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GB/T 40344.4-2025 English PDF

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GB/T 40344.4-2025: Vacuum technology - Standard methods for measuring vacuum-pump performance - Part 4: Turbomolecular vacuum pumps
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GB/T 40344.4-2025274 Add to Cart 3 days Vacuum technology - Standard methods for measuring vacuum-pump performance - Part 4: Turbomolecular vacuum pumps Valid

Similar standards

GB/T 50082   GB/T 40344.3   GB/T 40344.2   

Basic data

Standard ID: GB/T 40344.4-2025 (GB/T40344.4-2025)
Description (Translated English): Vacuum technology - Standard methods for measuring vacuum-pump performance - Part 4: Turbomolecular vacuum pumps
Sector / Industry: National Standard (Recommended)
Classification of Chinese Standard: J78
Classification of International Standard: 23.160
Word Count Estimation: 14,119
Date of Issue: 2025-08-01
Date of Implementation: 2025-11-01
Issuing agency(ies): State Administration for Market Regulation, Standardization Administration of China

GB/T 40344.4-2025: Vacuum technology - Standard methods for measuring vacuum-pump performance - Part 4: Turbomolecular vacuum pumps


---This is an excerpt. Full copy of true-PDF in English version (including equations, symbols, images, flow-chart, tables, and figures etc.), auto-downloaded/delivered in 9 seconds, can be purchased online: https://www.ChineseStandard.net/PDF.aspx/GBT40344.4-2025
ICS 23.160 CCSJ78 National Standard of the People's Republic of China Vacuum technology - Standard method for measuring vacuum pump performance Part 4.Turbomolecular pumps (ISO 21360-4.2018, IDT) Released on August 1, 2025 Implementation on November 1, 2025 State Administration for Market Regulation The National Standardization Administration issued

Table of Contents

Preface III Introduction IV 1 Scope 1 2 Normative references 1 3 Terms and Definitions 1 4 Symbols 3 5 Test Method 3 5.1 Test gas 3 5.2 Measurement of volume flow rate (pumping speed) 3 5.3 Measurement of Maximum Flow 4 5.4 Measurement of critical foreline pressure 4 5.5 Compression Ratio Measurement 5 5.6 Measurement of base pressure 5 5.7 Vibration Measurement 5 6 Test Report 5 6.1 Volume flow rate 6 6.2 Compression ratio 6 6.3 Maximum flow 6 6.4 Critical foreline pressure 6 6.5 Basic Pressure 7 6.6 Vibration 7 Appendix A (Informative) Derivation of Formula (4) and Formula (5) 8 References 9 Preface This document is in accordance with the provisions of GB/T 1.1-2020 "Guidelines for standardization work Part 1.Structure and drafting rules for standardization documents" Drafting. This document is part 4 of GB/T 40344 "Vacuum technology, standard method for measuring vacuum pump performance". GB/T 40344 has been published. The following parts are published. --- Part 1.General requirements; --- Part 2.Positive displacement vacuum pumps; --- Part 3.Specific parameters of mechanical booster pumps; --- Part 4.Turbomolecular pumps. This document is equivalent to ISO 21360-4.2018 "Vacuum technology - Standard methods for measuring vacuum pump performance - Part 4.Turbomolecular Pump. Please note that some of the contents of this document may involve patents. The issuing organization of this document does not assume the responsibility for identifying patents. This document was proposed by the China Machinery Industry Federation. This document is under the jurisdiction of the National Technical Committee on Vacuum Technology Standardization (SAC/TC18). This document was drafted by. Beijing Zhongke Instrument Co., Ltd., Shenyang Vacuum Technology Research Institute Co., Ltd., Shenyang Huizhen Vacuum Technology Co., Ltd., Zhejiang Boya Precision Machinery Co., Ltd., Lanzhou Institute of Space Technology Physics, Beijing Oriental Metrology and Testing Institute, Zhongke Jiuwei Technology Co., Ltd., Shenzhen Hesheng Vacuum Technology Co., Ltd., Ningbo Zhuoer Auto Parts Co., Ltd., Zhejiang Weihang Vacuum Technology Co., Ltd., China National Nuclear Corporation Seventh Research and Design Institute Co., Ltd., Hunan Weige Magnetic Fluid Co., Ltd., Beijing Tongjia Hongrui Technology Co., Ltd., Anhui Wanyi Technology Co., Ltd., Xiangtan Hongda Vacuum Technology Co., Ltd., Zhongke Guangzhi (Chongqing) Technology Co., Ltd., Ma Debao Vacuum Equipment Group Co., Ltd., Hefei Yuchi Vacuum Technology Co., Ltd., Shenzhen Meige Vacuum Technology Co., Ltd., Baoji Xigong Titanium Alloy Products Co., Ltd., Suzhou Suci Intelligent Technology Co., Ltd. The main drafters of this document are. Li Shang, Zhang Qinde, Li Bing, Song Haiyan, Sun Zulai, Song Qingzhu, Qiao Zhonglu, Lu Xuegui, Li Songbo, Cheng Yongjun, Zhao Lan, Lu Yaowen, Wang Huan, Deng Gaofei, Wang Haowei, Li Xueyong, Bai Gang, Guo Chuanqu, Lin Gangzhi, Yan Hao, Wang Zisheng, Yan Jichun, Yan Wenjing, Lei Xiaohong, Wang Guodong, Huang Wenping, Huang Le, Qin Zhanyang, Wang Yuxiang, Zhang Baofu, Yu Jinjun, Dong Xin, Li Guangjun, Zhao Zibo, Yin Chengke, You Zhiqiang, Zhang Hao, Gu Yanqing, Zou Meng, Wu Tao, Wu Xiaoyun, Sun Wenjun, Chen Lian, Sun Donghua, Luo Shougeng, and Wang Lingling.

