GB 50646-2020 English PDFGB 50646: Historical versions
Basic dataStandard ID: GB 50646-2020 (GB50646-2020)Description (Translated English): (Special gas system engineering technical standards (with text description)) Sector / Industry: National Standard Classification of Chinese Standard: P82 Word Count Estimation: 151,132 Date of Issue: 2020-02-27 Date of Implementation: 2020-10-01 Issuing agency(ies): Ministry of Housing and Urban-Rural Development of the People's Republic of China; State Administration for Market Regulation GB 50646-2020: (Special gas system engineering technical standards (with text description))---This is a DRAFT version for illustration, not a final translation. Full copy of true-PDF in English version (including equations, symbols, images, flow-chart, tables, and figures etc.) will be manually/carefully translated upon your order.1 General 1.0.1 In order to implement the current national laws and regulations in the engineering design, construction and acceptance of the special gas system and supporting equipment in the electronics industry factory, meet the product production requirements, ensure personal and property safety, achieve safe application, advanced technology, and protect the environment, energy saving, economical and reasonable, formulate this standard. 1.0.2 This standard is applicable to the design, construction and acceptance of special gas system engineering in the electronics industry for new construction, reconstruction and expansion. 1.0.3 This standard does not apply to the production, purification, filling and other production of special gases and the engineering design, construction and acceptance of supporting equipment. 1.0.4 The design, construction and acceptance of special gas system engineering shall not only comply with the provisions of this standard, but also comply with the relevant current national standards. 2 terms 2.0.1 specialty gas Special gases such as pyrophoric, flammable, highly toxic, poisonous, corrosive, oxidizing, inert, etc. used in epitaxy, chemical vapor deposition, etching, doping and other processes in the production of electronic products. 2.0.2 pyrophoric gas Also known as pyrophoric gas, it refers to a flammable gas that may spontaneously ignite when it is equal to or lower than 54°C in air. 2.0.3 flammable gas flammable gas A gas mixed with air with a certain flammability range at 20°C and a standard pressure of 101.3kPa. 2.0.4 highly toxic gas The gas whose half-lethal concentration (inhaled in the air for 4h) is less than or equal to 100mL/m³. 2.0.5 Toxic gas Gases with a semi-lethal concentration (inhaled in the air for 4 hours) greater than 100mL/m³ but not exceeding 2500mL/m³. 2.0.6 Corrosive gas Gases that cause visible damage or irreversible changes to materials or human tissue through a chemical reaction. 2.0.7 Oxidizing gas oxidizing gas Any gas that causes and promotes the combustion of other substances more than air, generally by providing oxygen. 2.0.8 inert gas inert gas A gas that does not react chemically with other substances under normal circumstances. 2.0.9 low vapor pressure gas low vapor pressure gas A gas whose saturated vapor pressure is less than 0.2MPa at room temperature. 2.0.10 specialty gas system The general term for equipment, pipelines and accessories in the storage, transportation and distribution of special gases. 2.0.11 bulk silane system Refers to the silane system including ISO standard container bottle group, long tube trailer, steel cylinder container, Y-shaped horizontal steel cylinder, or the total water volume exceeds 250L. 2.0.12 bulk specialty gas system Generally refers to the special gas storage and gas supply system with a single gas equipment volume greater than 400L. 2.0.13 liquid specialty gas system Refers to the special gas system that is transported and distributed in liquid state and vaporized at the user terminal. 2.0.14 Gas detector system (GDS) It is installed in the area covered by special gas cylinder cabinets, gas cylinder racks, valve boxes, valve discs and other special gas delivery equipment and pipelines, and judges the leakage of essential gases by detecting the concentration of essential gases or related gases in the air, so as to emit a sound Optical alarm signal, system that provides detection data. 2.0.15 gas management system (GMS) A collective term for gas management and control systems including special gas detection systems, emergency treatment systems, work management systems, monitoring systems, data transmission and processing systems. 2.0.16 Fabrication area The electronic production plant is equipped with production equipment and related research and development and testing areas. Some production processes will use dangerous production materials. This area is the core area of the production plant. 2.0.17 specialty gas room The electronic production plant is a room where gas equipment such as special gas cylinder cabinets, gas cylinder racks, horizontal gas cylinders, gas cylinder containers, and tail gas treatment devices are placed, and special gases are delivered to production equipment through pipelines. 