GB/T 22572-2008 English PDF

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GB/T 22572-2008: Surface chemical analysis -- Secondary-ion mass spectrometry -- Method for estimating depth resolution parameters with multiple delta-layer reference materials
Status: Valid

Standard ID	USD	BUY PDF	Lead-Days	Standard Title (Description)	Status
GB/T 22572-2008	134	Add to Cart	3 days	Surface chemical analysis -- Secondary-ion mass spectrometry -- Method for estimating depth resolution parameters with multiple delta-layer reference materials	Valid

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Basic data

Standard ID: GB/T 22572-2008 (GB/T22572-2008)
Description (Translated English): Surface chemical analysis -- Secondary-ion mass spectrometry -- Method for estimating depth resolution parameters with multiple delta-layer reference materials
Sector / Industry: National Standard (Recommended)
Classification of Chinese Standard: G04
Classification of International Standard: 71.040.40
Word Count Estimation: 7,710
Date of Issue: 2008-12-11
Date of Implementation: 2009-10-01
Quoted Standard: GB/T 22461
Adopted Standard: ISO 20341-2003, IDT
Regulation (derived from): National Standard Approval Announcement 2008 No.19 (Total No.132)
Issuing agency(ies): General Administration of Quality Supervision, Inspection and Quarantine of the People's Republic of China, Standardization Administration of the People's Republic of China
Summary: This standard specifies the SIMS depth profiling, use multi-layer reference material to assess the forefront of �� decay length, trailing edge decay length and depth resolution Gaussian broadening three step parameters. Because of the physical and chemical state of a sample surface affected by the incident ions and unstable, this standard does not apply to �� layer near the surface region.

GB/T 22572-2008: Surface chemical analysis -- Secondary-ion mass spectrometry -- Method for estimating depth resolution parameters with multiple delta-layer reference materials

---This is a DRAFT version for illustration, not a final translation. Full copy of true-PDF in English version (including equations, symbols, images, flow-chart, tables, and figures etc.) will be manually/carefully translated upon your order.
Surface chemical analysis. Secondary-ion mass spectrometry. Method for estimating depth resolution parameters with multiple delta-layer reference materials ICS 71.040.40 G04 National Standards of People's Republic of China GB/T 22572-2008/ISO 20341.2003 Surface chemical analysis - Secondary ion mass spectrometry Reference material layer multi δ Assess the depth resolution parameters method (ISO 20341.2003, IDT) Posted 2008-12-11 2009-10-01 implementation Administration of Quality Supervision, Inspection and Quarantine of People's Republic of China Standardization Administration of China released

Foreword

This standard is identical with ISO 20341.2003 "Surface chemical analysis - Secondary ion mass spectrometry --- --- multi-layer reference substance assessment deep δ The method of resolution parameters. " For ease of use, the standard ISO 20341.2003 made the following editorial changes. --- Remove the original preface of international standards; --- Present international standard to this standard. Appendix A of this standard is a normative appendix. This standard by the National Standardization Technical Committee microbeam analysis and focal points. This standard is drafted by. Ministry of Information Industry materials for Quality Supervision and Inspection Center. The main drafters of this standard. Manong agriculture, Heyou Qin, He Xiukun. GB/T 22572-2008/ISO 20341.2003

Introduction

Depth resolution is secondary ion mass spectrometry (SIMS) depth profiling is an important parameter. However, in the SIMS analysis, the impact of the sputtering depth The results of the analysis of many factors, including the ion beam induced mixing and segregation, a charge-driven diffusion, matrix effects, shapes and surface micro-craters Morphology. Only by understanding and minimize the impact of the above factors, to get the best depth resolution. Get the best depth-resolved analysis usually requires specific conditions, including ultra-low primary ion beam energy, grazing incidence, rotating sample, low Cooling the sample temperature and so on, all of these conditions in the conventional SIMS analysis are difficult to meet. In addition, for each sample, the optimum points Analysis of parameters may be quite different. Further, various instruments of factors, such as the shape of the crater, the identity of the ion beam, crater edge effect elimination, mass The amount of interference, memory effect, residual gas effect, etc., will affect all aspects of the depth resolution. Thus, under conventional SIMS analysis conditions, it is difficult to directly assess the depth resolution. This standard describes the decay length of the frontier, the trailing edge of decline Concept of variable length and Gaussian broadening proposed measuring step for each parameter. Multi-δ layer reference materials can be used to assess conventional SIMS Depth resolution parameters under analytical conditions. GB/T 22572-2008/ISO 20341.2003 Surface chemical analysis - Secondary ion mass spectrometry Reference material layer multi δ Assess the depth resolution parameters method

1 Scope

This standard specifies the SIMS depth profiling, the multi-layer reference substance evaluation δ frontier decay length, the length of the trailing edge of decay and high Adams broadening three steps depth resolution parameters. Since the physical and chemical state of a sample surface affected by the incident ions and unstable, this standard does not apply to δ layer near surface region.

2 Normative references

The following documents contain provisions which, through reference in this standard and become the standard terms. For dated references, subsequent Amendments (not including errata content) or revisions do not apply to this standard, however, encourage the parties to the agreement are based on research Whether the latest versions of these documents. For undated reference documents, the latest versions apply to this standard. GB/T 22461 Surface chemical analysis - Vocabulary (GB/T 22461-2008, ISO 18115.2001, IDT)

3 Symbol

AL, AT scale factor. B, C scale factor. I (z) with the secondary ion intensity of depth. Z depth. Depth z0 apparent peak. λL frontier decay length. After λT along the length of decay. σ Gaussian broadening. It requires more than 4 δ-layer reference materials According to the definition of 4.1 GB/T 22461 in δ layers, preferably a layer of a single atomic layer δ. However, it is not always possible to produce a layer or verification δ Single atomic layer thickness. If there is no ideal δ layer can, in line with the non-ideal δ layer as specified below may also reference substance. 4.2 SIMS depth profiling of matrix sputtered surface layer should not be changed, so the matrix effect or there will be no significant change in the rate of erosion. wear When over-δ layer table constant matrix elements of the secondary ion intensity BenQ body does not change. 4.3 and δ surface layer should be flat and parallel to each other, in order to avoid any distortion SIMS depth profiling. 4.4 δ-doped layer thickness should be much smaller than a projection range of ions, such small changes in thickness will not affect the shape of the curve analysis. 4.5 spacing δ adjacent layers should be large enough for the valley between the layers of secondary ionic strength value less than 1% of the peak. 4.6 δ layer thickness, interface roughness position and should be used HRTEM, grazing incidence X-ray reflectivity, the ion energy dispersion Radio spectrum or other suitable method to determine.

5 Steps

5.1 In order to adjust and optimize the settings, secondary ion mass spectrometry analysis conditions (such as ion energy, ion species, ion current, secondary ion electrode Sex, a beam scanning area, the analysis region, a beam stability, sample introduction, to detect secondary ions) should follow the manufacturer's instructions GB/T 22572-2008/ISO 20341.2003 ......

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