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GB/T 28632-2012 English PDF

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US$454.00 · In stock
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GB/T 28632-2012: Surface chemical analysis -- Auger electron spectroscopy and X-ray photoelectron spectroscopy -- Determination of lateral resolution
Status: Valid

Standard ID	USD	BUY PDF	Lead-Days	Standard Title (Description)	Status
GB/T 28632-2012	454	Add to Cart	3 days	Surface chemical analysis -- Auger electron spectroscopy and X-ray photoelectron spectroscopy -- Determination of lateral resolution	Valid

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Basic data

Standard ID: GB/T 28632-2012 (GB/T28632-2012)
Description (Translated English): Surface chemical analysis -- Auger electron spectroscopy and X-ray photoelectron spectroscopy -- Determination of lateral resolution
Sector / Industry: National Standard (Recommended)
Classification of Chinese Standard: G04
Classification of International Standard: 71.040.40
Word Count Estimation: 23,287
Quoted Standard: GB/T 22461-2008
Adopted Standard: ISO 18516-2006, IDT
Regulation (derived from): National Standards Bulletin 2012 No. 17
Issuing agency(ies): General Administration of Quality Supervision, Inspection and Quarantine of the People's Republic of China, Standardization Administration of the People's Republic of China
Summary: This standard specifies three conditions measured Auger electron spectroscopy and X- ray photoelectron spectroscopy lateral resolution approach. Straight edge method is suitable for the expected value is greater than 1��m lateral resolution of the instrume

GB/T 28632-2012: Surface chemical analysis -- Auger electron spectroscopy and X-ray photoelectron spectroscopy -- Determination of lateral resolution

---This is a DRAFT version for illustration, not a final translation. Full copy of true-PDF in English version (including equations, symbols, images, flow-chart, tables, and figures etc.) will be manually/carefully translated upon your order.
ICS71.040.40 G04 National Standards of People's Republic of China GB/T 28632-2012/ISO 18516.2006 Surface chemical analysis - Auger electron spectroscopy and X-ray photoelectron spectroscopy measured lateral resolution (ISO 18516.2006, IDT) Issued on. 2013-02-01 2012-07-31 implementation Administration of Quality Supervision, Inspection and Quarantine of People's Republic of China Standardization Administration of China released

Preface Ⅰ 1 Scope 1 2 Normative references 1 3 Terms, definitions, symbols and abbreviations 1 4 General Information 2 5 straight edge measured lateral resolution 3 Measurement of lateral resolution raster 6 8 7 Golden Island measured lateral resolution 10 XPS instrument Appendix A (informative) with a focused X-ray beam spot 14 Determination of lateral resolution Annex B (informative) secondary electron spectroscopy lateral resolution line scan measured 16 Annex C (informative) scanning Auger electron spectroscopy measurement lateral resolution 17 References 19 GB/T 28632-2012/ISO 18516.2006

Foreword

This standard rule according to GB/T 1.1-2009 given draft. This standard uses the translation method identical with ISO 18516.2006 "Surface chemical analysis - Auger electron spectroscopy and X-ray photoelectron Determination of lateral resolution spectrum. " The standard micro-beam analysis by the National Standardization Technical Committee (SAC/TC38) and focal points. This standard was drafted. Shanghai Measurement and Testing Technology Research Institute, nanotechnology and application National Engineering Research Center. The main drafters of this standard. Xu, Lu Min, Wu Limin, Zhu Lina, Xinli Hui, Dannong, Zhang Bing. GB/T 28632-2012/ISO 18516.2006 Surface chemical analysis - Auger electron spectroscopy and X-ray photoelectron spectroscopy measured lateral resolution

1 Scope

This standard specifies the Auger electron spectroscopy and X-ray photoelectron spectroscopy method for measuring the lateral resolution under three conditions. Straight edge Law applies to the lateral resolution is greater than the expected value of the instrument 1μm. Grid method is suitable for the lateral resolution of the expected value is greater than 20nm, less than The instrument 1μm. Golden Island law applies to the lateral resolution is smaller than the expected value of the instrument 50nm. Appendix A, Appendix B and Appendix C gives an example of the measurement of lateral resolution with FIG.

2 Normative references

The following documents for the application of this document is essential. For dated references, only the dated edition applies to this article Member. For undated references, the latest edition (including any amendments) applies to this document. GB/T 22461-2008 Surface chemical analysis - Vocabulary (ISO 18115.2001, IDT) 3 Terms, definitions, symbols and abbreviations 3.1 Terms and Definitions GB/T 22461-2008 defined and the following terms and definitions are applicable to this document. 3.1.1 Lateral resolution resolution, lateral In the sample surface or a plane within the imaging plane at right angles to the optical axis can be trusted when the composition change region determined points tested distance. Note 1. The selected plane should be described. Note 2. In practice, the lateral resolution can be recognized as follows. Strength (i) on a very small sample of the emission points emit distribution half width (FWHM) or (i) along the sample When the product signal and to distinguish between nature and contain well-defined part of a step function line scan, the intensity of between 12% and 88% points The distance of the Gaussian intensity distribution, the two values \u200b\u200bare equal. To other distribution, the choice of the other parameters may be more appropriate. For stairs The distance between the function of scan line spectrum often applied strength distance between 20% and 80% points or 16% and 84%, two points on the Gaussian distribution Function, the latter pair of the 2σ width. GB/T 22461-2008, the definition 5.255 Note 3. For the purposes of this standard, the preferred plane measurement sample. 3.2 Symbols and abbreviations AES --- Auger electron spectroscopy; d --- is incident on the sample surface of the electron beam (axial symmetry) beam diameter; FWHM --- the maximum height of the full width at half (the half-width); XPS --- X-ray photoelectron spectroscopy; χ --- lateral resolution required for the measurement parameter; lateral resolution of the measurement starts at the maximum signal strength χ%, at the end of the letter Maximum signal strength (100-χ)% in δr under (50) case, χ 25.; The angle between the incident electron beam or X-ray beam and the surface normal between the upper surface θ --- samples. GB/T 28632-2012/ISO 18516.2006 ......

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Question 1: How long will the true-PDF of GB/T 28632-2012_English be delivered?

Answer: Upon your order, we will start to translate GB/T 28632-2012_English as soon as possible, and keep you informed of the progress. The lead time is typically 1 ~ 3 working days. The lengthier the document the longer the lead time.

Question 2: Can I share the purchased PDF of GB/T 28632-2012_English with my colleagues?

Answer: Yes. The purchased PDF of GB/T 28632-2012_English will be deemed to be sold to your employer/organization who actually pays for it, including your colleagues and your employer's intranet.

Question 3: Does the price include tax/VAT?

Answer: Yes. Our tax invoice, downloaded/delivered in 9 seconds, includes all tax/VAT and complies with 100+ countries' tax regulations (tax exempted in 100+ countries) -- See Avoidance of Double Taxation Agreements (DTAs): List of DTAs signed between Singapore and 100+ countries

Question 4: Do you accept my currency other than USD?

Answer: Yes. If you need your currency to be printed on the invoice, please write an email to Sales@ChineseStandard.net. In 2 working-hours, we will create a special link for you to pay in any currencies. Otherwise, follow the normal steps: Add to Cart -- Checkout -- Select your currency to pay.