2.0.18 specialty gas station An independent building (structure) where gas equipment such as horizontal gas cylinders, gas cylinder containers, IS0 standard container groups, long-tube trailers, and exhaust gas treatment devices are placed in electronics factories, and special gases are delivered to the gas equipment in the production plant through pipelines buildings. 2.0.19 specialty gas station and room Refers to the general term for special gas rooms and special gas stations in electronics factories. 2.0.20 silane station silane station It refers to placing silane or silane mixed gas steel cylinders, steel cylinder containers, horizontal steel cylinders, long tube trailers or ISO standard container bottle groups, silane gasification devices, tail gas treatment devices, electrical devices, etc., and supply them to the production plant through pipelines Independent buildings (structures) or areas of silane gas. 2.0.21 The bundle of gas cylinders is fixed by a special metal frame, and the gas cylinder group unit is connected in parallel with multiple gas cylinder interfaces by a gas collecting pipe. 2.0.22 ISO standard container group ISO module A combined container module that connects gas cylinders, long-tube steel cylinders or gas cylinder containers with gas collecting pipes and installs them on a special metal frame. 2.0.23 Gas cabinet (GC) Closed cylinder placement and gas delivery equipment for specialty gases. 2.0.24 Gas rack(GR) Open cylinder placement and gas delivery equipment for specialty gases. 2.0.25 valve manifold box (VMB) An enclosed piping distribution box used in the delivery of specialty gases to provide specialty gases to one or more process equipment. 2.0.26 valve manifold panel (VMP) An open pipe distribution device used in the delivery of specialty gases to provide specialty gases to one or more process equipment. 2.0.27 Exhaust gas treatment device local scrubber The on-site treatment device for exhaust and purge gas of spontaneous combustion, flammability, highly toxic, corrosive gases, etc., the exhaust gas after treatment reaches the specified emission concentration, and is discharged into the exhaust pipe of the gas-using workshop. 2.0.28 horizontal cylinder horizontal cylinder Cylinders for storing more specialty gases. The general water volume is 450L and 950L. 2.0.29 restrict flow orifice (RFO) A device that limits the maximum flow rate of a fluid system. 2.0.30 excess flow switch (EFS) When the flow rate of the fluid system exceeds the set value, a switch signal is given. 2.0.31 negative pressure gas source sub-atmospheric gas source (SAGS) Type 1.Under standard temperature and pressure, both the inside of the cylinder and the outlet of the valve are negative pressure gas sources. Type 2.Under standard temperature and pressure, the cylinder is under positive pressure and the valve outlet is a negative pressure gas source. 2.0.32 incompatible When different gases are mixed, a chemical reaction occurs, releasing energy and causing harm to the environment. 2.0.33 purge The process of replacing the essential or working gas in a specialty gas system with nitrogen or an inert gas. 2.0.34 exhaust vent Essential gas or working gas discharged from special gas equipment and systems. 2.0.35 gas panel gas panel Special facilities integrating cut-off valves, pressure regulating valves, filters, pressure gauges and other components. 2.0.36 half lethal concentration 50 (LC50) Continuous inhalation of healthy adult rats in the air for 1 hour can cause the concentration of half of the tested rats to die within 14 days. 2.0.37 Low explosion limit (LEL) The lower limit of the concentration of flammable gas explosion in air or oxidizing gas. 2.0.38 The highest allowable concentration threshold limit value (TLV) When the concentration of toxic gas in the air is less than this value, the health of the personnel who are fully and continuously exposed to the environment will not be damaged. 2.0.39 Maximum allowable concentration value-time weighted average allowable concentration limit value-time weighted average(TLV-TWA)threshold Operators work 8 hours a day, 5 days a week, and the time-weighted average concentration of toxic gases that will not damage their health. 3 special gas station3.1 General provisions 3.1.1 The special gas station should be arranged in an independent building (structure) or in the special gas room of the production plant. 3.1.2 The special gas room arranged in the production plant can use gas cylinder cabinets, gas cylinder racks, horizontal gas cylinders, gas cylinder containers, etc. to supply special gases to the production equipment. 3.1.3 The special gas station arranged in a separate building (structure) can use gas cylinder containers, horizontal gas cylinders, ISO standard container bottle groups, long-tube trailers, etc. to supply special gases to production equipment. 3.1.4 The special gas equipment arranged in the production area shall meet the following requirements. 