GB/T 26533-2011 English PDF

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GB/T 26533-2011: General rules for Auger electron spectroscopic analysis
Status: Valid

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GB/T 26533-2011	299	Add to Cart	3 days	General rules for Auger electron spectroscopic analysis	Valid

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Basic data

Standard ID: GB/T 26533-2011 (GB/T26533-2011)
Description (Translated English): General rules for Auger electron spectroscopic analysis
Sector / Industry: National Standard (Recommended)
Classification of Chinese Standard: N33
Classification of International Standard: 37.020; 17.180
Word Count Estimation: 13,173
Date of Issue: 2011-05-12
Date of Implementation: 2011-12-01
Quoted Standard: GB/T 22461-2008; ISO/TR 15969-2001; ISO 18116-2005; ISO 18118-2002 (E); ISO/TR 18394-2006; ISO/TR 19319-2003; ASTM E1078-2002; ASTM E1829-2002
Regulation (derived from): Announcement of Newly Approved National Standards No. 6 of 2011
Issuing agency(ies): General Administration of Quality Supervision, Inspection and Quarantine of the People's Republic of China, Standardization Administration of the People's Republic of China
Summary: This standard provides an electron beam as the excitation source Auger electron spectroscopy (AES, Auger Electron Spectroscopy) the general surface analysis methods. This standard applies to the Auger electron spectrometer.

GB/T 26533-2011: General rules for Auger electron spectroscopic analysis

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General rules for Auger electron spectroscopic analysis ICS 37.020; 17.180 N33 National Standards of People's Republic of China Auger electron spectroscopy analysis General Issued on. 2011-05-12 2011-12-01 implementation Administration of Quality Supervision, Inspection and Quarantine of People's Republic of China Standardization Administration of China released

Table of Contents

Introduction Ⅲ 1 Scope 1 2 Normative references 1 3 Terms and definitions 4 principle of the method 1 5 Apparatus 2 5.1 Instrument consisting of 2 5.2 Instrument Performance 3 6 Sample 3 7 Procedure 4 7.1 energy scale calibration 4 7.2 AES Qualitative Analysis and Procedure 6 7.3 Auger electron spectroscopy quantitative analysis 6 7.4 depth analysis 7 7.5 elemental chemical state analysis of 7 8 7 expression analysis 8.1 Auger full spectrum 7 Narrow spectrum 7 8.2 8.3 spectral line scan 7 8.4 depth analysis Spectrum 7 More than 8.5 point microscopic comparison 8 8.6 sample surface element distribution (Augermap) 8 8.7 Analysis of the results presentation of 8 Figure 1 KL1L3 Auger transitions 2 Figure 2 Auger electron spectroscopy diagram 2 Figure 3 Cu, Au and Al three direct reference spectrum and differential spectrum substance (relative energy resolution of 0.3%) 5 Table 1 reference material Auger electron kinetic energy reference value 4

Foreword

This standard was drafted in accordance with GB/T 1.1-2009 given rules. The standard micro-beam analysis by the National Standardization Technical Committee (SAC/TC38) and focal points. This standard was drafted. Department of Chemistry, Tsinghua University. The main drafters of this standard. Yao Wenqing, Li Zhanping, Cao Lili, Zhu law. Auger electron spectroscopy analysis General

1 Scope

This standard specifies the electron beam excitation source Auger electron spectroscopy (AES, AugerElectronSpectroscopy) general surface Analytical method. This standard applies to Auger electron spectroscopy.

2 Normative references

The following documents for the application of this document is essential. For dated references, only the dated version suitable for use herein Member. For undated references, the latest edition (including any amendments) applies to this document. GB/T 22461-2008 Surface chemical analysis - Vocabulary ISO /T R15969.2001 Surface chemical analysis to measure the depth analysis sputter depth (SurfaceChemicalAnalysis- DepthProfiling-MeasurementofSputteredDepth) ISO 18116.2005 Surface chemical analysis and preparation method of fixing guide surface analysis of the sample (SurfaceChemicalAnal- ysis-GuidelinesforPreparationandMountingofSpecimensforAnalysis) ISO 18118.2002 (E) Surface chemical analysis AES and XPS quantitative analysis of homogeneous materials used in experiments because of the relative sensitivity Son Guide (SurfaceChemicalAnalysis-AESandXPS-GuidetouseofExperimentalRelativeSensi- tivityFactorsfortheQuantitativeAnalysisofHomogeneousMaterials) ISO /T R18394.2006 Surface chemical analysis - Auger electron spectroscopy for chemical sources of information (SurfaceChemical Analysis-AugerElectronSpectrometers-DerivationofChemicalInformation) ISO /T R19319.2003 Surface chemical analysis - Auger electron spectroscopy and X-ray photoelectron spectroscopy analysis by the lateral resolution Measured rate, the scope of analysis and sample observation range (SurfaceChemicalAnalysis-AugerEletronSpectroscopyandX- rayPhotoelectronSpectroscopy-DeterminationofLateralResolution, AnalysisArea, andSample AreaViewedbytheAnalyser) ASTME1078-2002 surface analysis of sample preparation and sample loading Standard Guide (StandsardGuideforSpecimenPrepa- rationandMountinginSurfaceAnalysis) ASTME1829-2002 surface analysis sample preparation Standard Guide (StandsardGuideforHandlingSpecimens PriortoSurfaceAnalysis)

3 Terms and Definitions

Terms and definitions GB/T 22461-2008 defined apply to this document.

4 principle of the method

Atom by electron impact certain energy, inner electron ionization of atoms, such a vacancy occurs on the inner track atom, forming a Excited positive ions. Excited state ions in excited withdrawal process, the outer orbital electrons can jump to the space and releases energy, which can The amount they can excite the same track or the outer layer of the track ionization electrons, this electron is the Auger electron. General use WiXpYq table ......

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