YS/T 983-2024 English PDF

Standard ID	USD	BUY PDF	Lead-Days	Standard Title (Description)	Status
YS/T 983-2024	RFQ	ASK	3 days	(Determination of tail gas composition in silicon polycrystalline reduction furnace - Gas chromatography)	Valid
YS/T 983-2014	279	Add to Cart	3 days	Test method for measuring composition of polysilicon deposition reactor and TCS to STC converter vent gas	Obsolete

Basic data

Standard ID: YS/T 983-2024 (YS/T983-2024)
Description (Translated English): (Determination of tail gas composition in silicon polycrystalline reduction furnace - Gas chromatography)
Sector / Industry: Nonferrous Metallurgy Industry Standard (Recommended)
Classification of Chinese Standard: H17
Classification of International Standard: 77.04
Date of Issue: 2024-10-24
Date of Implementation: 2025-05-01
Older Standard (superseded by this standard): YS/T 983-2014
Issuing agency(ies): Ministry of Industry and Information Technology
Summary: This standard specifies the method for determining the components in the tail gas of silicon polycrystalline reduction furnace by gas chromatography. This standard is applicable to the determination of the components of the tail gas of silicon polycrystalline reduction furnace produced by trichlorosilane method.

YS/T 983-2014: Test method for measuring composition of polysilicon deposition reactor and TCS to STC converter vent gas

---This is a DRAFT version for illustration, not a final translation. Full copy of true-PDF in English version (including equations, symbols, images, flow-chart, tables, and figures etc.) will be manually/carefully translated upon your order.
Test method for measuring composition of polysilicon deposition reactor and TCS to STC converter vent gas ICS 77.040 H17 People's Republic of China Nonferrous Metals Industry Standard Polysilicon reduction furnace and furnace exhaust hydrogenation component test methods Issued on. 2014-10-14 2015-04-01 implementation Ministry of Industry and Information Technology of the People's Republic of China released

Foreword

This standard was drafted in accordance with GB/T 1.1-2009 given rules. This standard by the national non-ferrous metals Standardization Technical Committee (SAC/TC243) centralized. This standard is drafted by. Sichuan Xinguang Silicon Technology Co., Ltd. Participated in the drafting of this standard. Tianwei Sichuan Silicon Industry Co., Ltd., Leshan Electric Tianwei Silicon Technology Co., Ltd., Emei half Institute of conductive material, Shaanxi Tianhong Silicon Material Co., Ltd., Luoyang Sino-silicon high-tech Co., Ltd. The main drafters of this standard. Ao Xiping, Wang Bo, Liang Hong, Liu Chang, Zhang end, the ancient line of dry, King Ali. Polysilicon reduction furnace and furnace exhaust hydrogenation component test methods

1 Scope

This standard specifies the method for determination of polysilicon reduction furnace and furnace exhaust hydrogenation component. This standard applies to improved Siemens process furnace and hydride reduction furnace exhaust components (hydrogen, hydrogen chloride, trichlorosilane, and dichloro-dihydro-silicon Silicon tetrachloride) measurement. Detection range of the volume fraction of 0.1% to 100%.

2 Normative references

The following documents for the application of this document is essential. For dated references, only the dated version suitable for use herein Member. For undated references, the latest edition (including any amendments) applies to this document. GB/T 7445 purity, high purity and ultra pure hydrogen GB/T 8979 nitrogen, high purity nitrogen and ultra pure nitrogen

3 Method summary

According to the boiling point of the respective components in the exhaust gas, and the polarity of adsorption difference by gas chromatography to separate the individual components from the column, mining Detected content with a thermal conductivity detector (TCD).

4 confounding factors

4.1 Sample temperature should not be below 50 ℃, otherwise the sample part chlorosilane group branch condensation, analysis results to lose representation. 4.2 exhaust pressure should be maintained in a suitable range, and not too difficult to operate safe, easily lead to too small a sample can not be collected until the sample container Inside. 4.3 of the sample container should be kept closed, otherwise leakage will affect the accuracy of the sample analysis results.

5 Reagents and materials

Unless otherwise indicated, the use of reagents or materials comply with national standards of analysis. 5.1 high-purity hydrogen shall comply with the provisions of GB/T 7445's. 5.2 high-purity nitrogen, shall comply with the provisions of GB/T 8979's.

6 instruments and equipment

6.1 Gas chromatograph. with a thermal conductivity detector. 6.2 Injector. 1mL gas tight glass syringe. 6.3 Sample container. volume of about 250mL. 6.4 Columns. length 1m ~ 2m, the inner diameter of 5mm, filled with silane material columns, other columns or equivalent material. ......

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