1 The maximum allowable storage capacity of special gases shall comply with the provisions in Table 3.1.4; 2 For special gases, gas cylinder cabinets and exhaust devices should be installed; 3 The production area shall be equipped with an automatic fire sprinkler system, and shall be isolated from other areas by a fire partition wall; when the storage volume of special gas exceeds the quantity specified in Table 3.1.4, a special gas room shall be provided. Table 3.1.4 The maximum allowable storage capacity in the production area of the production plant Note. The total amount of gas is the gas volume under the standard state. 3.1.5 The design of the special gas room shall meet the following requirements. 1 The special gas room should be equipped with an exhaust system, and should be designed according to negative pressure; 2 Special gas rooms shall be separated from each other by fire partition walls; 3 The design of the special gas room shall comply with the relevant provisions of the current national standard "Code for Fire Protection Design of Buildings" GB 50016. 3.1.6 When the storage volume of spontaneously combustible special gas in the production plant exceeds 57m³, an independent special gas station shall be set up. 3.1.7 The low vapor pressure special gas equipment in the production area of the production plant should be arranged close to the production equipment. 3.1.8 The special gas room should be concentrated on the first floor of the production plant or other auxiliary floors, and the location should be close to the outer wall. 3.1.9 Freight corridors, freight elevators and other transportation facilities should be arranged in the vicinity of the special gas room. 3.2 Layout of special gas station 3.2.1 Special gases should be classified and engineered according to their physical and chemical properties and safety characteristics. 3.2.2 The fire hazard category of the production of special gas stations shall comply with the relevant provisions of the current national standard "Code for Fire Protection Design of Buildings" GB 50016. 3.2.3 The special gas room in the production plant should be divided into flammable gas room, toxic (corrosive) gas room, inert (oxidizing) gas room, highly toxic gas room, etc. according to the nature of the gas. 3.2.4 The independent special gas station shall be divided into different types of special gas rooms according to factors such as gas type and compatibility. 3.2.5 Bulk silane system gas equipment should be arranged in an independent open building, not in the basement. Open buildings should be covered with a roof, and the shielding part of the outer wall should not exceed three sides, and a space for natural ventilation should be provided between walls and between walls and roof structures. When the minimum distance between the silane container and the surrounding obstacles is less than twice the height of the obstacles, the bulk silane system should be provided with mechanical ventilation. 3.2.6 When the distance between bulk containers and between the container and the process gas pan in the silane station is less than 9m, a fireproof partition of more than 2h should be installed. 3.2.7 The silane cylinders in the silane gas cylinder cabinet should be fixed on the steel frame, and the two cylinders should be separated by steel plates, and the thickness of the steel plates should be greater than or equal to 6mm. 3.2.8 Non-bulk silane system gas equipment can be placed indoors, not in the basement. 3.2.9 Bulk silane stations arranged in open buildings should be equipped with rain and sun protection measures in the equipment area. 3.3 Arrangement of special gas equipment 3.3.1 Gas cylinder racks for incompatible special gases should be arranged in different rooms; when they are arranged in the same room, the distance between gas cylinder racks should be greater than 6m. 3.3.2 Equipment with both flammable and toxic gases should be placed in the flammable gas room. 3.3.3 The gas cylinder cabinets, gas cylinder racks, exhaust gas treatment devices, gas cylinder containers and other equipment in the special gas room should be arranged close to the wall, and gas equipment with the same or similar properties should be arranged together. 3.3.4 The width of the intermediate channel between special gas rooms shall not be less than 2m, and the layout of special gas equipment shall reserve enough space for equipment transportation, maintenance and operation, and safe escape. 3.3.5 Liquefied special gas equipment and systems should be equipped with heating devices according to their gas characteristics. 3.3.6 The liquefied special gas equipment should be equipped with different types of weighing devices. 3.3.7 The highly toxic special gas supply room shall be equipped with special containers or plugging tools, exhaust devices and exhaust treatment devices for highly toxic special gases under accident conditions. 3.3.8 The highly toxic special gas supply room should be equipped with double-lock safety doors, anti-theft windows and technical precautionary facilities to prevent personnel from intruding. 3.3.9 When the special gas production reserves in the special gas station building reach the number of major hazard sources, the design shall comply with the relevant provisions of the current national standard "Identification of Major Hazard Sources of Hazardous Chemicals" GB 18218. 