GB 50472-2008 PDF English
US$425.00 · In stock · Download in 9 secondsGB 50472-2008: Code for design of electronic industry clean room Delivery: 9 seconds. True-PDF full-copy in English & invoice will be downloaded + auto-delivered via email. See step-by-step procedureStatus: Valid
| Standard ID | Contents [version] | USD | STEP2 | [PDF] delivery | Name of Chinese Standard | Status |
| GB 50472-2008 | English | 425 |
Add to Cart
|
0-9 seconds. Auto-delivery
|
Code for design of electronic industry clean room
| Valid |
Excerpted PDFs (Download full copy in 9 seconds upon purchase)PDF Preview: GB 50472-2008
GB 50472-2008: Code for design of electronic industry clean room---This is an excerpt. Full copy of true-PDF in English version (including equations, symbols, images, flow-chart, tables, and figures etc.), auto-downloaded/delivered in 9 seconds, can be purchased online: https://www.ChineseStandard.net/PDF.aspx/GB50472-2008
NATIONAL STANDARD OF THE
PEOPLE’S REPUBLIC OF CHINA
P GB 50472−2008
Code for Design of Electronic Industry Clean
Room
ISSUED ON: DECEMBER 15, 2008
IMPLEMENTED ON: JULY 1, 2009
Issued by: Ministry of Housing and Urban-Rural Construction of the People’s
Republic of China;
General Administration of Quality Supervision, Inspection and
Quarantine of the People’s Republic of China.
GB
NATIONAL STANDARD
OF PEOPLE’S REPUBLIC OF CHINA
Code for Design of Electronic Industry Clean Room
GB 50472－2008
Chief Development Department: Ministry of Industry and Information Technology of the People’s
Republic of China
Approval Department: Ministry of Housing and Urban-Rural Development of the People’s Republic
of China
Implementation Date: July 1, 2009
Beijing 2008
Table of Contents
1 General Provisions...1
2 Terms...2
3 Design Requirements for Production Environment of Electronic Products... 6
3.1 General Requirements...6
3.2 Design Requirements for Production Environment...6
4 Overall Design... 8
4.1 Site Selection and General Layout...8
4.2 Clean Room Type... 8
4.3 Layout and Integrative Coordination of Clean Rooms...9
5 Process Design... 11
5.1 General Requirements...11
5.2 Process Layout... 11
5.3 Cleaning Human Body...11
5.4 Material Cleaning... 13
5.5 Equipments and Working Instruments...13
6 Clean Architectural Design...15
6.1 General Requirements...15
6.2 Fire Prevention and Evacuation...15
6.3 Interior Decoration...17
7 Air Cleaning and Ventilation Design of Air Conditioner...19
7.1 General Requirements...19
7.2 Air Pattern and Air Output... 20
7.3 Cleaning Air Conditioning System...20
7.4 Air Cleaning Facilities... 21
7.5 Space Heating and Ventilating...23
7.6 Smoke Discharge... 24
7.7 Air Pipes and Accessories...24
8 Water Supply and Drainage Design...26
8.1 General Requirements...26
8.2 Water Supply...26
8.3 Drainage...26
8.4 Rainwater...27
8.5 Fire Water Supply and Fire Fighting Equipment...27
9 Pure Water Supply... 29
9.1 General Requirements...29
9.2 Pure Water System...29
9.3 Tubes and Pipes, Valves and Accessories... 30
10 Gas Supply...31
10.1 General Requirements...31
10.2 Bulk Gas System...32
10.3 Dry and Compressed Air System...33
10.4 Special Gas System...34
11 Chemical Supply...36
11.1 General Requirements...36
11.2 Chemical Storage and Transmission... 36
11.3 Tubes and Pipes and Valves... 37
12 Electrical Designs... 39
12.1 Power Distribution...39
12.2 Illumination...39
12.3 Communication and Safety Protection System...40
12.4 Automatic Control...42
12.5 Grounding... 43
13 Anti-static and Grounding Design... 44
13.1 General Requirements...44
13.2 Anti-static Measures...44
13.3 Anti-static Grounding...46
14 Noise Control...47
14.1 General Requirements...47
14.2 Noise Control Design...47
15 Mini-vibration Control...48
15.1 General Requirements... 48
15.2 Permissible Vibration Value...48
15.3 Mini-vibration Control Design... 48
Appendix A Requirements of Air Cleanliness Class of Electronic Product Production...50
Appendix B Classified Examples of Fire Risk in the Electronic Product Production Room/
Procedures...52
Appendix C Examples of Permissible Vibration Value of the Precision Instruments and Equipments
... 53
Appendix D Performance Test and Certification of Clean Room (Zone)... 54
Explanation of Wording in This Code... 61
11 General Provisions
1.0.1 This code was compiled to make the design of clean room design in electronic industry be
advanced in technology, economic, suitable, safe, reliable, resource saving, energy consumption less,
quality guaranteed and in accordance with the requirements of labor health and environmental
protection.
