Home Cart Quotation Policy About-Us
www.ChineseStandard.net
SEARCH

GB/T 14603-2025 English PDF

Q: How long will the true-PDF of English version of GB/T 14603-2025 be delivered?

Upon your order, we will start to translate GB/T 14603-2025_English as soon as possible, and keep you informed of the progress. The lead time is typically 3 ~ 5 working days. The lengthier the document the longer the lead time.

Q: Can I share the purchased PDF of GB/T 14603-2025_English with my colleagues?

Yes. The purchased PDF of GB/T 14603-2025_English will be deemed to be sold to your employer/organization who actually pays for it, including your colleagues and your employer's intranet.

Q: Does the price include tax/VAT?

Yes. Our tax invoice, downloaded/delivered in 9 seconds, includes all tax/VAT and complies with 100+ countries' tax regulations (tax exempted in 100+ countries). Avoidance of Double Taxation Agreements (DTAs) between Singapore and 100+ Countries: https://www.iras.gov.sg/taxes/international-tax

Q: Do you accept my currency other than USD?

Yes. If you need your currency to be printed on the invoice, please write an email to Sales@ChineseStandard.net. In 2 working-hours, we will create a special link for you to pay in any currencies. Otherwise, follow the normal steps: Add to Cart -- Checkout -- Select your currency to pay.

Q: Should I purchase the latest version GB/T 14603-2025?

Yes. Unless special scenarios such as technical constraints or academic study, you should always prioritize to purchase the latest version GB/T 14603-2025 even if the enforcement date is in future. Complying with the latest version means that, by default, it also complies with all the earlier versions, technically.

US$599.00 · In stock
Delivery: <= 5 days. True-PDF full-copy in English will be manually translated and delivered via email.
GB/T 14603-2025: Electronic gas - Halide gas
Status: Valid

GB/T 14603: Historical versions

Standard ID	USD	BUY PDF	Lead-Days	Standard Title (Description)	Status
GB/T 14603-2025	599	Add to Cart	5 days	Electronic gas - Halide gas	Valid
GB/T 14603-2009	279	Add to Cart	3 days	Gases for electronic industry -- Boron trifluoride	Valid
GB/T 14603-1993	239	Add to Cart	2 days	Gases for electronic industry. Boron trifluoride	Obsolete

Basic data

Standard ID: GB/T 14603-2025 (GB/T14603-2025)
Description (Translated English): Electronic gas - Halide gas
Sector / Industry: National Standard (Recommended)
Classification of Chinese Standard: G86
Classification of International Standard: 71.100.20
Word Count Estimation: 30,362
Date of Issue: 2025-08-01
Date of Implementation: 2026-02-01
Older Standard (superseded by this standard): GB/T 14603-2009, GB/T 26251-2010, GB/T 18994-2014, GB/T 14602-2014, GB/T 17874-2021
Issuing agency(ies): State Administration for Market Regulation, Standardization Administration of China

GB/T 14603-2025: Electronic gas - Halide gas

---This is an excerpt. Full copy of true-PDF in English version (including equations, symbols, images, flow-chart, tables, and figures etc.), auto-downloaded/delivered in 9 seconds, can be purchased online: https://www.ChineseStandard.net/PDF.aspx/GBT14603-2025
ICS 71.100.20 CCSG86 National Standard of the People's Republic of China Replaces GB/T 14603-2009, GB/T 26251-2010, etc. Electronic Gases Halide Gases Released on August 1, 2025 Implementation on February 1, 2026 State Administration for Market Regulation The National Standardization Administration issued

