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Delivery: <= 4 days. True-PDF full-copy in English will be manually translated and delivered via email. GB/T 44926-2024: Nanotechnologies - Characterization of micro surface and sub surface - Optical dark-field confocal microscopy Status: Valid
Basic dataStandard ID: GB/T 44926-2024 (GB/T44926-2024)Description (Translated English): Nanotechnologies - Characterization of micro surface and sub surface - Optical dark-field confocal microscopy Sector / Industry: National Standard (Recommended) Classification of Chinese Standard: N51 Classification of International Standard: 17.040.30 Word Count Estimation: 22,228 Date of Issue: 2024-12-31 Date of Implementation: 2025-07-01 Issuing agency(ies): State Administration for Market Regulation, China National Standardization Administration GB/T 44926-2024: Nanotechnologies - Characterization of micro surface and sub surface - Optical dark-field confocal microscopy---This is a DRAFT version for illustration, not a final translation. Full copy of true-PDF in English version (including equations, symbols, images, flow-chart, tables, and figures etc.) will be manually/carefully translated upon your order. ICS 17.040.30 CCSN51 National Standard of the People's Republic of China Nanotechnology Micro-area Surface and Sub-surface Characterization Optical dark-field confocal microscopy Released on 2024-12-31 2025-07-01 Implementation State Administration for Market Regulation The National Standardization Administration issued Table of ContentsPreface III Introduction IV 1 Scope 1 2 Normative references 1 3 Terms and Definitions 1 4 Principle 2 5 Equipment configuration and measurement conditions 4 6 Measurement Step 4 7 Data Processing 5 8 Results Characterization 6 9 Factors Affecting Characterization Results 6 10 Test Report 7 Appendix A (Normative) Dark Field Scattering Confocal Module 8 Appendix B (Informative) Tilt correction method for optical dark field confocal microscope measurement results 9 Appendix C (Informative) Calculation method of correction coefficients for subsurface measurements of optical dark field confocal microscope 11 Appendix D (Informative) Example of Neodymium Glass Optical Dark Field Confocal Microscopy Measurement Results 13 Appendix E (Informative) Example of Subsurface Step Height Measurement Results 15 References 16ForewordThis document is in accordance with the provisions of GB/T 1.1-2020 "Guidelines for standardization work Part 1.Structure and drafting rules for standardization documents" Drafting. Please note that some of the contents of this document may involve patents. The issuing organization of this document does not assume the responsibility for identifying patents. This document was proposed by the Chinese Academy of Sciences. This document is under the jurisdiction of the National Nanotechnology Standardization Technical Committee (SAC/TC279). This standard was drafted by. Harbin Institute of Technology, China Institute of Metrology, Kunming Institute of Physics, Xi'an Institute of Applied Optics, Beijing Institute of Microelectronics Technology, China Aerospace Science and Industry Corporation Defense Technology Research and Experimental Center. The main drafters of this standard.IntroductionThe surface and subsurface quality control of micro-nano devices and high-end optical components is an important factor affecting product performance and service life. Effective characterization of micron and nanometer-scale characteristic structures on the surface and subsurface of the region is an important step in improving the exploration of micro-nano processing and ultra-precision processing mechanisms and processes. It is an important guarantee for the quality control capability of finalization and mass production, and is widely used in the fields of ultra-smooth optical components, micro-optical devices, semiconductor materials, etc. need. Optical dark-field confocal microscopy can realize three-dimensional efficient detection of weak dark-field scattering signals on the surface and subsurface of sample micro-areas. The formulation of this document provides a unified standard for characterizing the surface and subsurface structure of optically transparent solid materials using optical dark-field confocal microscopy. This method is conducive to improving the detection level of high-performance devices and providing quality control and new process development for the processing and production of precision optical components and micro-nano devices. Provide testing guarantee. Nanotechnology Micro-area Surface and Sub-surface Characterization Optical dark-field confocal microscopy1 ScopeThis document describes a method for characterizing micro-areas surfaces and sub-surfaces using optical dark-field confocal microscopy. This document applies to solid materials.2 Normative referencesThe contents of the following documents constitute the essential clauses of this document through normative references in this document. For referenced documents without a date, only the version corresponding to that date applies to this document; for referenced documents without a date, the latest version (including all amendments) applies to This document. GB/T 34879-2017 Product Geometry Specification (GPS) Metrological characteristics and measurement uncertainty evaluation of optical confocal microscopes Guidelines3 Terms and definitionsThe terms and definitions defined in GB/T 34879-2017 and the following apply to this document. 3.1 Subsurface The optically transparent region beneath the surface of a solid material. Note. Usually the depth is within 100 microns. 3.2 Confocal microscopy; CM Using constrained illumination and constrained detection, optical tomography images were obtained by axial scanning, and the maximum axial signal position was extracted to determine the A method for measuring the surface shape of a sample in a certain area. [Source. GB/T 34879-2017, 3.1] 3.3 Based on the principle of confocal microscopy, annular light field constrained illumination and aperture matching constrained detection are used to obtain the surface and subsurface areas of the sample. An optical instrument that detects dark-field scattering signals in the deep domain and obtains three-dimensional tomographic images of samples by axial scanning. 3.4 axialenvelope The recorded detection signal corresponds to a function of the change in the axial position of a single image point in the confocal tomographic image. [Source. GB/T 34879-2017, 3.8] 3.5 The ratio of the inner diameter to the outer diameter of the cross-section of the annular illumination beam measured at the objective entrance pupil. ......Tips & Frequently Asked Questions:Question 1: How long will the true-PDF of GB/T 44926-2024_English be delivered?Answer: Upon your order, we will start to translate GB/T 44926-2024_English as soon as possible, and keep you informed of the progress. The lead time is typically 2 ~ 4 working days. The lengthier the document the longer the lead time.Question 2: Can I share the purchased PDF of GB/T 44926-2024_English with my colleagues?Answer: Yes. 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