1.0.2 This code is applicable for the clean room design in construction, extension and innovation
electronic industry.
1.0.3 Electronic industry clean room design shall be in accordance with the production process for
electronic products requiring clean environment and shall obligate conditions for the product production
development or production process improvement in the future according to specific circumstances.
1.0.4 The electronic industry clean room design shall create necessary conditions for the construction
and installation, debugging detection, safe operation, operation and maintenance.
1.0.5 In addition to this code, electronic industry clean room design still shall comply with those
specified in the current relevant standards of the state.
42.0.23 Minienvironment
It refers to the isolated space which separates the product production process from the operating
staff and pollutants strictly.
2.0.24 Fan filter unit (FFU)
It refers to the device which is combined by the HEPA or ULPA and fans, constituting air
cleaning at the end air cleaning which may be self powered.
2.0.25 Cleanliness recovery characteristic
It refers to the time required for the cleaning air conditioning system from initial operation to
specify indoor cleanliness grade after the clean room is contaminated.
2.0.26 Technical mezzanine
It refers to the mezzanine separated with horizontal members, which is used for accessory
equipment, public power facilities and pipeline installations.
2.0.27 Technical tunnel
It refers to the corridor separated with vertical members, which is used for accessory equipment,
public power facilities and pipeline installations.
2.0.28 Technical shaft
It refers to the shaft-type corridor separated with vertical members, which is used for accessory
equipment, public power facilities and pipeline installations.
2.0.29 Fire-firing access
It refers to the exclusive entrance for the fire fighters to enter the building to extinguish a fire,
which is closed at original times and opened by the fire fighter s when applied.
2.0.30 Pure water
It refers to the water with little impurity content and the electrolyte impurity content (usually
represented with resistivity) and non-electrolyte impurity (such as fine particles, organic materials,
bacteria and dissolved gas and so on) content requires little water.
2.0.31 Bulk gas
It refers to the extensively used hydrogen gas, oxygen, nitrogen, argon gas, helium gas and other
gases.
2.0.32 Special gas
It refers to the silicohydrides, phosphine, diborane, arsine, silicon tetrachloride, chlorine and
other gases used during production process of electronic products. These gases are inflammable, toxic,
corrosive or suffocating.
2.0.33 Chemical
It refers to the acid, alkali, organic solvent and oxide compound used during production process
of electronic products.
84 Overall Design
4.1 Site Selection and General Layout
4.1.1 The clean room site shall be selected through technical economical comparison according to
the following requirements:
1 It shall be located in the zones with lower concentration of dust-contained and harmful gas or
chemical pollutant in the air and with preferable natural environment;
2 It shall be far away from the railroad, dock, airfield, main traffic lines as well as the workshop
radiating abundant dust and harmful gas or chemical pollutants, storage bunker, yard and other zones
with severe air pollution, vibration or noise interference strong-current magnetic field. When it fails to
stand off severe air pollution source, it shall be located at the lower wind side in the minimum
frequency all year around;
3 It shall be located at the section with clean environment, less pollutants, or without or with
little pedestrian flow or logistics.
4.1.2 The distance (adjacent edges)from the fresh air inlet of cleaning air conditioning system in
clean room to the main road of urban traffic should be greater than 50m. When urban green belt is set
between clean room and traffic main road, it may be properly reduced according to actual conditions,
however shall not be less than 25m.
4.1.3 The clean room site with mini-vibration control requirements shall be selected by measuring
the existent influence of vibration source and analogy vibration source and comparatively analyzing
the permissible vibration values.
