GB/T 34898-2017 English PDF

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GB/T 34898-2017: Micro electromechanical system technology -- Test method for the nonlinear vibration of the MEMS resonant sensitive element
Status: Valid

Standard ID	USD	BUY PDF	Lead-Days	Standard Title (Description)	Status
GB/T 34898-2017	259	Add to Cart	3 days	Micro electromechanical system technology -- Test method for the nonlinear vibration of the MEMS resonant sensitive element	Valid

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Basic data

Standard ID: GB/T 34898-2017 (GB/T34898-2017)
Description (Translated English): Micro electromechanical system technology -- Test method for the nonlinear vibration of the MEMS resonant sensitive element
Sector / Industry: National Standard (Recommended)
Classification of Chinese Standard: L55
Classification of International Standard: 31.200
Word Count Estimation: 13,171
Date of Issue: 2017-11-01
Date of Implementation: 2018-05-01
Regulation (derived from): National Standard Announcement 2017 No. 29
Issuing agency(ies): General Administration of Quality Supervision, Inspection and Quarantine of the People's Republic of China, Standardization Administration of the People's Republic of China

GB/T 34898-2017: Micro electromechanical system technology -- Test method for the nonlinear vibration of the MEMS resonant sensitive element

---This is a DRAFT version for illustration, not a final translation. Full copy of true-PDF in English version (including equations, symbols, images, flow-chart, tables, and figures etc.) will be manually/carefully translated upon your order.
Micro electromechanical system technology-Test method for thenonlinear vibration of the MEMS resonant sensitive element ICS 31.200 L55 National Standards of People's Republic of China Microelectromechanical system (MEMS) technology MEMS Resonance Sensitive Element Nonlinearity Vibration test method Posted.2017-11-01 2018-05-01 implementation General Administration of Quality Supervision, Inspection and Quarantine of People's Republic of China China National Standardization Administration released Directory Preface Ⅰ 1 Scope 1 2 Normative references 1 3 Terms and definitions 1 4 Sensitive element nonlinear vibration test parameters 1 5 test methods and their selection principle 2 5.1 optical test method 2 5.2 Electrical test method 2 6 Sensitive element nonlinear vibration frequency response and phase frequency response test method 2 6.1 optical test method 2 6.2 Electrical test methods 3 7 Sensitive element nonlinear vibration frequency response bending coefficient test method 4 8 Sensitive element nonlinear jump amplitude threshold test method 5 Nonlinear vibration caused by sensitive components frequency offset test method 5 9.1 Self-excited closed-loop system, closed-loop closed-loop system and lock-loop closed-loop system frequency offset 5 9.2 Intermittent Excitation Frequency Offset of Closed-Loop System 5 Appendix A (Normative) Sensitive element nonlinear vibration mathematical model and bending coefficient 6 Appendix B (Normative) Sensitive element frequency response nonlinear jump 9 Appendix C (Normative Annex) Frequency Offset of Sensing Elements Caused by Nonlinear Vibration 10

Foreword

This standard was drafted in accordance with the rules given in GB/T 1.1-2009. This standard by the National Microelectromechanical Technology Standardization Technical Committee (SAC/TC336) and focal point. This standard was drafted by Beijing Telemetry Institute, China Machine Productivity Promotion Center. The main drafters of this standard. Li Qingfeng, Jin Xiaofeng, Li Haibin, Zhu Yue, Cheng Hongbing. Microelectromechanical system (MEMS) technology MEMS Resonance Sensitive Element Nonlinearity Vibration test method

1 Scope

This standard specifies the resonant resonator MEMS resonant sensor (hereinafter referred to as the sensor) nonlinear vibration characteristics of the parameters Test Methods. This standard applies to sensitive components in the development and production of non-linear vibration characteristics and sensitive components of the closed-loop system frequency offset Test, other non-MEMS sensitive components can be used for reference.

2 Normative references

The following documents for the application of this document is essential. For dated references, only the dated version applies to this article Pieces. For undated references, the latest edition (including all amendments) applies to this document. GB/T 2298 mechanical vibration and shock terms GB/T 26111 Microelectromechanical System (MEMS) technology terminology GB/T 26112 Microelectromechanical system (MEMS) micromechanical evaluation of the general principles

3 Terms and definitions

GB/T 2298 and GB/T 26111 and define the following terms and definitions apply to this document. 3.1 Nonlinear vibration non-linearvibration With the change of vibration amplitude, elastic restoring force and displacement do not have a linear relationship with the vibration. 3.2 Non-linear jump non-linearjump When the vibration amplitude of the vibration system exceeds a certain threshold frequency response curve jump phenomenon. 3.3 Frequency deviation frequencydeviation Sensitive element closed-loop system output frequency relative to the natural frequency of the sensor vibration offset.

4 Sensitive element nonlinear vibration test parameters

The characteristic parameters of the nonlinear vibration test of sensitive components are mainly included. a) Nonlinear vibration amplitude response A (ω), dimensionless; b) Nonlinear vibration phase frequency response P (ω), in radians (rad); c) Nonlinear vibration amplitude frequency response bending factor b, in radians per second per second (rad · s-1 · m-2); d) nonlinear jump amplitude threshold ac, in meters (m); ......

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