PDF GB/T 13979-2008 English (GB/T 13979-1992: Older version)
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Mass spectrometer leak detector
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| GB/T 13979-1992 | English | 319 |
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Helium mass spectrometer leak detector
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GB/T 13979-2008: PDF in English (GBT 13979-2008) GB/T 13979-2008
GB
NATIONAL STANDARD OF THE
PEOPLE’S REPUBLIC OF CHINA
ICS 71.040.10
N 60
Replacing GB/T 13979-1992
Mass spectrometer leak detector
ISSUED ON: JULY 28, 2008
IMPLEMENTED ON: FEBRUARY 01, 2009
Issued by: General Administration of Quality Supervision, Inspection and
Quarantine;
Standardization Administration of the People's Republic of
China.
Table of Contents
Foreword ... 3
1 Scope ... 4
2 Normative references ... 4
3 Requirements ... 4
4 Test methods ... 7
5 Inspection rules ... 11
6 Marks, packaging, transportation, storage ... 13
7 Quality assurance ... 15
Mass spectrometer leak detector
1 Scope
This Standard specifies the requirements, test methods, inspection rules, marks,
packaging, transportation, storage, quality assurance for mass spectrometer
leak detector (hereinafter referred to as the leak detector).
This Standard applies to leak detector that uses mass spectrometry as a
detection method.
2 Normative references
The provisions in following documents become the provisions of this Standard
through reference in this Standard. For dated references, the subsequent
amendments (excluding corrigendum) or revisions do not apply to this Standard,
however, parties who reach an agreement based on this Standard are
encouraged to study if the latest versions of these documents are applicable.
For undated references, the latest edition of the referenced document applies.
GB/T 191-2008, Packaging and storage marks (ISO 780:1997, MOD)
GB/T 2829-2002, Sampling procedures and tables for periodic inspection by
attributes (Apply to inspection of process stability)
GB 4793.1-2007, Safety requirements for electrical equipment for
measurement, control, and laboratory use - Part 1: General requirements
(IEC 61010-1:2001, IDT)
GB/T 11606-2007, Methods of environmental test for analytical instruments
GB/T 15464-1995, General-purpose specification for the packaging of
instrumentation products
3 Requirements
3.1 Normal working conditions
The working conditions of the leak detector shall meet:
a) Temperature: 5°C~35°C;
3.6 Leak rate audio alarm function of leak detector
The leak detector shall have an audio alarm function for the leak rate of the
tested workpiece.
3.7 Leak detector test port pressure measurement and control circuit
For leak detectors with rough pumps, there shall be a pressure indicating
instrument at the leak detection port. The error of the pressure indicating
instrument shall conform to the manufacturer's standard. And it shall have the
function of automatically (or manual) switching from rough extraction to leak
detection within the pressure range specified by the manufacturer.
3.8 Filament protection circuit of mass spectrometer chamber of leak
detector
The high vacuum pumping system connected to the mass spectrometer
chamber in the leak detector shall have a pressure indicating instrument and a
filament protection circuit for the mass spectrometer chamber. The parameter
range shall meet the manufacturer's regulations.
3.9 Time to reach the optimal working pressure of the leak detector
3.9.1 The time when the pressure of the leak detector using the oil diffusion
pump reaches the best working pressure specified by the manufacturer after
the high vacuum system is turned on:
a) The leak detector with liquid nitrogen shall not be longer than 0.5h;
b) The leak detector without liquid nitrogen shall not be longer than 2h.
3.9.2 For leak detectors using molecular pumps, the time for the high vacuum
system to reach the optimal working pressure specified by the manufacturer
shall not exceed 10min after the high vacuum system is turned on.
3.10 Minimum detectable leak rate of leak detector
Under the condition of full pumping speed with the conventional leak detector,
the minimum detectable leak rate of the leak detector shall not be greater than
2×10-11Pa·m3·s-1 (to air). For leak detectors using the reverse diffusion leak
detection method, the minimum detectable leak rate of the leak detector shall
not be greater than 2×10-10Pa·m3·s-1 (to air).
3.11 Influence of power supply voltage change on minimum detectable
leak rate of leak detector
When the power supply voltage changes by ±10% from the rated value, the
minimum detectable leak rate of the leak detector shall still reach the
requirements in 3.10.
3.12 Time constant of leak detector
The clearing time or response time of the leak detector shall be no more than
3s.
3.13 Own leakage of leak detector
The high vacuum system of the leak detector shall not have leaks that can be
detected by spraying helium by itself.
3.14 Complete set of leak detector
According to the manufacturer's regulations.
3.15 Leak detector transportation, transportation and storage conditions
In the state of transport and packaging, the leak detector is tested in accordance
with the items of the alternating damp heat test, low temperature storage test,
high temperature storage test and drop test of GB/T 11606-20072.4, of which
the high temperature is 55°C, the low temperature is -40°C; alternating heat
and humidity: relative humidity is 95%, temperature is 40°C; inclined drop
height is 250mm. After the test is completed, the leak detector is placed under
normal working conditions for inspection, and it shall be able to work normally.
4 Test methods
4.1 Test conditions
This test method shall be carried out under the conditions specified in 3.1.
4.2 Appearance
Use visual inspection and hand-touching to inspect.
4.3 Safety test
4.3.1 Insulation resistance
Equipment: 500V insulation resistance meter.
The power plug of the instrument is not connected to the grid. The power switch
is in the on position. Use an insulation resistance meter to apply a 500V DC
test voltage between the power plug phase, the middle link and the ground wire.
Measure the insulation resistance after 5s of stability.
4.3.2 Insulation strength
accordance with the function of automatic (or manual) switching from rough
extraction to leak detection within the pressure range specified by the
manufacturer. For example, set the switching point to 10Pa. When the test port
is roughly drawn to 10Pa, the leak detection valve shall automatically open.
4.8 Filament protection function of mass spectrometer chamber of leak
detector
Adjust the throttle valve or pumping speed valve of the leak detector (or install
a needle valve at the test port), so as to change the pressure in the mass
spectrometer chamber. Check the function of the filament protection circuit.
4.9 Time test to reach optimal working pressure
The leak detector has been pumped to the best working pressure before the
test. Then stop for more than 8h, but not more than 24h. The system is kept at
low pressure.
After the leak detector is turned on, write down the time and run it according to
the normal operating procedure. Measure the time when the pressure of the
height vacuum system reaches the value specified by the manufacturer.
4.10 Minimum detectable leak rate
Install the calibrated leak on the test port of the leak detector. Connect the leak
detector to the power supply via the voltage regulator. Use an appropriate
voltmeter to monitor one phase of the power supply connected to the mass
spectrometer room. Adjust the power supply voltage to 220V. When the mass
spectrometer chamber of the leak detector is at the best working pressure
specified by the manufacturer, adjust the zero position. Adjust it to helium peak.
Connect a recording device to the output terminal of the display system.
a) Measure signal:
Open the calibrated leak valve. Read the signal value U's at this time after
3min. Close the leak valve. Read the background value U'o after 1min. Then
the signal value Us generated by the leak is: .
NOTE: Select the calibration leak so that the Us value is not less than 50 times the
minimum detectable signal.
b) Measure noise:
After closing the leak valve for 3min, use the recording device to record
the noise curve of the whole machine for 20min. Then divide into 20
segments according to time. Make its approximate straight line. Determine
the maximum absolute deviation of the curve relative to the approximate
......
Source: Above contents are excerpted from the PDF -- translated/reviewed by: www.chinesestandard.net / Wayne Zheng et al.
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