4.1.4 The general layout of plant area shall be arranged according to the functional zones, such as
cleaning production, non- cleaning production, auxiliary production, public dynamical system and
office and living.
The clean room should be laid out according to the requirements of production process
characteristics of electronic products and all functional zones and the combined type large size
integral factory building.
4.1.5 The material with favorable performance and fewer fumes shall be adopted around the clean
room and the road surface.
4.1.6 It shall be landscaped around the clean room, however, the plants which may trigger influence
on the production environment and product quality should not be planted.
4.1.7 Circuit fire lane should be installed in clean room, if there is any difficulty, fire lanes may be
set at the long length side of factory building. The fire lane installation shall meet the relevant
requirements of the current national standard “Code of Design on Building Fire Protection and
Prevention” GB 50016.
4.2 Clean Room Type
4.2.1 The clean room, according to the production process characteristics of electronic products, air
11
5 Process Design
5.1 General Requirements
5.1.1 The process design, process layout of clean room shall obligate necessary conditions for the
alteration and enlargement of production of electronic products development and product production
process.
5.1.2 The clean room process design shall determine all the production conditions and under the
premise of meeting the production requirements of electronic products, good safety performance, less
construction investment, less energy expenditure and less operating cost as well as high production
efficiency shall be provided.
5.1.3 The clean room process design shall be installed with pedestrian flow path, material transportation
and warehouse facilities according to the product production process and air cleanliness class
requirements.
5.2 Process Layout
5.2.1 The process layout of clean room shall be determined according to the requirements of product
production process line, air pattern of clean room, installation and maintenance of process equipments
and material transportations.
When the production process equipment, operation procedures, personnel flowing path and
material transportation layout is carried out in unidirectional flow clean room, measures to avoid
interference in airflow and cross contamination shall be taken.
5.2.2 The process layout shall avoid mixture and crossing between pedestrian flow and material
circulation and should be installed with corresponding cleaning facilities at the respective entrances.
5.2.3 Under the premise of meeting the requirements of production process, mini-vibration control
and noise control, the clean room (zone) with strict air cleanliness should be laid out near the air
conditioner room and the procedures or workroom with same air cleanliness class should be laid out
in concentration.
5.2.4 It is required to make the procedure (equipment) with strict air cleanliness in the clean room
(zone) shall be far away from the entrance and exit and any site which may interfere the air flow and
should be laid out at the upper wind side; the process equipments which may generate pollutants
easily shall be laid out at the return air port or the lower wind side.
5.2.5 When process layout is carried out, the transport channel, installation port or manhole shall be
installed according to the transportation, installation, maintenance requirements for large scale
production process equipments.
5.2.6 When the clean rooms (zones) of different air cleanliness class are frequently connected in
clean room, measure to prevent pollution shall be taken.
5.3 Cleaning Human Body
5.3.1 The rooms for cleaning human body and facilities shall be installed according to the scale and
13
people. When the working personnel in the clean room (zone) are more than 5, the unidirection
by-pass door shall be installed at one side of airshower;
4 The entrance and exit of airshower shall not be opened at the same time and shall be adopted
with interlock control measures;
5 The clean room (zone) with vertical unidirectional flow in 5 class or higher in air cleanliness
class should be installed with clean room (zone).
5.3.6 The air cleanliness class of room for cleaning human body and for living should be cleaned
from the outside to the inside and pure air filtered in high efficiency shall be blown indoors.
The air cleanliness class in the dressing room of clean working garment should be lower than
that of the adjacent clean room (zone); when no washing chamber of clean working garment is
provided, the air cleanliness class for washing chamber should be class 8.
5.4 Material Cleaning
5.4.1 The exit and entrance of equipment and material in the clean room (zone) shall be independently
installed and the rooms for cleaning and corresponding facilities for material cleaning shall be
installed according to the characteristics, properties, shapes and others of equipment and material.
5.4.2 Air lock or passbox shall be installed between room for cleaning material and clean room
(zone).
5.5 Equipments andWorking Instruments
5.5.1 The clean room (zone) shall adopt the production facilities and auxiliary operating equipments
with dust and pollutant prevention and shall be in accordance with the following requirements:
1 The surface shall be smooth and clean, easy to clean without dust deposition and chemical
substances;
2 The drive components of equipments shall be provided with favorable sealing property and
shall be able to prevent lubricant, coolant and other leakages;
3 For the equipments with larger amount of fume and heat quantity during production or
discharging toxic and combustible gas, measures to prevent spreading shall be taken.
