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GB/T 42896-2023 English PDF

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US$269.00 · In stock
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GB/T 42896-2023: Micro-electromechanical systems(MEMS) technology - Impact test method for nanostructures of silicon based MEMS
Status: Valid

Standard ID	USD	BUY PDF	Lead-Days	Standard Title (Description)	Status
GB/T 42896-2023	269	Add to Cart	3 days	Micro-electromechanical systems(MEMS) technology - Impact test method for nanostructures of silicon based MEMS	Valid

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Basic data

Standard ID: GB/T 42896-2023 (GB/T42896-2023)
Description (Translated English): Micro-electromechanical systems(MEMS) technology - Impact test method for nanostructures of silicon based MEMS
Sector / Industry: National Standard (Recommended)
Classification of Chinese Standard: L59
Classification of International Standard: 31.200
Word Count Estimation: 14,167
Date of Issue: 2023-08-06
Date of Implementation: 2023-12-01
Issuing agency(ies): State Administration for Market Regulation, China National Standardization Administration

GB/T 42896-2023: Micro-electromechanical systems(MEMS) technology - Impact test method for nanostructures of silicon based MEMS

---This is a DRAFT version for illustration, not a final translation. Full copy of true-PDF in English version (including equations, symbols, images, flow-chart, tables, and figures etc.) will be manually/carefully translated upon your order.
ICS 31.200 CCSL59 National Standards of People's Republic of China Microelectromechanical Systems (MEMS) Technology Impact test method for silicon-based MEMS nanoscale structures Published on 2023-08-06 Implemented on 2023-12-01 State Administration for Market Regulation Released by the National Standardization Administration Committee

Preface III 1 Scope 1 2 Normative reference documents 1 3 Terms and Definitions 1 4 Requirements 2 5 Test method 4 Appendix A (informative) Recommended dimensions for in-situ on-chip impact testing machine 6 Appendix B (informative) In-situ on-chip thermally driven nanoscale structural impact testing machine test example 7

Foreword

This document complies with the provisions of GB/T 1.1-2020 "Standardization Work Guidelines Part 1.Structure and Drafting Rules of Standardization Documents" Drafting. Please note that some content in this document may be subject to patents. The publisher of this document assumes no responsibility for identifying patents. This document is proposed and coordinated by the National Microelectromechanical Technology Standardization Technical Committee (SAC/TC336). This document was drafted by. Peking University, China Machinery Productivity Promotion Center Co., Ltd., China Electronics Technology Standardization Institute, Beijing Yandong Microelectronics Technology Co., Ltd., Ningbo Xinjian Semiconductor Co., Ltd., Shenzhen Meisi Advanced Electronics Co., Ltd., Shanghai Lingang New Area Cross-border Data Technology Co., Ltd., Guangzhou Aosong Electronics Co., Ltd. The main drafters of this document. Zhang Dacheng, Yang Fang, Li Genzi, Gu Feng, Liu Peng, Wang Xufeng, Li Fengyang, Gao Chengwu, Yu Zhiheng, Chen Yi, Hua Xuanqing, Liu Ruobing, Zhang Yanxiu, Luo Shuming, Wu Bin, Zhang Qixin, Zhang Bin. Microelectromechanical Systems (MEMS) Technology Impact test method for silicon-based MEMS nanoscale structures

1 Scope

This document describes the requirements and tests for impact testing along the thickness direction of nanoscale membrane structures involved in silicon-based MEMS manufacturing technology. method. This document is suitable for testing the impact resistance of nanoscale structures manufactured using microelectronics technology under an impact load.

2 Normative reference documents

The contents of the following documents constitute essential provisions of this document through normative references in the text. Among them, the dated quotations For undated referenced documents, only the version corresponding to that date applies to this document; for undated referenced documents, the latest version (including all amendments) applies to this document. GB/T 2900.28 Electrician terminology power tools GB/T 26111 Microelectromechanical systems (MEMS) technical terminology GB/T 36416.1 Testing machine vocabulary Part 1.Material testing machines

3 Terms and definitions

The following terms and definitions as defined in GB/T 2900.28, GB/T 26111 and GB/T 36416.1 apply to this document. 3.1 silicon processing technology siliconprocess Silicon micromachining technology. Note. Although silicon processes are generally divided into surface micromachining and bulk silicon micromachining, many of the technologies are the same. [Source. GB/T 26111-2010,3.5.2] 3.2 in-situ on-chip impact testing machineinsituon-chipimpacttester It consists of a test structure and a test device, which are integrated on the same wafer and processed using the same process flow for evaluation. Testing machine for impact resistance of process-related micro-nano structures. 3.3 testing structure testing structure Micro-nano structures (e.g., cantilever beams or fixed beams) specially made for measuring material properties or microstructure properties. Note. This document refers to double-ended fixed beams. [Source. GB/T 26111-2010, 3.7.19, modified] 3.4 testing device testingdevice A microstructure that transmits force or displacement to the test structure and allows the force or displacement to be read out. ......

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Tips & Frequently Asked Questions:

Question 1: How long will the true-PDF of GB/T 42896-2023_English be delivered?

Answer: Upon your order, we will start to translate GB/T 42896-2023_English as soon as possible, and keep you informed of the progress. The lead time is typically 1 ~ 3 working days. The lengthier the document the longer the lead time.

Question 2: Can I share the purchased PDF of GB/T 42896-2023_English with my colleagues?

Answer: Yes. The purchased PDF of GB/T 42896-2023_English will be deemed to be sold to your employer/organization who actually pays for it, including your colleagues and your employer's intranet.

Question 3: Does the price include tax/VAT?

Answer: Yes. Our tax invoice, downloaded/delivered in 9 seconds, includes all tax/VAT and complies with 100+ countries' tax regulations (tax exempted in 100+ countries) -- See Avoidance of Double Taxation Agreements (DTAs): List of DTAs signed between Singapore and 100+ countries

Question 4: Do you accept my currency other than USD?

Answer: Yes. If you need your currency to be printed on the invoice, please write an email to Sales@ChineseStandard.net. In 2 working-hours, we will create a special link for you to pay in any currencies. Otherwise, follow the normal steps: Add to Cart -- Checkout -- Select your currency to pay.