3.3.10 The design of the electrical control room of the special gas system shall meet the following requirements. 1 The electrical control room shall be arranged in the control room adjacent to the special gas room; 2 The electrical control room shall be separated from the special gas by a partition wall with a fire resistance rating of not less than 3.0h and a floor slab with a fire resistance rating of not less than 1.50h, and the pores of pipes passing through the partition wall shall be filled with fireproof materials. 4Specialty gas process system 4.1 General provisions 4.1.1 The special gas process system shall be equipped with the following main devices. 1 Gas cylinder cabinets, gas cylinder racks, containers, horizontal gas cylinders, and long-tube trailers for storage and gas supply; 2 Valve box and valve disc for gas distribution; 3 Auxiliary nitrogen purging system; 4 Exhaust gas treatment device. 4.1.2 The design of the special gas process system shall meet the requirements of the electronic product production process on special gas process parameters, pollution control and use safety. 4.1.3 The exhaust pipes of incompatible special gases shall not be connected to the same exhaust system. 4.1.4 The exhaust ducts of incompatible special gases shall not be connected to the same exhaust system. 4.2 Special gas delivery system 4.2.1 The arrangement of gas cylinder cabinets and gas cylinder racks for special gas systems shall meet the following requirements. 1.The gas cylinder cabinet and the gas cylinder rack can be configured in various configurations such as single-process gas cylinder external purge gas source, double-process gas cylinder external purge gas source, double-process gas cylinder built-in purge gas source, etc.; 2 Incompatible gas cylinders should not be placed in the same gas cylinder cabinet or gas cylinder rack; 3 Gas cylinder cabinets and gas cylinder racks shall be provided with gas panels for operation; 4 The supply capacity of the system is to be verified by thermodynamic and hydrodynamic calculations; 5.When the gas cylinder cabinet is closed, the negative pressure shall not be lower than 100Pa, and the number of exhaust ventilation in the cabinet shall not be lower than 300 times/h; 6 For spontaneous combustion, flammability, toxicity, and corrosive gas cylinder cabinets, fixed gas leakage detectors shall be installed at the exhaust outlet; 7 The thickness of the steel plate of the gas cylinder cabinet should not be less than 2.5mm, and it should have an anti-corrosion coating; 8.The door of the gas cylinder cabinet shall have an automatic closing function and shall be equipped with an explosion-proof glass observation window; the design of the fixing bolts of the gas cylinder cabinet shall meet the requirements of the local earthquake fortification intensity; 9 Gas cylinder cabinets and gas cylinder racks should be provided with clear and definite safety signs; 10 When the gas cylinder cabinet is placed in an explosive and fire-hazardous environment, its design should comply with the relevant provisions of the current national standard (Code for Design of Electrical Equipment in Explosive Hazardous Environments) GB 50058. 4.2.2 The gas panel setting of gas cylinder cabinets and gas cylinder racks for special gases shall meet the following requirements. 1 Emergency shut-off valves shall be installed on panels for spontaneous combustion, flammability, toxicity and corrosive gases, and shall be normally closed pneumatic valves, which shall be located close to the gas cylinders; 2 Over-current switches shall be installed on the panel of spontaneous combustion, flammability, toxicity and corrosive gas whose cylinder pressure is greater than 0.1MPa; 3 Spontaneous, flammable, toxic and corrosive gas panels should be equipped with inert gas purge and auxiliary vacuum devices, and vacuum pipelines should be equipped with check valves; 4 The gas panel shall be provided with a process gas exhaust port. 4.2.3 Gas cylinder cabinets for flammable and pyrophoric special gases shall meet the following requirements. 1 When the silane gas cylinder uses a flow restriction hole with a diameter of 0.25mm, the number of exhaust ventilation of the gas cylinder cabinet shall not be less than 1200 times/h; Not less than 400 times/h, and the negative pressure of the gas cylinder cabinet should be continuously monitored; 2 The gas cylinder cabinets for incandescent special gases should be equipped with ultraviolet and infrared flame detectors; 3 The gas cylinder cabinet for flammable special gases shall be equipped with water spraying system; 4 Gas cylinder cabinets for pyrophoric special gases shall be provided with insulating st......Tips & Frequently Asked Questions:Question 1: How long will the true-PDF of GB 50646-2020_English be delivered?Answer: Upon your order, we will start to translate GB 50646-2020_English as soon as possible, and keep you informed of the progress. 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