4 The metal enclosure of equipment shall be installed with grounding facilities.
5.5.2 When the equipments are installed at clean rooms (zones) in different air cleanliness class,
sealing and isolation measures should be taken.
5.5.3 The equipments in clean room (zone) should be selected with low noise products. When the
chosen equipments exceed the permissible value of noise in the clean room, isolation measures shall
be taken.
5.5.4 Facilities to carry out purifying treatment over the used working instruments during production
process of electronic products shall be arranged in clean room (zone).
5.5.5 The storage and transmission of all sorts of components and parts during the production
process of electronic products in the clean room (zone) should be adopted exclusive vessels. And the
15
6 Clean Architectural Design
6.1 General Requirements
6.1.1 The architectural plane and spatial layout of clean room shall be determined according to the
electronic product development and production process alteration and production scale enlargement
requirements.
6.1.2 The major structure of clean room should be adopted with large-space and wide span column
grid and shall not be adopted with supporting system of inner wall.
6.1.3 The vertical plane design of clean room shall be simple, tidy, bright and comfortable and shall
adapt the layout requirements of clean room (zone). The material lectotype of enclosing construction
of clean room shall meet the requirements of thermal insulation, fire prevention, moisture protection,
less fume and easy cleaning.
6.1.4 The major structure durability of clean room shall be coordinated with the production line
equipments, production environment and controlling devices of electronic products and shall be
provided with fire prevention, temperature deformation control and uneven settlement performance.
The deformation joints of factory building shall not cross the clean zone.
6.1.5 The architectural plane, spatial layout and structure of the clean room installed with upper and
lower technical mezzanines shall meet the requirements of product production process, automation
transportation and installation and maintenance of public power facilities.
6.1.6 For the clean room installed with technical mezzanine and technical tunnel, the architectural
design of technical mezzanine and technical tunnel shall meet the requirements of all sorts of air pipes
and power pipes installation and maintenance. When the vertical pipeline crossing the story is
required to be laid in hidden form, technical shaft should be installed. And the form, dimension and
structure for technical shafts shall meet the requirements of installation, overhaul and fire protection
of air pipe and pipeline.
6.1.7 For the integrated factory building acted as both production area and clean room (zone), the
plan layout and structure treatment of factory building should avoid the adverse impact on clean
production environment triggered by the pedestrian flow, material circulation transportation and fire
prevention.
6.1.8 The passage width in the clean room shall meet the requirements of personnel operation,
material transportation, equipment installation and overhaul.
6.2 Fire Prevention and Evacuation
6.2.1 The fire resistance grade of clean room shall not be less than grade II.
6.2.2 The fire hazard in production workshop of clean room shall be in accordance with the relevant
requirements of the current national standard “Code of Design on Building Fire Protection and
Prevention” GB 50016. See Appendix B of this code for the examples of fire hazard classification.
6.2.3 The fire compartment division in clean room shall meet the relevant requirements of the
current national standard “Code of Design on Building Fire Protection and Prevention” GB 50016.
17
6.2.9 The room with explosion hazard included in the clean room shall be close to the building
external wall and shall not be adjacent to the evacuation safety exit (between staircases). The
explosion prevention measure and explosion relief areas in the room with explosion hazard shall
meet the relevant requirements of the current national standard “Code of Design on Building
Fire Protection and Prevention” GB 50016.
6.3 Interior Decoration
6.3.1 The building and building enclosure and interior decoration of clean room shall be
adopted with material with favorable air-tightness and little deformation when temperature and
humidity are changed. The decoration materials and sealing materials of clean room neither
shall nor release the materials which may influence the electronic product quality. The burning
behavior of decoration materials shall meet the relevant requirements of the current national
standard “Code for Fire Prevention in Design of Interior Decoration of Buildings” GB 50222.
The fume density grade of decoration materials shall not be greater than 50 and the fume
density grade of materials shall meet the relevant requirements of the current national standard
“Test Method for Density of Smoke from the Burning or Decomposition of Building Materials”
GB/T 8627.
