GB/T 30654-2014 English PDFUS$229.00 · In stock
Delivery: <= 3 days. True-PDF full-copy in English will be manually translated and delivered via email. GB/T 30654-2014: Test method for lattice constant of Ⅲ-nitride epitaxial layers Status: Valid
Basic dataStandard ID: GB/T 30654-2014 (GB/T30654-2014)Description (Translated English): Test method for lattice constant of ��-nitride epitaxial layers Sector / Industry: National Standard (Recommended) Classification of Chinese Standard: H21 Classification of International Standard: 77.040.20 Word Count Estimation: 10,189 Date of Issue: 12/31/2014 Date of Implementation: 9/1/2015 Regulation (derived from): National Standards Bulletin 2014 No. 33 Issuing agency(ies): General Administration of Quality Supervision, Inspection and Quarantine of the People's Republic of China, Standardization Administration of the People's Republic of China Summary: This Standard specifies the use of high-resolution X-ray diffraction test �� nitride epitaxial wafer lattice constant method. This Standard applies to the oxide substrate (Al2��3, Zn��, etc.) or a semiconductor substrate (GaN, Si, GaAs, SiC, etc.) epitaxiall GB/T 30654-2014: Test method for lattice constant of Ⅲ-nitride epitaxial layers---This is a DRAFT version for illustration, not a final translation. Full copy of true-PDF in English version (including equations, symbols, images, flow-chart, tables, and figures etc.) will be manually/carefully translated upon your order.Test method for lattice constant of Ⅲ-nitride epitaxial layers ICS 77.040.20 H21 National Standards of People's Republic of China Ⅲ nitride lattice constant of the epitaxial wafer test method Issued on. 2014-12-31 2015-09-01 implementation Administration of Quality Supervision, Inspection and Quarantine of People's Republic of China Standardization Administration of China released ForewordThis standard was drafted in accordance with GB/T 1.1-2009 given rules. Please note that some of the content of this document may involve patents. Distribution of this document Institutions do not assume the responsibility to identify these patents. The standard equipment by the National Standardization Technical Committee and the semiconductor material (SAC/TC203) and National Semiconductor Equipment and Materials Standards Materials Branch of the Technical Committee (SAC/TC203/SC2) jointly proposed and managed. This standard was drafted. Institute of Semiconductors. The main drafters of this standard. Sun Baojuan, Xia Zhao, Wang Junxi, Zeng Yiping, Li Jin Min. Ⅲ nitride lattice constant of the epitaxial wafer test method1 ScopeThis standard specifies the use of high-resolution X-ray diffraction test Ⅲ nitride epitaxial wafer lattice constant method. This standard applies to the oxide substrate (Al2O3, ZnO, etc.) or epitaxial growth on the (GaN, Si, GaAs, SiC, etc.) of a semiconductor substrate Nitride (Ga, In, Al) N monolayer or multilayer heteroepitaxial sheet lattice constant measurements. Other hetero epitaxial wafers measuring the lattice constant can be The reference standard.2 SymbolThe following symbols apply to this document. FWHM. full width at half peak height of the diffraction of the diffraction peak half the full width. ω. the angle between the incident light and the surface of the sample. 2θ. the angle between the detector and the incident light. χ axis. the tilt axis of the sample, and the sample surface intersected by the diffraction plane is made. χ angle. the sample surface and the diffraction plane intersecting angle. ω-2θ scan or 2θ-ω scan. linkage scan detector at twice the speed of scanning the sample. θB. X-ray generator and the angle of incident light between the reflective surfaces when diffraction.3 PRINCIPLE OF THE METHOD3.1 General Ⅲ nitride semiconductor crystalline epitaxial wafer relatively good integrity, the use of high resolution lattice constant X-ray diffraction measurement sample Not only easy, but also has high accuracy, no damage and no pollution. Methods of measurement of the lattice constant of the epitaxial wafer has two categories. the relative measurement The amount and method of absolute measurement method. 3.2 relative measurement method According to the epitaxial substrate, the peak position of the peak relative to the lattice constant of the epitaxial film is determined. In this measurement method, the form that the substrate does not occur Change, in a fully relaxed state, and then use the double-crystal diffraction or 3-axis crystal diffraction ω-2θ scanning, whereby an epitaxial film diffraction peak and lining Peak spacing bottom peak Δω. If the extension of the peak on the left side of the substrate peak, the epitaxial film is compressive strain state, Δω is negative; if the epitaxial substrate peak peak The right side of the epitaxial film in the tensile strain state, Δω is positive. According to Bragg equation 2dsinθB = nλ, to give the corresponding distance between the planes, namely Formula (1). de = sinθs sin (θs Δω) ds ... (1) Where. de --- spacing epitaxial film crystal face; ds --- spacing of the substrate crystal face; θs --- Bragg angle of the substrate crystal planes. ......Tips & Frequently Asked Questions:Question 1: How long will the true-PDF of GB/T 30654-2014_English be delivered?Answer: Upon your order, we will start to translate GB/T 30654-2014_English as soon as possible, and keep you informed of the progress. The lead time is typically 1 ~ 3 working days. The lengthier the document the longer the lead time.Question 2: Can I share the purchased PDF of GB/T 30654-2014_English with my colleagues?Answer: Yes. The purchased PDF of GB/T 30654-2014_English will be deemed to be sold to your employer/organization who actually pays for it, including your colleagues and your employer's intranet.Question 3: Does the price include tax/VAT?Answer: Yes. Our tax invoice, downloaded/delivered in 9 seconds, includes all tax/VAT and complies with 100+ countries' tax regulations (tax exempted in 100+ countries) -- See Avoidance of Double Taxation Agreements (DTAs): List of DTAs signed between Singapore and 100+ countriesQuestion 4: Do you accept my currency other than USD?Answer: Yes. If you need your currency to be printed on the invoice, please write an email to Sales@ChineseStandard.net. In 2 working-hours, we will create a special link for you to pay in any currencies. Otherwise, follow the normal steps: Add to Cart -- Checkout -- Select your currency to pay. |
