YS/T 791-2012 English PDF

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YS/T 791-2012: Platinum target
Status: Valid

Standard ID	USD	BUY PDF	Lead-Days	Standard Title (Description)	Status
YS/T 791-2012	159	Add to Cart	3 days	Platinum target	Valid

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Basic data

Standard ID: YS/T 791-2012 (YS/T791-2012)
Description (Translated English): Platinum target
Sector / Industry: Nonferrous Metallurgy Industry Standard (Recommended)
Classification of Chinese Standard: H68
Classification of International Standard: 77.120.99
Word Count Estimation: 6,686
Quoted Standard: GB/T 1182; GB/T 1419-2004; GB/T 15077-2008
Regulation (derived from): Ministry of Industry and Information Technology Bulletin No. 55 of 2012; industry standard filing Notice 2013 No. 1 (Total No. 157);
Issuing agency(ies): Ministry of Industry and Information Technology
Summary: This standard specifies the platinum target requirements, test methods, inspection rules and signs, packaging, transportation, storage and contract or purchase order. This standard applies to all kinds of semiconductor devices with platinum sputtering tar

YS/T 791-2012: Platinum target

---This is a DRAFT version for illustration, not a final translation. Full copy of true-PDF in English version (including equations, symbols, images, flow-chart, tables, and figures etc.) will be manually/carefully translated upon your order.
Platinum target ICS 77.120.99 H68 People's Republic of China Nonferrous Metals Industry Standard Platinum target Issued on. 2012-11-07 2013-03-01 implementation Ministry of Industry and Information Technology of the People's Republic of China released

Foreword

This standard was drafted in accordance with GB/T 1.1-2009 given rules. This standard by the national non-ferrous metals Standardization Technical Committee (SAC/TC243) centralized. This standard has REVIEW billion of the new Materials Co., Ltd. is responsible for drafting. The main drafters of this standard. WANG Yong-hui, Zhu Xiaoguang, Yang Yonggang Yang Hua, Cheng Yi Europe, Lei Jifeng, Xiong Jiang Xuan. Platinum target

1 Scope

This standard specifies the platinum target requirements, test methods, inspection rules and signs, packaging, transportation, storage and contract or purchase order. This standard applies to all types of semiconductor devices used in platinum sputtering target (hereinafter referred to as platinum target), other uses can also refer to the use of platinum target.

2 Normative references

The following documents for the application of this document is essential. For dated references, only the dated version suitable for use herein Member. For undated references, the latest edition (including any amendments) applies to this document. GB/T 1182 Geometrical product specifications (GPS) geometric tolerances of form, orientation, location and runout tolerancing GB/T 1419-2004 spongy platinum GB/T 15077-2008 precious metals and their alloys geometry measurement methods

3 Requirements

3.1 Categories Platinum target in accordance with the purity into IC-Pt99.95, IC-Pt99.99 two grades. Mainly circular and rectangular shape. 3.2 Chemical composition Chemical composition of platinum target should be consistent with the provisions of GB/T 1419-2004 Pt99.95 and Pt99.99 of the elements and volatiles unspecified Control limits and analytical methods, both parties determined by supply and demand. 3.3 appearance quality 3.3.1 platinum target surface should be flat, no scratches, cracks, and other defects raised; no particles addenda and other contaminants; should be clean and smooth, no fingerprints, no Oil and rust. 3.3.2 platinum target surface roughness Ra value should be no greater than 1.6μm. 3.4 Geometric Dimensioning and Tolerance Circular diameter φ 3.4.1 platinum target mainly 25mm ~ 300mm, a thickness generally 1mm ~ 10mm. 3.4.2 rectangular platinum size of the target are. length 20mm ~ 300mm, width 20mm ~ 300mm, a thickness generally 1mm ~ 10mm, chamfer radius R typically 0.5mm ~ 3mm. 3.4.3 platinum target circular and rectangular dimensions and tolerances shall comply with the provisions in Table 1. By mutual agreement, provide additional specifications and allow Deviation platinum target. 3.4.4 platinum target geometric tolerances (parallelism, verticality, etc.). For party have special requirements, according to the technical agreement or demand side, drawing tolerances Claim. ......

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