6.3.2 The decoration of inner wall and ceiling of clean room shall be in accordance with the
following requirements:
1 It shall meet the requirements of use functions and the surface shall be smooth, slick without
dust, glare and convenient for cleaning and shall reduce the roughness;
2 When skirting is adopted, the skirting should not protrude the wall surface.
6.3.3 The floor design of clean room shall meet the following requirements:
1 It shall meet the requirements of production process and equipment installation of electronic
products;
2 It shall be smooth, wear-proof, easy to clean, difficult to accumulate static electricity, without
glare, crack and shall be clash resistant.
3 The ground should be reinforced and shall be made into moisture protection structure.
6.3.4 The wall and ceiling of technical mezzanine in clean room shall meet the use function
requirements and the surface shall be smooth and slick. The technical layer or technical mezzanine
located under ground shall be taken with waterproof or moisture protection and rot resistance
measures.
6.3.5 When external windows are installed in clean room, double layer fixed windows shall be
adopted and shall be provided with favorable air-tightness; moisture condensation measures shall be
taken.
6.3.6 The design of door and windows, walls, ceiling, ground and floor in clean room (zone) shall
be in accordance with the following requirements:
1 The use function requirements shall be met and the structure and construction gap shall be
sealed;
19
7 Air Cleaning and Ventilation Design of Air Conditioner
7.1 General Requirements
7.1.1 The air cleanliness class in clean room (zone) shall be determined according to the production
process characteristics of electronic products and the clean room types.
7.1.2 The air pattern shall be selected according to the various requirements of air cleanliness class
and electronic product process characteristics in each clean room (zone).
7.1.3 If any of the following conditions is met, the cleaning air conditioning system should be
separately installed:
1 The operation shifts or service times are different;
2 The substance emitted during production process has impact on other procedures, cross
contamination of equipments, product quality or operating staff health and safety;
3 The requirements of temperature and humidity control are greatly different;
4 The process equipment heating in clean room (zone) is greatly different;
5 Cleaning air conditioning system and general air conditioning system,
6 Cleaning air conditioning system for oversized air flow in system.
7.1.4 The temperature, relative humidity in clean room (zone) shall in accordance with those
specified in Article 3.2.3 of this code.
7.1.5 The air cleanliness class in clean room (zone) shall be in accordance with the relevant
requirements of the current national standard “Code for Design of Clean Room” GB 50073.
7.1.6 A certain static pressure difference shall be kept between the clean room (zone) and the
surrounding space and the static pressure difference shall meet the following requirements:
1 The static pressure difference between each clean room (zone) and the surrounding
space shall be determine according to the production process requirements;
2 The static pressure difference between clean rooms (zones) in different classes shall be
larger than or equal to 5Pa;
3 The static pressure difference between the clean room (zone) and the non- clean room
(zone) shall be larger than 5Pa;
4 The static pressure difference between the clean room (zone) and the outdoor shall be
larger than 10Pa.
7.1.7 The pressure difference air flow required to maintain the static pressure difference in clean
room (zone) should be adopted with slit method or ventilation rate method.
7.1.8 The open and close, interlock and control requirements of supply air, return air and exhaust air
system shall meet the relevant requirements of the current national standard “Code for Design of
Clean Room” GB 50073.
7.1.9 The non-continuous operating clean room may be installed with supply air on duty according
21
in other buildings.
7.3.4 The fresh air when a few cleaning air conditioning systems are applied at the same time or the
fresh air of cleaning air conditioning system in large scale electronic industry clean rooms shall be
centralized processed.
7.3.5 Rational utilization of return air shall be adopted in the cleaning air conditioning system
design; however, the return air shall not be adopted in the following conditions:
1 When the hazardous substances emitted to the workshop during the production process
exceeds the requirements;
2 When local processing could not meet the hygienic requirements;
3 When it may trigger hazard to other procedures or the cross contamination is inevitable.
7.3.6 When the cleaning air conditioning system is required to install electrical heating, electric
heater which may not generate fume shall be adopted and shall be installed at the upper wind side of
high efficiency filter; besides, the safety precautions shall be adopted.
7.3.7 The electric humidifier of cleaning air conditioning system shall be adopted with safety
precautions.
7.3.8 The fresh air system shall be adopted with frost prevention measures in the areas with possible
freezing conditions according to the meteorological conditions.
