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JJF 1932-2021 English PDF

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US$509.00 · In stock
Delivery: <= 4 days. True-PDF full-copy in English will be manually translated and delivered via email.
JJF 1932-2021: Calibration Specification for Ellipsometers
Status: Valid

Standard ID	USD	BUY PDF	Lead-Days	Standard Title (Description)	Status
JJF 1932-2021	509	Add to Cart	4 days	Calibration Specification for Ellipsometers	Valid

Similar standards

JJG 879 JJF 1106 JJG 810 JJF 2002 JJF 1937 JJF 1936

Basic data

Standard ID: JJF 1932-2021 (JJF1932-2021)
Description (Translated English): Calibration Specification for Ellipsometers
Sector / Industry: Metrology & Measurement Industry Standard
Classification of Chinese Standard: A60
Classification of International Standard: 17.180
Word Count Estimation: 23,265
Date of Issue: 2021-12-08
Date of Implementation: 2022-06-08
Issuing agency(ies): State Administration for Market Regulation
Summary: This standard applies to the calibration of ellipsometers within the wavelength range of 250nm~2000nm.

JJF 1932-2021: Calibration Specification for Ellipsometers

---This is a DRAFT version for illustration, not a final translation. Full copy of true-PDF in English version (including equations, symbols, images, flow-chart, tables, and figures etc.) will be manually/carefully translated upon your order.
National Metrology Technical Specifications of the People's Republic of China Ellipsometer Calibration Specifications Released on 2021-12-08 2022-06-08 Implementation Released by the State Administration for Market Regulation Ellipsometer Calibration Specifications Responsible unit: National Optical Metrology Technical Committee Main drafting unit: China Institute of Metrology The 205th Research Institute of China Ordnance Industry Participating in the drafting unit: The 41st Research Institute of China Electronics Technology Group Corporation Shanghai Institute of Metrology and Testing Technology Shaanxi Institute of Metrology This specification entrusts the National Optical Metrology Technical Committee to be responsible for interpretation The main drafters of this specification: Liu Wende (National Institute of Metrology) Chen Chi (National Institute of Metrology) Wang Lei (No: 205 Research Institute of China Ordnance Industry) Participating drafters: Sun Quanshe (The 41st Research Institute of China Electronics Technology Group Corporation) Ye Junan (Shanghai Institute of Metrology and Testing Technology) Li Yi (Shaanxi Institute of Metrology)

Introduction (Ⅱ) 1 Scope(1) 2 References(1) 3 Terms and units of measurement(1) 4 Overview(2) 5 Metrological characteristics(3) 5:1 Wavelength Indication Error(3) 5:2 Spectral bandwidth(3) 5:3 Indication error of incident angle (3) 5:4 Repeatability of ellipsometric measurements (3) 5:5 Indication error of wave plate delay (3) 5:6 Indication error of ellipse angle (3) 6 Calibration conditions(3) 6:1 Environmental conditions (3) 6:2 Measuring standards and other equipment (3) 7 Calibration Items and Calibration Methods(4) 7:1 Pre-calibration checks(4) 7:2 Wavelength Indication Error(4) 7:3 Spectral bandwidth(4) 7:4 Repeatability of ellipsometric measurements (4) 7:5 Indication error of incident angle (4) 7:6 Indication error of wave plate delay (5) 7:7 Indication error of ellipse angle (6) 8 Calibration result expression(6) 9 Recalibration interval(7) Appendix A Format of the inner page of the calibration certificate (for reference) (8) Appendix B Calibration Original Record Format (for reference) (10) Appendix C Examples of Uncertainty Assessment (12) Appendix D Ellipsometric Optical Model of Silicon Oxide on Silicon Surface (15) Appendix E Wave Plate Adjustment Example(16)

Introduction

JJF 1001 "General Metrology Terms and Definitions", JJF 1059:1 "Assessment and Expression of Measurement Uncertainty" and JJF 1071 "Rules for Compilation of National Metrology and Calibration Standards" together constitute the basic series of specifications supporting the compilation of this standard: This specification is published for the first time: Ellipsometer Calibration Specifications

1 Scope

This specification applies to the calibration of ellipsometers within the wavelength range of 250nm~2000nm:

2 References

This specification references the following documents: JJF 1497 Polarizer Calibration Specification GJB/J5463 Optical Film Refractive Index and Thickness Tester Verification Regulations For dated references, only the dated version applies to this specification; for undated references document, its latest version (including all amendments) applies to this specification:

3 Terminology and units of measurement

3:1 planeofincidence of incident surface The surface formed by the incident beam and the reflected beam [SEMIE141-0705 ellipsometric device 6]: Incident (reflection) angle gauge Defined as the angle between the incident (reflected) light and the normal to the sample surface, see Figure 1 (a): (a) Schematic diagram of incident surface (b) Schematic diagram of ellipse angle Fig:1 Schematic diagram of incident surface and ellipsometric angle n-sample surface normal; θ-incident angle; mode of rs, rp-s, p polarization complex amplitude reflection coefficient; δs, δp-s, phase of p-polarized complex-amplitude reflection coefficients ......

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Tips & Frequently Asked Questions:

Question 1: How long will the true-PDF of JJF 1932-2021_English be delivered?

Answer: Upon your order, we will start to translate JJF 1932-2021_English as soon as possible, and keep you informed of the progress. The lead time is typically 2 ~ 4 working days. The lengthier the document the longer the lead time.

Question 2: Can I share the purchased PDF of JJF 1932-2021_English with my colleagues?

Answer: Yes. The purchased PDF of JJF 1932-2021_English will be deemed to be sold to your employer/organization who actually pays for it, including your colleagues and your employer's intranet.

Question 3: Does the price include tax/VAT?

Answer: Yes. Our tax invoice, downloaded/delivered in 9 seconds, includes all tax/VAT and complies with 100+ countries' tax regulations (tax exempted in 100+ countries) -- See Avoidance of Double Taxation Agreements (DTAs): List of DTAs signed between Singapore and 100+ countries

Question 4: Do you accept my currency other than USD?

Answer: Yes. If you need your currency to be printed on the invoice, please write an email to Sales@ChineseStandard.net. In 2 working-hours, we will create a special link for you to pay in any currencies. Otherwise, follow the normal steps: Add to Cart -- Checkout -- Select your currency to pay.