GB/T 36653-2018 English PDF

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GB/T 36653-2018: Electronic grade trimethylaluminium
Status: Valid

Standard ID	USD	BUY PDF	Lead-Days	Standard Title (Description)	Status
GB/T 36653-2018	199	Add to Cart	3 days	Electronic grade trimethylaluminium	Valid

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Basic data

Standard ID: GB/T 36653-2018 (GB/T36653-2018)
Description (Translated English): Electronic grade trimethylaluminium
Sector / Industry: National Standard (Recommended)
Classification of Chinese Standard: G86
Classification of International Standard: 71.100.20
Word Count Estimation: 10,173
Date of Issue: 2018-09-17
Date of Implementation: 2019-01-01
Issuing agency(ies): State Administration for Market Regulation, China National Standardization Administration

GB/T 36653-2018: Electronic grade trimethylaluminium

---This is a DRAFT version for illustration, not a final translation. Full copy of true-PDF in English version (including equations, symbols, images, flow-chart, tables, and figures etc.) will be manually/carefully translated upon your order.
Electronic grade trimethylaluminium ICS 71.100.20 G86 National Standards of People's Republic of China Electronic grade trimethyl aluminum Published on.2018-09-17 2019-01-01 implementation State market supervision and administration China National Standardization Administration issued

Foreword

This standard was drafted in accordance with the rules given in GB/T 1.1-2009. This standard is proposed and managed by the National Semiconductor Equipment and Materials Standardization Technical Committee (SAC/TC203). This standard was drafted. Jiangsu Nanda Optoelectronic Materials Co., Ltd., China Electronics Technology Standardization Institute. The main drafters of this standard. Chen Huabing, Sun Mingxi, Wang Xiang, Cao Kewei. Electronic grade trimethyl aluminum

1 Scope

This standard specifies the technical requirements, test methods, inspection rules, packaging, marking, transportation, storage and safety of trimethylaluminum. This standard is applicable to trimethylaluminum prepared by three chemical synthesis methods, such as alkyl exchange method and sodium reduction method, and purified. The main product Used to grow compound semiconductor thin film materials and the like. Molecular formula. C3H9Al Relative molecular mass. 72.09 (according to the international relative atomic mass in.2013)

2 Normative references

The following documents are indispensable for the application of this document. For dated references, only dated versions apply to this article. Pieces. For undated references, the latest edition (including all amendments) applies to this document. GB 190 dangerous goods packaging mark GB/T 3723 General rules for sampling safety of industrial chemical products GB/T 6680 Liquid Chemical Product Sampling General GB/T 11446.1 electronic grade water GB 12463 General technical conditions for the transport of dangerous goods GB 15258 Chemical Safety Labeling Regulations GB 15603 General rules for the storage of common chemical dangerous goods GB 50073 clean factory design specification

3 Technical requirements

The technical indicators of trimethylaluminum should meet the requirements of Table 1. Table 1 Technical indicators Project indicator Trimethylaluminum (C3H9Al) purity (mass fraction)/10-2 ≥ 99.99995 metal element And other yuan Prime content Silver (Ag) content/(μg/g) < 0.2 Boron (B) content/(μg/g) < 0.5 Barium (Ba) content/(μg/g) < 0.1 铍 (Be) content/(μg/g) < 0.03 Calcium (Ca) content/(μg/g) < 0.03 Cadmium (Cd) content/(μg/g) < 0.1 Cobalt (Co) content/(μg/g) < 0.1 Chromium (Cr) content/(μg/g) < 0.1 ......

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