GB/T 34899-2017 English PDFUS$299.00 · In stock
Delivery: <= 3 days. True-PDF full-copy in English will be manually translated and delivered via email. GB/T 34899-2017: Micro-electromechanical system technology -- Measuring method of microstructure surface stress based on Raman spectroscopy Status: Valid
Basic dataStandard ID: GB/T 34899-2017 (GB/T34899-2017)Description (Translated English): Micro-electromechanical system technology -- Measuring method of microstructure surface stress based on Raman spectroscopy Sector / Industry: National Standard (Recommended) Classification of Chinese Standard: L55 Classification of International Standard: 31.200 Word Count Estimation: 15,150 Date of Issue: 2017-11-01 Date of Implementation: 2018-05-01 Regulation (derived from): National Standard Announcement 2017 No. 29 Issuing agency(ies): General Administration of Quality Supervision, Inspection and Quarantine of the People's Republic of China, Standardization Administration of the People's Republic of China GB/T 34899-2017: Micro-electromechanical system technology -- Measuring method of microstructure surface stress based on Raman spectroscopy---This is a DRAFT version for illustration, not a final translation. Full copy of true-PDF in English version (including equations, symbols, images, flow-chart, tables, and figures etc.) will be manually/carefully translated upon your order. Micro-electromechanical system technology-Measuring method of microstructure surface stress based on Raman spectroscopy ICS 31.200 L55 National Standards of People's Republic of China Microelectromechanical system (MEMS) technology Microstructure based on Raman spectroscopy Surface stress test method Posted.2017-11-01 2018-05-01 implementation General Administration of Quality Supervision, Inspection and Quarantine of People's Republic of China China National Standardization Administration released Directory Preface Ⅰ 1 Scope 1 2 Normative references 1 3 Terms and definitions 1 4 stress test principle 1 5 test conditions 2 5.1 General 2 5.2 Sample Requirements 2 5.3 Calibration Requirements 2 5.4 Environmental conditions 2 5.5 Test System 2 6 test procedures 4 6.1 Calibration Raman spectrometer 4 6.2 Test System Error 4 6.3 Select the test area 4 6.4 Test Procedure 4 6.5 Test Records 6 6.6 Determination of Raman shift 6 6.7 Stress Calculation 6 Appendix A (Informative) Cubic stress and Raman shift between the conversion relationship 7 Appendix B (informative) relative dynamic stress test system example 8 Appendix C (informative) Microstructure surface stress Raman spectroscopy test Example 10 ForewordThis standard was drafted in accordance with the rules given in GB/T 1.1-2009. This standard by the National Microelectromechanical Technology Standardization Technical Committee (SAC/TC336) and focal point. The main drafting units of this standard. North Central University, China Machine Productivity Promotion Center. The main drafters of this standard. Shi Yunbo, Tang Jun, Cheng Hongbing, Cui Jiangong, Li Haibin, Zhu Yue. Microelectromechanical system (MEMS) technology Microstructure based on Raman spectroscopy Surface stress test method1 ScopeThis standard specifies the Raman spectroscopy to determine the surface residual stress, relative static stress, relative dynamics Method of stress. This standard applies to micro-electromechanical systems (MEMS) structure surface residual stress, relative static stress, relative dynamic stress Raman spectrum Law test.2 Normative referencesThe following documents for the application of this document is essential. For dated references, only the dated version applies to this article Pieces. For undated references, the latest edition (including all amendments) applies to this document. GB/T 2421.1 Electrical and Electronic Products Environmental Testing Overview and Guidelines GB/T 25915.1 cleanroom and related controlled environment Part 1. air cleanliness level GB/T 26111 Microelectromechanical System (MEMS) technology terminology JJF1544-2015 Raman spectrometer calibration specifications Measurement characteristics and calibration requirements3 Terms and definitionsGB/T 26111 and JJF1544-2015 defined and the following terms and definitions apply to this document. 3.1 Wavenumber wavenumber The reciprocal of the wavelength, which is the number of wavelengths contained per centimeter. Note. The unit is per centimeter (cm-1).4 stress test principleRaman spectroscopy stress test is based on the Raman scattering Raman shift to calculate the surface stress of the material method. Under the action of stress, the crystal lattice will deform, which will scatter the incident light and lead to the Raman frequency shift. according to The size of the Raman shift can calculate the stress value. The relationship between the structural surface stress and the Raman shift is linear, as shown in Eq. (1). σ = Δω (1) In the formula. σ --- surface stress, in megapascals (MPa); α --- stress factor in units of megapascals per centimeter (cm-1 · MPa-1); Δω --- Raman frequency shift, in units of centimeters (cm-1). See Appendix A for the conversion relationship between cubic stress and Raman shift. ......Tips & Frequently Asked Questions:Question 1: How long will the true-PDF of GB/T 34899-2017_English be delivered?Answer: Upon your order, we will start to translate GB/T 34899-2017_English as soon as possible, and keep you informed of the progress. The lead time is typically 1 ~ 3 working days. 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