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GB/T 34091-2017 English PDF

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GB/T 34091-2017: Gas for electronic industry -- Hexafluoroethane
Status: Valid
Standard IDUSDBUY PDFLead-DaysStandard Title (Description)Status
GB/T 34091-2017199 Add to Cart 3 days Gas for electronic industry -- Hexafluoroethane Valid

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Basic data

Standard ID: GB/T 34091-2017 (GB/T34091-2017)
Description (Translated English): Gas for electronic industry -- Hexafluoroethane
Sector / Industry: National Standard (Recommended)
Classification of Chinese Standard: G86
Classification of International Standard: 71.100.20
Word Count Estimation: 10,141
Date of Issue: 2017-07-31
Date of Implementation: 2017-11-01
Issuing agency(ies): General Administration of Quality Supervision, Inspection and Quarantine of the People's Republic of China, Standardization Administration of the People's Republic of China

GB/T 34091-2017: Gas for electronic industry -- Hexafluoroethane

---This is a DRAFT version for illustration, not a final translation. Full copy of true-PDF in English version (including equations, symbols, images, flow-chart, tables, and figures etc.) will be manually/carefully translated upon your order.
Gas for electronic industry - Hexafluoroethane ICS 71.100.20 G86 National Standards of People's Republic of China Electronic industrial gas hexafluoroethane 2017-07-31 Posted 2017-11-01 implementation General Administration of Quality Supervision, Inspection and Quarantine of People's Republic of China China National Standardization Administration released

Foreword

This standard was drafted in accordance with the rules given in GB/T 1.1-2009. This standard is proposed and managed by the National Semiconductor Equipment and Materials Standardization Technical Committee (SAC/TC203). This standard was drafted unit. Zhejiang Chemical Industry Research Institute Co., Ltd., Guangdong Huate Gas Co., Ltd., Sichuan test standard technology Co., Ltd., Coma Instruments, Southwest Chemical Research and Design Institute Co., Ltd., Shanghai Hua love chromatography Technology Co., Ltd., Dongguan City, Chen power Sub-Technology Co., Ltd., National Chemical Industry Gas Products Quality Supervision and Inspection Center (Fujian), Tianjin Changlu Watson Chemical Co., Ltd., Hao in the bright Chemical Research Institute Co., Ltd.. The main drafters of this standard. Shiwan Jun, Liao Heng Yi, Du Hansheng, Bai Zhanqi, Founder, Pan Yi, Niu Yan East, Fang Hua, Wang Hong, Chen Rong, Lin Yuwei, Deng Jianping, Li Jian, Zhou Pengyun. Electronic industrial gas hexafluoroethane

1 Scope

This standard specifies the technical requirements of hexafluoroethane for electronic industry, test methods, packaging, marking, storage and security. This standard applies to industrial use of purified hexafluoroethane derived high purity hexafluoroethane products. Mainly in the electronics industry plasma etching Process as an etching gas or as an electronic component cleaner. Molecular formula .C2F6. Relative molecular mass .138.0124 (By International Relative Atomic Weight in.2013).

2 Normative references

The following documents for the application of this document is essential. For dated references, only the dated version applies to this article Pieces. For undated references, the latest edition (including all amendments) applies to this document. GB 190 Dangerous goods packaging mark GB/T 3723 Industrial Chemical Sampling Safety General GB/T 5099 seamless steel gas cylinder GB/T 5832.1 gas analysis Determination of trace moisture Part 1. Electrolysis GB/T 7144 cylinder color logo GB/T 14193 liquefied gas cylinder filling provisions GB 15258 Chemical Safety Labeling Rules GB/T 16804 cylinder warning labels GB/T 26571 special gas storage period specification Gas analysis Helium ionization gas chromatography TSGR0006 Cylinder Safety Technology Supervision Procedures Hazardous Chemicals Safety Management Regulations (2002 Edition) Special Equipment Safety Supervision Regulations (2009 Edition)

3 technical requirements

The quality of hexafluoroethane should meet the requirements of Table 1. Table 1 technical indicators Project Indicators Hexafluoroethane (C2F6) Purity (volume fraction)/10-2 ≥ 99.999 Hydrogen (H2) content (volume fraction)/10-6 < 0.5 (O2 Ar) content (volume fraction)/10-6 < 1 Nitrogen (N2) content (volume fraction)/10-6 < 5 Carbon monoxide (CO) content (volume fraction)/10-6 < 0.5
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