introduction

The original vacuum pump standard system has put forward different requirements for the measurement of certain vacuum pump performance parameters, measurement devices and performance measurement. The methods and other contents are repeated and not clearly stated. The formulation of specific vacuum pump standards is based on the overall requirements and is measured according to their respective characteristics. If the measurement method of a specific vacuum pump deviates from the general requirements, the specific standard shall prevail. GB/T 40344 "Vacuum Technology Standard Method for Measurement of Vacuum Pump Performance" aims to propose a standard from the perspective of the commonality and characteristics of vacuum pump performance. The standard measurement method, namely the general requirements and specific vacuum pump standards, is planned to consist of 6 parts. --- Part 1.General requirements. Aims to provide a basic document for measuring vacuum pump performance parameters, simplifying the future The development of vacuum pump standards includes three methods for measuring volume flow rate, as well as vacuum base pressure, compression ratio and critical fore stage. Method of measuring pressure. --- Part 2.Positive displacement vacuum pumps. Aims to supplement the standard method for performance measurement of positive displacement vacuum pumps based on general requirements. It includes measurement methods for volume flow rate, base pressure, water vapor tolerance, power consumption and minimum starting temperature of positive displacement vacuum pumps. --- Part 3.Specific parameters of mechanical booster pumps. Aims to describe the maximum allowable pressure difference, effective compression ratio, zero flow Measurement methods and special requirements for compression ratio and relief valve pressure difference. --- Part 4.Turbomolecular pumps. It is intended to be based on the general requirements and describes the flow method and the small hole method to measure the turbomolecular pump body. Methods and devices for measuring the cumulative flow rate, as well as methods for measuring parameters such as maximum flow, critical front stage pressure, compression ratio, base pressure, vibration, etc. Method and measuring device. --- Part 5.Non-evaporable getter (NEG) vacuum pumps. This part is intended to provide a general description of the non-evaporable getter (NEG) vacuum pumps. It is supplemented by standard methods for measuring pump performance. --- Part 6.Cryogenic vacuum pumps. Aims to provide a standard method for measuring the performance of cryogenic vacuum pumps based on general requirements. Replenish. Vacuum technology - Standard method for measuring vacuum pump performance Part 4.Turbomolecular pumps

1 Scope

This document and GB/T 40344.1 describe the performance measurement method of turbomolecular pumps and are applicable to all specifications and types of turbines. Molecular pump. Includes. --- With mechanical bearings or magnetic bearings; ---With or without additional traction stage or other rotor extraction stage; ---With one or more air inlets. Since the turbomolecular pump is supported by a backing pump, the volume flow rate-inlet pressure curve cannot fully determine the performance of the turbomolecular pump. When the turbomolecular pump is used, the driving device and the front stage pressure both affect its performance parameters. The following contents are used to supplement the determination of its performance parameters. ---The flow rate and foreline pressure of the turbomolecular pump; ---Compression ratio curve (compression ratio of turbomolecular pump-foreline pressure).

2 Normative references

The contents of the following documents constitute the essential clauses of this document through normative references in this document. For referenced documents without a date, only the version corresponding to that date applies to this document; for referenced documents without a date, the latest version (including all amendments) applies to This document. GB/T 40344.1-2021 Vacuum technology Standard methods for measuring vacuum pump performance Part 1.General requirements (ISO 21360-1. 2020, IDT)

3 Terms and Definitions

The terms and definitions defined in GB/T 40344.1 and the following apply to this document. 3.1 pc When the turbomolecular pump still has a compression ratio p3/p1 greater than 10 and the purge gas is turned off, the turbomolecular pump and drive can continue to The maximum foreline pressure (p3) at the outlet that can be operated without damage or overload. Note 1.p1 is the (high) vacuum pressure at the turbomolecular pump inlet. At this operating pressure, the turbomolecular pump speed can be reduced. The value of pc depends on the speed and Gas type, so both should be indicated along with the value of pc. Note 2.Measurements with purge gas may result in different results [When removing light gases at the inlet, the use of heavy purge gas will affect the critical foreline pressure. (pc) performance]. Therefore, the purge gas flow rate should be zero. 3.2 Maximum throughput Qmax The highest gas load that a turbomolecular pump can continuously pump without damage or destruction.
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