YS/T 15-2015 English PDFUS$139.00 · In stock
Delivery: <= 3 days. True-PDF full-copy in English will be manually translated and delivered via email. YS/T 15-2015: Test method for thickness of epitaxial layers and diffused layers by angle lap stain Status: Valid YS/T 15: Historical versions
Basic dataStandard ID: YS/T 15-2015 (YS/T15-2015)Description (Translated English): Test method for thickness of epitaxial layers and diffused layers by angle lap stain Sector / Industry: Nonferrous Metallurgy Industry Standard (Recommended) Classification of Chinese Standard: H21 Classification of International Standard: 77.04 Word Count Estimation: 6,663 Date of Issue: 2015-04-30 Date of Implementation: 2015-10-01 Older Standard (superseded by this standard): YS/T 15-1991 Quoted Standard: GB/T 1550; GB/T 6617-2009; GB/T 14146; GB/T 14264; GB/T 14847 Regulation (derived from): Ministry of Industry and Information Technology Announcement (2015 No. 28) Issuing agency(ies): Ministry of Industry and Information Technology Summary: This Standard specifies the determination of silicon epitaxial layer and the diffusion layer thickness Bevelers staining. This Standard applies to the epitaxial layer and the substrate conductivity type diffusion layer or two layers of different resistivity measured by at least one order of magnitude any resistivity silicon epitaxial layer and the diffusion layer thickness measurement range of 1 ��m ~ 100 ��m. YS/T 15-2015: Test method for thickness of epitaxial layers and diffused layers by angle lap stain---This is a DRAFT version for illustration, not a final translation. Full copy of true-PDF in English version (including equations, symbols, images, flow-chart, tables, and figures etc.) will be manually/carefully translated upon your order. (Silicon epitaxial layer and the diffusion layer thickness measurement angle grinding staining) ICS 77.040 H21 People's Republic of China Nonferrous Metals Industry Standard Replacing YS/T 15-1991 Silicon epitaxial layer and the diffusion layer thickness measurement Bevelers staining byanglelapstain Issued on. 2015-04-30 2015-10-01 implementation Ministry of Industry and Information Technology of the People's Republic of China released ForewordThis standard was drafted in accordance with GB/T 1.1-2009 given rules. Instead of the standard YS/T 15-1991 "silicon epitaxial layer and the diffusion layer thickness measurement Bevelers staining." This standard YS/T 15-1991 "determination of silicon epitaxial layer and the diffusion layer thickness Bevelers staining" compared to the main changes are as follows. Measuring range --- original "1μm ~ 25μm" to "1μm ~ 100μm"; --- Normative references added GB/T 6617, GB/T 14146, GB/T 14264, GB/T 14847; --- Increasing the terms and definitions, disturbances; --- Method summary with microscopic image processing technology instead of the interference fringe computing Layer Thickness; --- "Reagents and Materials" Remove reagents and materials related to the interference fringes law; --- Deleted the original 2, increasing the bevel schematic; --- Modify the calculation and measurement procedures measurement results; --- Redefined precision. This standard by the national non-ferrous metals Standardization Technical Committee (SAC/TC243) and focal points. This standard was drafted. Nanjing Guosheng Electronics Co., have research New Material Co., Ltd. Shanghai Jing League silicon material. The main drafters of this standard. Marin treasure, Yang Fan, Ge Hua, Sun Yan, Xu Xinhua. This standard replaces the standards previously issued as follows. --- YS/T 15-1991. Silicon epitaxial layer and the diffusion layer thickness measurement Bevelers staining1 ScopeThis standard specifies the determination of silicon epitaxial layer and the diffusion layer thickness Bevelers staining. This standard applies to the epitaxial layer and a diffusion layer and a conductive substrate, or two different types of electrical resistivity by at least an order of magnitude of any resistance Silicon epitaxial layer and the diffusion layer thickness measurement rate measurement range of 1μm ~ 100μm.2 Normative referencesThe following documents for the application of this document is essential. For dated references, only the dated version suitable for use herein Member. For undated references, the latest edition (including any amendments) applies to this document. GB/T 1550 extrinsic conductivity type semiconductor material testing methods GB/T 6617-2009 measuring resistivity silicon spreading resistance probe GB/T 14146 silicon epitaxial layer carrier concentration - Mercury probe capacitance - voltage method GB/T 14264 semiconductor material terms GB/T 14847 lightly doped silicon epitaxial layer on the substrate thickness infrared reflectance measurements heavily doped3 Terms and DefinitionsTerms and definitions GB/T 14264 apply to this document defined.4 Method summaryThe sample was milled to obtain a small angle to the original surface slope, by staining revealed the interface between the layers on an incline. Image processing technology using a microscope to read thin ramp length is calculated according to the length of the thin layer thickness ramps.5 disturbances5.1 After dyeing blur the boundary between layers will affect the accuracy of the results. 5.2 9.3 difference operation will bring the measurement results on the computer screen image when the value of. Fig. 3 AB line should be perpendicular to the dividing line between the layers after dyeing, otherwise it will increase the measurement error when measuring 5.3.6 Reagents and materials6.1 hydrofluoric acid. (ρ = 1.15g/mL) AR. 6.2 Hydrogen peroxide (37), AR. 6.3 High water. resistivity greater than 2MΩ · cm (25 ℃). 6.4 etching solution. the hydrofluoric acid (6.1) and hydrogen peroxide (6.2) uniformly by 2.1 volume ratio. ......Tips & Frequently Asked Questions:Question 1: How long will the true-PDF of YS/T 15-2015_English be delivered?Answer: Upon your order, we will start to translate YS/T 15-2015_English as soon as possible, and keep you informed of the progress. The lead time is typically 1 ~ 3 working days. The lengthier the document the longer the lead time.Question 2: Can I share the purchased PDF of YS/T 15-2015_English with my colleagues?Answer: Yes. The purchased PDF of YS/T 15-2015_English will be deemed to be sold to your employer/organization who actually pays for it, including your colleagues and your employer's intranet.Question 3: Does the price include tax/VAT?Answer: Yes. 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