatibility requirements for electrical equipment - Part 1 . General requirements GB/T 18490.1-2017 Mechanical safety laser processing machines - Part 1. General safety requirements GB 50073-2013 clean factory design specification GB/T 50087-2013 Industrial Enterprise Noise Control Design Specification SJ/T 37-1996 Modeling and naming methods for special equipment for the electronics industry

3 Terms and definitions

The following terms and definitions as defined in GB/T 15706-2012 and GB 7247.1-2012 apply to this document. ......

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