GB/T 15873-1995 English PDFUS$459.00 ยท In stock
Delivery: <= 3 days. True-PDF full-copy in English will be manually translated and delivered via email. GB/T 15873-1995: Directives for drafting semiconductor facilities interface specification
Basic dataStandard ID: GB/T 15873-1995 (GB/T15873-1995)Description (Translated English): Directives for drafting semiconductor facilities interface specification Sector / Industry: National Standard (Recommended) Classification of Chinese Standard: L04 Classification of International Standard: 31.220.10 Word Count Estimation: 13,182 Date of Issue: 12/22/1995 Date of Implementation: 8/1/1996 Quoted Standard: GB/T 13840 Issuing agency(ies): State Bureau of Technical Supervision Summary: This standard specifies the technical documentation semiconductor facility interface (hereinafter referred to as the interface file) prepared by the basic requirements and formats. This standard applies to semiconductor facility design, construction, supply, management, training and use. |