Preface

This document is in accordance with the provisions of GB/T 1.1-2020 "Guidelines for standardization work Part 1.Structure and drafting rules for standardization documents" Drafting. This document replaces GB/T 14603-2009 "Gas Boron Trifluoride for Electronics Industry", GB/T 14602-2014 "Gas Boron Trifluoride for Electronics Industry" GB/T 18994-2014 "High-purity chlorine gas for electronic industry", GB/T 17874-2021 "Trichlorinated gas for electronic industry" Boron", GB/T 26251-2010 "Fluorine and fluorine-nitrogen mixed gas", and GB/T 14603-2009, GB/T 14602-2014, Compared with GB/T 18994-2014, GB/T 17874-2021 and GB/T 26251-2010, in addition to structural adjustments and editorial changes, the main changes are. The technical changes are as follows. --- Changed the scope (see Chapter 1, Chapter 1 of GB/T 14603-2009, Chapter 1 of GB/T 14602-2014, Chapter 1 of GB/T 18994-2014, Chapter 1 of GB/T 17874-2021, and Chapter 1 of GB/T 26251-2010); --- Added "Terms and Definitions" (see Chapter 3); --- Changed the technical requirements for halide gases (see Chapter 4, Chapter 3 of GB/T 14603-2009, GB/T 14602-2014 Chapter 3 of GB/T 18994-2014, Chapter 4 of GB/T 17874-2021, and GB/T 26251-2010 Chapter 3 of); --- Changed the sampling requirements (see Chapter 5, 4.1.2 of GB/T 14603-2009, 4.1.2 of GB/T 14602-2014, GB/T 18994-2014, 4.1.2, GB/T 17874-2021, 4.1.3, GB/T 26251-2010); --- Changed the purity calculation method (see 6.1, 4.2 of GB/T 14603-2009); --- Changed the determination method of oxygen, argon, nitrogen, carbon dioxide and sulfur dioxide content in boron trifluoride (see 6.2, GB/T 14603- 2009 versions 4.3 and 4.6); --- Added the method for determining the content of methane and carbon monoxide in boron trifluoride (see 6.2); --- Changed the method for the determination of silicon tetrafluoride content in boron trifluoride (see 6.3, 4.4 of GB/T 14603-2009); --- Deleted the method for determination of sulfate content in boron trifluoride (see 4.5 of GB/T 14603-2009); --- Added the method for determining the content of hydrogen fluoride in boron trifluoride (see 6.3); --- Changed the determination method of oxygen, argon, nitrogen, methane, acetylene, carbon monoxide and carbon dioxide content in hydrogen chloride (see 6.4, GB/T 14602-2014, 4.3); --- Changed the determination method of hydrogen, oxygen, argon, nitrogen, methane, carbon monoxide and carbon dioxide content in high-purity chlorine (see 6.5, GB/T 18994- 4.3 of.2014); --- Changed the method for determination of metal element content in high-purity chlorine (see 6.17, 4.5 of GB/T 18994-2014); --- Added the method for determining the content of oxygen, argon, nitrogen and carbon tetrafluoride in chlorine trifluoride (see 6.9); --- Added the method for determining the content of hydrogen fluoride in chlorine trifluoride (see 6.10); --- Changed the method for determining the fluorine content in fluorine-nitrogen mixtures (see 6.11, 4.2 of GB/T 26251-2010); --- Changed the method for determining the content of (oxygen and argon) in fluorine and nitrogen mixtures (see 6.12, 4.2 of GB/T 26251-2010); --- Changed the method for determining the content of carbon tetrafluoride and hydrogen fluoride in fluorine-nitrogen mixture (see 6.13, 4.2 of GB/T 26251-2010); --- Added the method for determining the content of sulfur hexafluoride, carbon monoxide, carbon dioxide, carbonyl fluoride and silicon tetrafluoride in fluorine-nitrogen mixed gas (see 6.13); --- Added the determination method of hydrogen, oxygen, argon, nitrogen, methane, carbon monoxide and carbon dioxide content in hydrogen bromide (see 6.14); --- Added the method for determining the content of hydrogen chloride in hydrogen bromide (see 6.15); --- Added the method for determining the water content in hydrogen bromide (see 6.16); --- Added the method for determining the content of metal elements in boron trifluoride (see 6.17); --- Changed the method for determination of metal element content in hydrogen chloride (see 6.17, 4.5 of GB/T 14602-2014); --- Added the method for determining the content of metal elements in chlorine trifluoride (see 6.17); --- Added the method for determining the content of metal elements in hydrogen bromide (see 6.17); --- Increased exhaust gas treatment requirements (see 6.18); --- Changed the inspection rules (see Chapter 7, 4.1 of GB/T 14603-2009, 4.1 of GB/T 14602-2014, GB/T 18994-2014, 4.1; GB/T 26251-2010, 