GB/T 45826-2025 English PDF

US$219.00 · In stock
Delivery: <= 3 days. True-PDF full-copy in English will be manually translated and delivered via email.
GB/T 45826-2025: Titania doped silica glass for lithography
Status: Valid

Standard ID	USD	BUY PDF	Lead-Days	Standard Title (Description)	Status
GB/T 45826-2025	219	Add to Cart	3 days	Titania doped silica glass for lithography	Valid

Similar standards

GB/T 42653   GB/T 42800   GB/T 32661   GB/T 45823   

Basic data

Standard ID: GB/T 45826-2025 (GB/T45826-2025)
Description (Translated English): Titania doped silica glass for lithography
Sector / Industry: National Standard (Recommended)
Classification of Chinese Standard: Q35
Classification of International Standard: 81.040.30
Word Count Estimation: 10,198
Date of Issue: 2025-05-30
Date of Implementation: 2025-12-01
Issuing agency(ies): State Administration for Market Regulation, China National Standardization Administration

GB/T 45826-2025: Titania doped silica glass for lithography

---This is a DRAFT version for illustration, not a final translation. Full copy of true-PDF in English version (including equations, symbols, images, flow-chart, tables, and figures etc.) will be manually/carefully translated upon your order.
ICS 81.040.30 CCSQ35 National Standard of the People's Republic of China Titanium-doped quartz glass for photolithography Released on 2025-05-30 2025-12-01 Implementation State Administration for Market Regulation The National Standardization Administration issued

Foreword

This document is in accordance with the provisions of GB/T 1.1-2020 "Guidelines for standardization work Part 1.Structure and drafting rules for standardization documents" Drafting. Please note that some of the contents of this document may involve patents. The issuing organization of this document does not assume the responsibility for identifying patents. This document was proposed by China Building Materials Federation. This document is under the jurisdiction of the National Technical Committee for Standardization of Industrial Glass and Special Glass (SAC/TC447). This document was drafted by. Hubei Feilihua Quartz Glass Co., Ltd., China Building Materials Science Research Institute Co., Ltd., China China Testing Holding Group Co., Ltd., Glass New Materials Innovation Center (Anhui) Co., Ltd., Institute of Microelectronics, Chinese Academy of Sciences, Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, China National Building Material Group Co., Ltd., Chengdu Guangming Optoelectronics Co., Ltd. Co., Ltd., Chengdu Guangming Optoelectronics Co., Ltd., Weihai Changhe Optical Technology Co., Ltd., Nantong Crystal Co., Ltd., China Metrology Science and Technology Co., Ltd. Institute of Optoelectronics, Chinese Academy of Sciences, Jiuzhi Optoelectronic Materials Technology Co., Ltd., Shanghai Optical Precision Mechanics, Chinese Academy of Sciences Institute, Jinan Guangwei Semiconductor Technology Co., Ltd., Shanghai Feilihua Shichuang Technology Co., Ltd., Shenguang Optical Group Co., Ltd., Shanghai Chuan Xin Semiconductor Co., Ltd., Chengdu Luwei Optoelectronics Co., Ltd., Changsha Shaoguang Core Materials Technology Co., Ltd., and Chongqing Testing of China Testing Holding Group Ltd. The main drafters of this document are. Zhang Han, Nie Lanjian, Liu Junlong, Xia Guojun, Xie Changqing, Zhang Haitao, Shen Yichun, Qian Yigang, Shao Zhufeng, Wang Hui, Liu Huanmin, Liu Yaru, Wang Jingxia, Li Peiyue, Yu Hao, Chen Weidong, Liu Zhenyu, Mao Lulu, Yun Shidong, Mo Dahong, Wang Shikai, Pei Guangqing, Cao Xin, Cui Jianqiu, Huang Ting, Qin Weiguang, Han Fu, Jin Xiaorong, Huang Yun, Lu Weimin, Cai Xiaofeng, Si Jiwei, Zheng Yuchen, Li Yizhou, Wang Liangliang, Hu Huirong. Titanium-doped quartz glass for photolithography

1 Scope

This document specifies the requirements, inspection rules, and marking, packaging, and transportation of titanium-doped quartz glass for lithography (hereinafter referred to as titanium-doped quartz glass). Transport and storage, and the corresponding test methods are described. This document applies to the production, inspection, delivery and acceptance of titanium-doped quartz glass used in semiconductor integrated circuit lithography reflective optical systems.

2 Normative references

The contents of the following documents constitute the essential clauses of this document through normative references in this document. For referenced documents without a date, only the version corresponding to that date applies to this document; for referenced documents without a date, the latest version (including all amendments) applies to This document. GB/T 191 Pictorial markings for packaging, storage and transportation GB/T 5949 Transparent quartz glass bubble and gas line test method GB/T 7962.7 Test methods for colorless optical glass - Streak degree test method GB/T 43881 Test method for linear thermal expansion coefficient of low expansion glass - Laser interferometry method JC/T 2205 Quartz Glass Terminology JC/T 2851 Optical quartz glass stress birefringence test method point scanning method

3 Terms and definitions

The terms and definitions defined in JC/T 2205 and the following apply to this document. 3.1 Quartz glass containing titanium dioxide whose average linear thermal expansion coefficient is not greater than 5×10-8 ℃-1 within a certain temperature range. Note. The minimum test temperature of the average linear thermal expansion coefficient shall not be lower than -50°C and the maximum test temperature shall not exceed 300°C.

4 Requirements

4.1 Specifications and dimensions The diameter (or length and width) and its deviation, thickness and its deviation, key area and non-key area of titanium-doped quartz glass shall be agreed upon by the supply and demand parties. The schematic diagram of key areas and non-key areas is shown in Figure 1. ......

Image     

Tips & Frequently Asked Questions:

Question 1: How long will the true-PDF of GB/T 45826-2025_English be delivered?

Answer: Upon your order, we will start to translate GB/T 45826-2025_English as soon as possible, and keep you informed of the progress. The lead time is typically 1 ~ 3 working days. The lengthier the document the longer the lead time.

Question 2: Can I share the purchased PDF of GB/T 45826-2025_English with my colleagues?

Answer: Yes. The purchased PDF of GB/T 45826-2025_English will be deemed to be sold to your employer/organization who actually pays for it, including your colleagues and your employer's intranet.

Question 3: Does the price include tax/VAT?

Answer: Yes. Our tax invoice, downloaded/delivered in 9 seconds, includes all tax/VAT and complies with 100+ countries' tax regulations (tax exempted in 100+ countries) -- See Avoidance of Double Taxation Agreements (DTAs): List of DTAs signed between Singapore and 100+ countries

Question 4: Do you accept my currency other than USD?

Answer: Yes. If you need your currency to be printed on the invoice, please write an email to Sales@ChineseStandard.net. In 2 working-hours, we will create a special link for you to pay in any currencies. Otherwise, follow the normal steps: Add to Cart -- Checkout -- Select your currency to pay.