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GB/T 34085-2017 English PDF

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GB/T 34085-2017: Gas for electronic industry -- Trifluoromethane
Status: Valid
Standard IDUSDBUY PDFLead-DaysStandard Title (Description)Status
GB/T 34085-2017199 Add to Cart 3 days Gas for electronic industry -- Trifluoromethane Valid

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Basic data

Standard ID: GB/T 34085-2017 (GB/T34085-2017)
Description (Translated English): Gas for electronic industry -- Trifluoromethane
Sector / Industry: National Standard (Recommended)
Classification of Chinese Standard: G86
Classification of International Standard: 71.100.20
Word Count Estimation: 10,172
Date of Issue: 2017-07-31
Date of Implementation: 2017-11-01
Issuing agency(ies): General Administration of Quality Supervision, Inspection and Quarantine of the People's Republic of China, Standardization Administration of the People's Republic of China

GB/T 34085-2017: Gas for electronic industry -- Trifluoromethane

---This is a DRAFT version for illustration, not a final translation. Full copy of true-PDF in English version (including equations, symbols, images, flow-chart, tables, and figures etc.) will be manually/carefully translated upon your order.
Gas for electronic industry - Trifluoromethane ICS 71.100.20 G86 National Standards of People's Republic of China Electronic industry gas Trifluoromethane 2017-07-31 Posted 2017-11-01 implementation General Administration of Quality Supervision, Inspection and Quarantine of People's Republic of China China National Standardization Administration released

Foreword

This standard was drafted in accordance with the rules given in GB/T 1.1-2009. This standard is proposed and managed by the National Semiconductor Equipment and Materials Standardization Technical Committee (SAC/TC203). This standard was drafted unit. National Chemical Industry Gas Products Quality Supervision and Inspection Center (Fujian), Guangdong Huate Gas Co., Ltd., Zhejiang Juhua Co., Ltd., Gaomi Instruments, Zhejiang Chemical Industry Research Institute, Zhonghao Guangming Chemical Research and Design Institute Co., Ltd., Dalian University Special Gas Co., Ltd., Shanghai Hua love chromatography Technology Co., Ltd., Dongguan City, Chen Electronics Technology Co., Ltd., Tianjin Changlu Watson Chemical Co., Ltd., Southwest Chemical Research and Design Institute Co., Ltd. The main drafters of this standard. Chen Rong, Lin Yu Wei, Fu cast red, Du Hansheng, Ye Hongyan, Niu Yan East, Shiwan Jun, Sun Fu Nan, Qu Qing, Fang Hua, Wang Hong, Cui Xuewen, Zhou Pengyun. Electronic industry gas Trifluoromethane

1 Scope

This standard specifies the technical requirements of the electronics industry with Trifluoromethane, test methods and packaging, marking, storage and security. This standard applies to difluorochloromethane, chloroform and hydrogen fluoride as raw material preparation of trifluoromethane products. It is in the electronics industry Ion etching process as etching gas. Molecular formula .CHF3. Relative molecular mass .70.013 (By International Relative Atomic Weight in.2011).

2 Normative references

The following documents for the application of this document is essential. For dated references, only the dated version applies to this article Pieces. For undated references, the latest edition (including all amendments) applies to this document. GB 190 Dangerous goods packaging mark GB/T 3723 Industrial Chemical Sampling Safety General GB/T 5099 seamless steel gas cylinder GB/T 5832.3 Determination of trace moisture in gases Part 3. Cavity ring down spectroscopy GB/T 7144 cylinder color logo GB/T 14193 liquefied gas cylinder filling provisions GB 15258 Chemical Safety Labeling Rules GB/T 16804 cylinder warning labels GB/T 26571 special gas storage period specification Gas analysis Helium ionization gas chromatography TSGR0006 Cylinder Safety Technology Supervision Procedures Hazardous Chemicals Safety Management Regulations (2002 Edition) Special Equipment Safety Supervision Regulations (2009 Edition)

3 technical requirements

The quality of trifluoromethane should meet the requirements of Table 1. Table 1 technical indicators Project Indicators Purity (volume fraction) of trifluoromethane (CHF3)/10-2 ≥ 99.999 O2 Ar content (volume fraction)/10-6 < 1 Nitrogen (N2) content (volume fraction)/10-6 < 3 Carbon monoxide (CO) content (volume fraction)/10-6 < 1 Carbon dioxide (CO2) content (volume fraction)/10-6 < 1
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