4.1); --- Changed the requirements for marking, packaging, transportation, storage and safety information (see Chapter 8, Chapter 5 of GB/T 14603-2009, Chapter 5 of GB/T 14602-2014, Chapter 5 of GB/T 18994-2014, Chapter 8 of GB/T 17874-2021, Chapter 5 of GB/T 26251-2010). Please note that some of the contents of this document may involve patents. The issuing organization of this document does not assume the responsibility for identifying patents. This document was proposed and coordinated by the National Technical Committee for Semiconductor Equipment and Materials Standardization (SAC/TC203). This document was drafted by. Haohua Gas Co., Ltd. Southwest Branch, Fujian Del Technology Co., Ltd., Shandong Heyi Gas Co., Ltd. Co., Ltd., Zhejiang Ruiheng Electronic Materials Co., Ltd., Beijing Huayu Tongfang Chemical Technology Development Co., Ltd., Fujian Fudou New Materials Co., Ltd. Dalian Huabang Chemical Co., Ltd., Zhejiang Zhongning Silicon Industry Co., Ltd., Fujian Yongjing Technology Co., Ltd., Disener (Beijing) Science and Technology Co., Ltd. Technology Co., Ltd., Shanghai Lizhi Semiconductor Technology Co., Ltd., Tangshan Sanyou Electronic Chemicals Co., Ltd., Zhejiang Yingdesai Semiconductor Materials Co., Ltd. Materials Co., Ltd., Guangzhou Guanggang Gas Energy Co., Ltd., Tongfang Weishi Technology Co., Ltd., Beijing Jianzhi Technology Co., Ltd. Ningbo Congyue Technology Innovation Co., Ltd., Tianjin Green Ling Gas Co., Ltd., Fujian Jiuce Gas Co., Ltd., Beijing Purui Gas Co., Ltd. Analytical Instrument Co., Ltd., Dalian Kelide Semiconductor Materials Co., Ltd., Guangdong Huate Gas Co., Ltd., Nanjing Optoelectronics (Ulanqab Co., Ltd., Fujian Hengshen Electronic Materials Technology Co., Ltd., CSSC (Handan) Perri Specialty Gas Co., Ltd., Zhonghao Guangming Chemical Research and Design Institute Co., Ltd., Dalian Guangming Chemical Industry Gas Quality Monitoring Center Co., Ltd., Air Liquide (China) Investment Co., Ltd., Bruker (Beijing) Technology Co., Ltd., Hangzhou Yunbi Technology Co., Ltd., Shanghai Huaai Chromatography Analysis Technology Co., Ltd., Dalian Date Gas Co., Ltd., Lianxiong Investment (Shanghai) Co., Ltd., Langxi Instrument (Shanghai) Co., Ltd., Hangzhou New Century Mixed Gas Co., Ltd., Shenyang Zhong Fu Ke Jin Pressure Vessel Co., Ltd., China Jiliang University, Beijing Ruixinjie Environmental Protection Technology Co., Ltd., China Metrology and Testing Society, Ireland AGC Instrument Co., Ltd. Beijing Representative Office, Shanghai Fanwei Instrument Equipment Co., Ltd., Guizhou Product Quality Inspection and Testing Institute, Suzhou Yivite New Materials Co., Ltd. and Southwest Chemical Research and Design Institute Co., Ltd. The main drafters of this document are. Lai Xiaofeng, Chen Shihua, Yang Jun, Li Jianxin, Guo Xiaojun, Ma Jianxiu, Li Jialei, Wang Zhejun, Li Zhi, Sun Fang, Guo Qiong, Hou Peng, Qian Ji, Zhao Bin, Wu Xihu, Liu Chunhua, Li Wen, Li Changjian, Peng Foxiao, Ren Ru, Xu Zhengjun, Zheng Cunqiang, Ni Zhiyuan, Zhao Xiaolan, Dong Xiaoyang, Lu Yanzhu, Chen Zhiqiang, Wang Hongqiu, Huang Tao, Tang Ping, Wu Yuqiang, He Jingyu, Li Jingsheng, Zhao Yinfeng, Shi Yini, Chen Yanshan, Yang Junhao, Wang Xinxi, Liu Guangyu, Lü Lei, Li Tinghui, Zheng Qiuyan, Teng Xinsheng, Sun Funan, Chang Xia, Niu Di, Yin Hao, Wang Ruowen, Zhao Yue, Wang Junfeng, Li Anlin, Fang Hua, Xin Ling, Du Yutong, Huang Hui, Li Jianhao, Wang Xiangke, Zhang Jinbo, Li Ming, Gong Bing, Zhang Pengyue, Zhao Jie, Yang Yangzhongfu, Ren Xihui, He Bo, Tang Zhongwei, Cheng Huapeng, Tan Yiqiang, Yin Lele, Zhou Pengyun, Tang Xiamei. The previous versions of this document and the documents it replaces are as follows. ---First published in.1993 as GB/T 14603-1993 and first revised in.2009 as GB/T 14603-2009; ---First published in.1993 as GB/T 14602-1993, first revised in.2009 as GB/T 14602-2009, and revised in.2014 as GB/T 14602-2015. The second revision incorporated the contents of GB/T 24469-2009 "5N Hydrogen Chloride Gas for Electronics Industry"; ---First issued as GB/T 18994-2003 in.2003 and first revised as GB/T 18994-2014 in.2014; ---First published in.1999 as GB/T 17874-1999, first revised in.2010 as GB/T 17874-2010, The second revision is GB/T 17874-2021; ---First published in.2010 as GB/T 26251-2010; --- This is the third revision, GB/T 14603-2009, GB/T 14602-2014, GB/T 18994-2014, GB/T 17874-2021 and GB/T 26251-2010 are integrated and revised. Electronic Gases Halide Gases

