GB/T 40333-2021 English PDF

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GB/T 40333-2021: Vacuum gauges - Definitions and specifications for quadrupole mass spectrometers
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Basic data

Standard ID: GB/T 40333-2021 (GB/T40333-2021)
Description (Translated English): Vacuum gauges - Definitions and specifications for quadrupole mass spectrometers
Sector / Industry: National Standard (Recommended)
Classification of Chinese Standard: J78
Word Count Estimation: 18,178
Issuing agency(ies): State Administration for Market Regulation, China National Standardization Administration

GB/T 40333-2021: Vacuum gauges - Definitions and specifications for quadrupole mass spectrometers

---This is a DRAFT version for illustration, not a final translation. Full copy of true-PDF in English version (including equations, symbols, images, flow-chart, tables, and figures etc.) will be manually/carefully translated upon your order.
Vacuum gauges-Definitions and specifications for quadrupole mass spectrometers ICS 23.160 J78 National Standards of People's Republic of China Definition and specification of vacuum gauge quadrupole mass spectrometer (ISO 14291.2012, IDT) Released on 2021-05-21 2021-12-01 implementation State Administration of Market Supervision and Administration Issued by the National Standardization Management Committee

Table of contents

Foreword Ⅲ Introduction Ⅳ 1 Scope 1 2 Terms and definitions 1 2.1 Components 1 2.2 Physical parameters 4 3 Symbols and abbreviations 8 4 Principle of Quadrupole Mass Spectrometer 8 5 The instruction manual of the quadrupole mass spectrometer provided by the manufacturer 9 5.1 Quality scope 9 5.2 Ion source type 9 5.3 Type of ion detector 9 5.4 Mass resolution 9 5.5 Mass number stability 9 5.6 Sensitivity 9 5.7 Linear response range 9 5.8 Minimum detectable pressure 9 5.9 Minimum detectable concentration 9 5.10 Maximum working pressure 10 5.11 Scan parameters 10 5.12 Signal output 10 5.13 Potential 10 5.14 Detector technical specifications 10 5.15 Set value 10 5.16 Maximum baking temperature 10 5.17 Nominal working environment 10 5.18 Warm-up time 10 5.19 Filament material 10 5.20 Electron emission current 10 5.21 Replacing the filament 11 5.22 Replacing the detector 11 5.23 Chamber interface 11 5.24 Installation direction 11 5.25 size 11 5.26 Internal volume 11 5.27 The quality of the sensor head and the electronic control unit 11 5.28 The input power of the electronic control unit 11 5.29 Cable 11 5.30 Software 11 5.31 Interface relationship 11 5.32 Storage and transportation conditions 11 6 The manufacturer's additional instructions for the quadrupole mass spectrometer 12 6.1 Mass resolution 12 6.2 Graphic factor 12 6.3 Temperature coefficient of sensitivity 12 6.4 Cleaning the quadrupole mass spectrometer sensor 12 6.5 Degassing 12 6.6 Degassing power supply 12 6.7 Picture 12 6.8 Inspection records 12 6.9 Outgassing rate 12 Reference 13

Foreword

This standard was drafted in accordance with the rules given in GB/T 1.1-2009. The translation method used in this standard is equivalent to ISO 14291.2012 "Definition and Specification of Vacuum Gauge Quadrupole Mass Spectrometer". This standard was proposed by the China Machinery Industry Federation. This standard is under the jurisdiction of the National Vacuum Technology Standardization Technical Committee (SAC/TC18). Drafting organizations of this standard. Lanzhou Institute of Space Technology Physics, Anhui Wanyi Technology Co., Ltd., Anhui Gebo Technology Co., Ltd., Hunan Vigor Magnetic Fluid Co., Ltd., Huizhou Feike New Material Co., Ltd., Shenyang Vacuum Technology Research Institute Co., Ltd. The main drafters of this standard. Cheng Yongjun, Sun Wenjun, Zhao Lan, Li Yali, Chen Lian, Huang Wenping, Wang Guodong, Zhu Yingqing, Zuo Zefan, Yan Jichun, Wang Gongfa, Qian Tianjing, Chen Xiuming, Dong Meng, Yuan Zhengnan, Wang Lingling.

Introduction

Quadrupole mass spectrometer (QMS) can now not only be used in vacuum leak detection and residual gas analysis, but also as a quantitative analysis instrument In process control such as physical and chemical vapor deposition, and etching. Factors such as total pressure, mixed gas composition, instrument parameter settings, and environmental conditions will all affect the measurement results and measurement uncertainty of the quadrupole mass spectrometer. Degree has an important impact. Therefore, the calibration of the quadrupole mass spectrometer cannot cover all applications, and the calibration must meet specific conditions of use or Standardized conditions. At the same time, in order to facilitate users to compare the performance of quadrupole mass spectrometers produced by different manufacturers, and to be able to use the instrument correctly, it is necessary to use this standard. Standardization. This standard has taken the first step to establish the direction of the standard calibration process of quadrupole mass spectrometers by standardizing terms and parameters. Definition and specification of vacuum gauge quadrupole mass spectrometer

1 Scope

This standard defines the terms related to quadrupole mass spectrometers and specifies the parameters required in the manufacturer's instructions for normal calibration and analysis. Guarantee of pressure measurement quality. This standard applies to quadrupole mass spectrometers equipped with electron bombardment ion sources. Such a quadrupole mass spectrometer is usually used to measure the mass-to-charge ratio (m/z) Substances less than 300.Equipped with other types of ion sources such as chemical ionization, photoionization, field ionization, etc., and are mainly used for detection A quadrupole mass spectrometer for specific organic substances with a mass-to-charge ratio (m/z) greater than 300 is not within the scope of this standard.

2 Terms and definitions

The following terms and definitions apply to this document. 2.1 Components 2.1.1 Quadrupole mass spectrometer; QMS The axially incident ions enter a quadrupole lens system composed of four electrodes (usually rods). A mass spectrometer that allows only ions with a certain mass-to-charge ratio to pass through a current electric field. [ISO 3529-3.1981[2], definition 3.5.2.2] Note. Such a quadrupole mass spectrometer consists of a sensor head and an electronic control unit. 2.1.2 Sensorhead Analyzertube Sensor Sensor unit Sensinghead Gaugehead Regulate gaugehead An integral part including ion source, quadrupole mass filter and ion detector. 2.1.3 Ionsource The part of a quadrupole mass spectrometer that ionizes gas molecules and atoms into ions. Note. In order to generate positive ions, the ion source generally uses electron bombardment ionization. 2.1.3.1 Open ion source openionsource The ion source with high conductivity to the surrounding vacuum environment is usually designed as an open grid structure. Note. All functional parts of the ion source are exposed to the same vacuum area. 2.1.3.2 Closed ion source closed source; enclosed source ......

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