7.4 Air Cleaning Facilities
7.4.1 The selection and layout of air filter shall be in accordance with the following requirements:
1 The air filters shall be selected according to the air cleanliness class;
2 The treatment air flow of air filter shall be less than or equal to the rated air flow;
3 The medium high efficiency (high and medium high efficiency) particulate air filter should be
installed on the positive pressure section of air conditioning cabinet.
4 The high efficiency (sub-high efficiency) particulate air filter should be installed at the end of
cleaning air conditioning system and the (ULPA) ultra low penetration air filter shall be installed at
the end of cleaning air conditioning system;
5 The resistance and efficiency of high efficiency (sub-high efficiency and ultra-low penetration)
particulate air filter installed at the end of the same cleaning air conditioning system shall be similar;
6 The ratio of applied air flow to the rated air flow of high efficiency (sub-high efficiency and
ultra-low penetration) particulate air filter installed at the end of the same cleaning air conditioning
system shall be similar;
7 Chemical filters or other removal devices shall be installed in the cleaning air conditioning
system according to environment conditions in the clean room (zone) with control requirements of
chemical pollutants;
8 High efficiency (sub-high efficiency and ultra-low penetration) particulate air filter shall be
adopted with incombustible or nonflammable material.
23
1 It shall be provided with favorable air-tightness and the air leakage rate shall not be larger
than 1%;
2 The overall structure shall be provided with adequate strength and rigidity; the internal
surface shall be smooth, slick and the external surface shall not be moisture condensate;
3 It shall be arranged in order and convenient for operation and maintenance; when a few air
handling units are providing service to the same clean room (zone), air handling units with same
specification should be adopted;
4 The air supply fan should be adopted with frequency control measures. The air supply fan
may be selected according to the total air flow and total resistance values of cleaning air conditioning
system. When the total resistance of system is calculated, the resistance of medium efficiency (high-
medium efficiency), high efficiency (sub-high ef...
......
Source: Above contents are excerpted from the full-copy PDF -- translated/reviewed by: www.ChineseStandard.net / Wayne Zheng et al.
Tips & Frequently Asked QuestionsQuestion 1: How long will the true-PDF of English version of GB 50472-2008 be delivered?Answer: The full copy PDF of English version of GB 50472-2008 can be downloaded in 9 seconds, and it will also be emailed to you in 9 seconds (double mechanisms to ensure the delivery reliably), with PDF-invoice. Question 2: Can I share the purchased PDF of GB 50472-2008_English with my colleagues?Answer: Yes. The purchased PDF of GB 50472-2008_English will be deemed to be sold to your employer/organization who actually paid for it, including your colleagues and your employer's intranet. Question 3: Does the price include tax/VAT?Answer: Yes. Our tax invoice, downloaded/delivered in 9 seconds, includes all tax/VAT and complies with 100+ countries' tax regulations (tax exempted in 100+ countries) -- See Avoidance of Double Taxation Agreements (DTAs): List of DTAs signed between Singapore and 100+ countriesQuestion 4: Do you accept my currency other than USD?Answer: Yes. www.ChineseStandard.us -- GB 50472-2008 -- Click this link and select your country/currency to pay, the exact amount in your currency will be printed on the invoice. Full PDF will also be downloaded/emailed in 9 seconds. How to buy and download a true PDF of English version of GB 50472-2008?A step-by-step guide to download PDF of GB 50472-2008_EnglishStep 1: Visit website https://www.ChineseStandard.net (Pay in USD), or https://www.ChineseStandard.us (Pay in any currencies such as Euro, KRW, JPY, AUD).
Step 2: Search keyword "GB 50472-2008".
Step 3: Click "Add to Cart". If multiple PDFs are required, repeat steps 2 and 3 to add up to 12 PDFs to cart.
Step 4: Select payment option (Via payment agents Stripe or PayPal).
Step 5: Customize Tax Invoice -- Fill up your email etc.
Step 6: Click "Checkout".
Step 7: Make payment by credit card, PayPal, Google Pay etc. After the payment is completed and in 9 seconds, you will receive 2 emails attached with the purchased PDFs and PDF-invoice, respectively.
Step 8: Optional -- Go to download PDF.
Step 9: Optional -- Click Open/Download PDF to download PDFs and invoice.
See screenshots for above steps: Steps 1~3 Steps 4~6 Step 7 Step 8 Step 9
|