1 Scope

This document specifies the technical requirements for halide gases, describes the corresponding test methods, and also specifies the sampling, inspection rules, marking, packaging, Packaging, transportation and storage requirements and safety information are provided. This document applies to halide gases purified from industrial halide gases as raw materials.

2 Normative references

The contents of the following documents constitute the essential clauses of this document through normative references in this document. For referenced documents without a date, only the version corresponding to that date applies to this document; for referenced documents without a date, the latest version (including all amendments) applies to This document. GB 190 Dangerous Goods Packaging Marking GB/T 4844 Pure helium, high-purity helium and ultra-pure helium GB/T 5099 (all parts) Steel seamless gas cylinders GB/T 5832.3 Determination of trace moisture in gases Part 3.Cavity ring-down spectroscopy GB/T 6682 Specifications and test methods for water used in analytical laboratories GB/T 7144 Color marking of gas cylinders GB/T 8979 Pure nitrogen, high-purity nitrogen and ultra-pure nitrogen GB/T 8984 Gas analysis - Determination of trace carbon monoxide, carbon dioxide and hydrocarbons in gases - Flame ionization Gas chromatography GB/T 11640 Aluminum alloy seamless gas cylinders GB/T 11736 Standard method for the examination of chlorine in the atmosphere of residential areas - Methyl orange spectrophotometric method GB/T 14193 Regulations for filling liquefied gas cylinders GB 15258 Provisions for the Preparation of Chemical Safety Labels GB/T 16804 Gas Cylinder Warning Labels GB/T 28726 Gas analysis—Helium ionization gas chromatography GB/T 33145 Large volume seamless steel gas cylinders GB/T 34972 Determination of metal content in gases for use in the electronics industry - Inductively coupled plasma mass spectrometry GB/T 43306 Guidelines for Gas Analysis Sampling TSG07 Licensing Rules for Special Equipment Manufacturing and Filling Units TSG23 Gas Cylinder Safety Technical Regulations TSGR0005 Safety Technical Supervision Regulations for Mobile Pressure Vessels

3 Terms and Definitions

The following terms and definitions apply to this document. 3.1 halide gas Including boron trifluoride, hydrogen chloride, high-purity chlorine, boron trichloride, chlorine trifluoride, fluorine-nitrogen mixture, and hydrogen bromide. ......

Image

Tips & Frequently Asked Questions:

Question 1: How long will the true-PDF of GB/T 14603-2025_English be delivered?

Answer: Upon your order, we will start to translate GB/T 14603-2025_English as soon as possible, and keep you informed of the progress. The lead time is typically 3 ~ 5 working days. The lengthier the document the longer the lead time.

Question 2: Can I share the purchased PDF of GB/T 14603-2025_English with my colleagues?

Answer: Yes. The purchased PDF of GB/T 14603-2025_English will be deemed to be sold to your employer/organization who actually pays for it, including your colleagues and your employer's intranet.

Question 3: Does the price include tax/VAT?

Answer: Yes. Our tax invoice, downloaded/delivered in 9 seconds, includes all tax/VAT and complies with 100+ countries' tax regulations (tax exempted in 100+ countries) -- See Avoidance of Double Taxation Agreements (DTAs): List of DTAs signed between Singapore and 100+ countries

Question 4: Do you accept my currency other than USD?

Answer: Yes. If you need your currency to be printed on the invoice, please write an email to Sales@ChineseStandard.net. In 2 working-hours, we will create a special link for you to pay in any currencies. Otherwise, follow the normal steps: Add to Cart -- Checkout -- Select your currency to pay.

Question 5: Should I purchase the latest version GB/T 14603-2025?

Answer: Yes. Unless special scenarios such as technical constraints or academic study, you should always prioritize to purchase the latest version GB/T 14603-2025 even if the enforcement date is in future. Complying with the latest version means that, by default, it also complies with all the earlier versions, technically.